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- research-article
Dielectric Reliability Study of 21 nm Pitch Interconnects with Barrierless Ru Fill
- A. Leśniewska,
- P.J. Roussel,
- D. Tierno,
- V. Vega Gonzalez,
- M. H. van der Veen,
- P. Verdonck,
- N. Jourdan,
- C.J. Wilson,
- Zs. Tőkei,
- K. Croes
April 20202020 IEEE International Reliability Physics Symposium (IRPS)https://doi.org/10.1109/IRPS45951.2020.9129246 - research-article
Metal reliability mechanisms in Ruthenium interconnects
- O. Varela Pedreira,
- M. Stucchi,
- A. Gupta,
- V. Vega Gonzalez,
- M. van der Veen,
- S. Lariviere,
- C.J. Wilson,
- Zs Tőkei,
- K. Croes imec
April 20202020 IEEE International Reliability Physics Symposium (IRPS)https://doi.org/10.1109/IRPS45951.2020.9129087 - research-article
Reliability study on cobalt and ruthenium as alternative metals for advanced interconnects
- O. Varela Pedreira,
- K. Croes,
- A. Leśniewska,
- C. Wu,
- M. H. van der Veen,
- J. de Messemaeker,
- K. Vandersmissen,
- N. Jourdan,
- L.G. Wen,
- C. Adelmann,
- B. Briggs,
- V. Vega Gonzalez,
- J. Bömmels,
- Zs. Tőkei
April 20172017 IEEE International Reliability Physics Symposium (IRPS)https://doi.org/10.1109/IRPS.2017.7936340 - research-article
Semi-empirical interconnect resistance model for advanced technology nodes: A model apt for materials selection based upon test line resistance measurements
- Ph. J. Roussel,
- I. Ciofi,
- R. Degraeve,
- V. Vega Gonzalez,
- N. Jourdan,
- R. Baert,
- D. Linten,
- J. Bömmels,
- Z. Tokei,
- G. Groeseneken,
- A. Thean
April 20162016 IEEE International Reliability Physics Symposium (IRPS)https://doi.org/10.1109/IRPS.2016.7574615