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View all- Leśniewska APedreira OLofrano MMurdoch Gvan der Veen MDangol AHoriguchi NTőkei ZCroes K(2021)Reliability of a DME Ru Semidamascene scheme with 16 nm wide Airgaps2021 IEEE International Reliability Physics Symposium (IRPS)10.1109/IRPS46558.2021.9405192(1-6)Online publication date: 21-Mar-2021