Almanza-Workman et al., 2011 - Google Patents
Fabrication of three-dimensional imprint lithography templates by colloidal dispersionsAlmanza-Workman et al., 2011
View PDF- Document ID
- 2706129020099957135
- Author
- Almanza-Workman A
- Taussig C
- Jeans A
- Cobene R
- Publication year
- Publication venue
- Journal of Materials Chemistry
External Links
Snippet
Self-aligned imprint lithography (SAIL) enables the patterning and alignment of submicron- sized features on metre-scaled flexible substrates in the roll-to roll (R2R) environment. SAIL solves the problem of precision interlayer registry on a moving web by encoding all the …
- 239000006185 dispersion 0 title abstract description 34
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