Kim et al., 2003 - Google Patents

Positioning performance and straightness error compensation of the magnetic levitation stage supported by the linear magnetic bearing

Kim et al., 2003

View PDF
Document ID
532407015293376535
Author
Kim O
Lee S
Han D
Publication year
Publication venue
IEEE Transactions on Industrial Electronics

External Links

Snippet

This paper reports high-precision motion control at the target position and the offline compensation of the straightness error occurring during the motion of the magnetically levitated stage supported by the linear magnetic bearing. The linear magnetic bearing is …
Continue reading at www.academia.edu (PDF) (other versions)

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/19—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37275—Laser, interferometer

Similar Documents

Publication Publication Date Title
Kim et al. Positioning performance and straightness error compensation of the magnetic levitation stage supported by the linear magnetic bearing
EP1055163B1 (en) High-speed precision positioning apparatus
Kim et al. High-precision magnetic levitation stage for photolithography
JP3762401B2 (en) Positioning apparatus, exposure apparatus, and device manufacturing method
US8084896B2 (en) Monolithic stage positioning system and method
Nguyen et al. Design and control of a compact lightweight planar positioner moving over a concentrated-field magnet matrix
Stadler et al. High precision hybrid reluctance actuator with integrated orientation independent zero power gravity compensation
Hu et al. Extended range six-DOF high-precision positioner for wafer processing
Jung et al. Study on a novel contact-free planar system using direct drive DC coils and permanent magnets
JPS60134918A (en) Precise positioning apparatus
WO2017142481A1 (en) High precision localizing platforms
CN108279551B (en) Photoetching machine motion platform, micro motion platform thereof and control method
Hollis A planar XY robotic fine positioning device
Serge et al. Motion systems: An overview of linear, air bearing, and piezo stages
Ro et al. A compact ultra-precision air bearing stage with 3-DOF planar motions using electromagnetic motors
Takahashi Design Concept and Structural Configuration of Magnetic Levitation Stage with Z-Assist System
Huang et al. High-performance and high-precision servo control of a single-deck dual-axis PMLSM stage
Khim et al. A three-axis translation stage using opposing wedges with error compensation
JP2002189090A (en) X-y stage device
KR100434975B1 (en) Positioning System of Nano-Meter Stage and Method Thereof
Kim et al. Design and control of a 6-DOF positioner with high precision
Okyay Mechatronic Design, Dynamics, Controls, and Metrology of a Long-Stroke Linear Nano-Positioner
JP3409864B2 (en) Motor device having linear motor structure
Takahashi et al. euspen’s 20th International Conference & Exhibition, Geneva, CH, June 2020
Dian et al. Precision positioning control of a sawyer motor-based two-axis planar motion stage