WO2024117774A1

WO2024117774A1 - Measurement and inspection device for measuring vibration

Info

Publication number: WO2024117774A1
Application number: PCT/KR2023/019456
Authority: WO
Inventors: 이시창; 이종수
Original assignee: 아이지온파트너스 주식회사
Priority date: 2022-11-30
Filing date: 2023-11-29
Publication date: 2024-06-06

Abstract

Provided is a measurement and inspection device for monitoring or diagnosing the condition of a mechanical device by measuring vibration. A processing unit of the device comprises: (a) a reception unit; (b) an A/D conversion unit; (c) a domain conversion unit; (d) a processing signal information generation unit; and (e) a transmission unit. Time domain processing signal information generated by (d) the processing signal information generation unit includes sampling time period information and sampling time interval information, frequency domain processing signal information generated by the processing signal information generation unit (d) includes sampling frequency section information and sampling frequency interval information, and with respect to the transmission unit (e), first data includes an identifier that identifies whether the processing signal is a time domain signal or a frequency domain signal, processing signal information of a domain indicated by the identifier, ID information of the mechanical device from which the processing signal information was collected, and collected date and time information, and with respect to the transmission unit (e), second data includes a processing signal indicated by the processing signal information indicated by the first data.

Description

Measurement inspection device that measures vibration

The present invention relates to a measurement and inspection device for monitoring or diagnosing the state of a mechanical device by measuring vibration.

In machines involving vibration, technology to diagnose or monitor the condition of the machine by measuring vibration is widely used.

With the development of ICT technology, the amount of machine information collected increases, and the need for remote monitoring, wireless data transmission, and storage and processing of measurement information increases, resulting in the need to efficiently transmit, manage, and store measured and processed vibration information. There is.

In the concept of a smart factory, it is necessary to use accumulated information to go beyond simply diagnosing a single machine to diagnose and monitor multiple machines of the same type or the same group within the same space or in separated spaces. Even if the status has been determined, a re-adjudication/reexamination of the decision result may be requested as necessary.

However, since the raw data that measures vibration in real time and the signal processing data that has gone through the signal processing process have a large capacity, the load on the system increases during processing and a delay in processing speed may occur. In particular, when operating with a signal processing unit and storage unit for vibration measurement information in an integrated system rather than using a processing unit and storage unit for each individual machine, it may be affected by an increase in load. Additionally, in the case of remote processing and storage over a communication network, processing or storage load may reduce system efficiency.

The technical problem that the present invention seeks to solve is that, despite the increase in the amount of machine information collected with the development of ICT technology and the increasing need for remote monitoring, wireless data transmission, storage and processing of measurement information, etc., Efficiently transmits, manages, and stores processed vibration information.

The technical problems of the present invention are not limited to the technical problems mentioned above, and other technical problems not mentioned will be clearly understood by those skilled in the art from the description below.

According to the present invention, there is a measurement and inspection device for monitoring or diagnosing the state of a mechanical device by measuring vibration,

The measurement and inspection device includes a processing unit,

The processing unit,

(a) a receiving unit that converts the physical vibration of the mechanical device into an electrical signal and receives it from a vibration sensor attached to the mechanical device;

(b) an A/D conversion unit that converts the electrical signal from analog to digital;

(c) a domain converter that converts the time domain signal output from the A/D converter into a frequency domain signal;

(d) a processed signal information generator that generates time domain processed signal information for the processed signal that is the time domain signal, or frequency domain processed signal information for the processed signal that is the frequency domain signal;

(e) A transmission unit that transmits or stores first data and second data separately.

Includes,

The time domain processing signal information generated by the processing signal information generating unit of (d) includes sampling time section information and sampling time interval information,

The frequency domain processing signal information generated by the processing signal information generation unit of (d) includes sampling frequency section information and sampling frequency interval information,

In the delivery unit of (e), the first data is

- An identifier that identifies whether the processed signal is a time domain signal or a frequency domain signal,

- Processing signal information of the area indicated by the identifier

- ID information of the mechanical device from which the processing signal information was collected, and information on the date and time of collection

Includes,

In the transmission unit of (e), the measurement and inspection device is provided, wherein the second data includes a processed signal indicated by the processed signal information indicated by the first data.

Additionally, according to the present invention, there is provided a measurement and inspection device for monitoring or diagnosing the state of a mechanical device by measuring vibration,

The measurement and inspection device includes a processing unit,

The processing unit,

(e) A transmission unit that transmits or stores the first data, 2-1 data, and 2-2 data separately.

Includes,

In the delivery unit of (e), the first data is

- Processing signal information of the area indicated by the identifier

Includes,

In the transmission unit of (e), the 2-1 data includes a processing signal indicated by time domain processing signal information indicated by the first data,

In the transmission unit of (e), the measurement and inspection device is provided, wherein the 2-2 data includes a processed signal indicated by frequency domain processed signal information indicated by the first data.

Preferably, it further includes a storage unit,

The storage unit includes a first storage unit and a second storage unit,

The first data is stored in the first storage unit,

The second data is stored in the second storage unit.

Preferably, it further includes a storage unit,

The storage unit includes a first storage unit, a 2-1 storage unit, and a 2-2 storage unit,

The first data is stored in the first storage unit,

The 2-1 data is stored in the 2-1 storage unit,

The 2-2 data is stored in the 2-2 storage unit.

Preferably, the processing unit generates normal status information, which indicates whether the mechanical device is normal, and adds it to the first data.

Preferably, the first data includes sensor position information that identifies where the vibration sensor is mounted on the mechanical device.

Preferably, in the A/D converter, the sampling frequency is set to be at least 2 times and at most 2.2 times the highest peak frequency of the electrical signal,

The first data includes the sampling frequency.

Preferably, if there are a plurality of mechanical devices, one of the plurality of mechanical devices is referred to as a target facility, and any of the mechanical devices excluding the target facility is referred to as other facilities,

The processing unit includes a subtraction conversion unit that has a function of converting a signal by subtracting noise vibration generated from the other equipment other than the target equipment.

Preferably, the subtraction conversion unit,

(i) Measure the vibration felt by each mechanical device when only one mechanical device is operating among the plurality of mechanical devices,

(ii) Based on the vibration measurements in (i) above, the influence of the other equipment on the target equipment is numerically determined,

(iii) When the plurality of mechanical devices are in operation, the influence of the other equipment is subtracted from the specific equipment to obtain a corrected vibration value of the specific equipment.

The processing unit senses the operating load of the other equipment and determines the reflection of noise vibration reduction to the target equipment.

Preferably, the processing unit,

(iv) measure or receive power consumption for each of the plurality of mechanical devices,

(v) monitoring whether power consumption for each of the plurality of mechanical devices increases or decreases,

(vi) Measure or calculate the impact of vibration of the other equipment on the target equipment according to the amount of increase in power consumption of the other equipment.

(vii) From the vibration measured in the target equipment, the value obtained by subtracting the influence measured or calculated in (vi) above is used as the corrected vibration value of the target equipment.

Preferably, a plurality of the vibration sensors are installed in one of the mechanical devices,

Sensor position information for each vibration sensor is identified, and vibration information data from the vibration sensor corresponding to the sensor position information is compared with pre-stored reference data to determine whether the specific position is abnormal.

Preferably, when comparing vibration information data from the vibration sensor with reference data,

In addition to reference data for one of the vibration sensors, reference data for a set of a plurality of the vibration sensors is compared.

Preferably, when the reference data corresponding to the vibration sensor is not stored in advance, the user of the mechanical device specifies the reference data and includes it in the first data.

Preferably, when the user specifies the reference data, vibration information data of a machine that has operated without problems for a certain period of time is used.

According to the present invention, the inspection device 10 of the present invention measures vibration occurring in one or more machines (F1 in FIG. 2 or F1 to FM in FIG. 5) (referred to as machines, mechanical devices, equipment, facilities, etc.) It is used as a factor (measurement target) and the measured vibration value is processed to perform the function of diagnosing and monitoring machine abnormalities. This function can be applied to a variety of machines, equipment, and facilities, including components that cause vibration.

However, this is an example of the effect, and of course, the effect resulting from the configuration of the present invention is not limited to this.

The effects according to the present invention are not limited to the contents exemplified above, and further various effects are included in the present specification.

Figure 1 is a schematic configuration diagram of the measurement and inspection device 10 according to the present invention.

Figure 2 is a diagram showing an example of applying the measurement and inspection device 10 of the present invention to a mechanical device F1 that is a measurement target.

Figure 3 is a diagram of an embodiment explaining each component of the present invention in more detail.

Figure 4 is a diagram of another embodiment explaining each component of the present invention in more detail.

Figure 5 shows an embodiment of the present invention, which is different from Figure 2.

Figure 6 is a processing flowchart of the measurement and inspection device 10 of the present invention.

Figure 7 shows a plurality of sensors attached to machine 1 (F1) and machine 2 (F2), respectively.

Figures 8a and 8b are one continuous flow and show a flow related to noise reduction from adjacent facilities.

Figures 9A and 9B are one continuous flow and show a flow related to an increase in power consumption (increase in load).

The advantages and features of the present invention and methods for achieving them will become clear by referring to the embodiments described in detail below along with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below and will be implemented in various different forms. The present embodiments only serve to ensure that the disclosure of the present invention is complete and that common knowledge in the technical field to which the present invention pertains is not limited. It is provided to fully inform those who have the scope of the invention, and the present invention is only defined by the scope of the claims. Like reference numerals refer to like elements throughout the specification.

The present invention relates to a measurement and inspection device (10) for monitoring or diagnosing the state of a mechanical device by measuring vibration.

The inspection device 10 of the present invention measures vibration occurring in one or more machines (F1 in FIG. 2 or F1 to FM in FIG. 5) (referred to as machines, mechanical devices, equipment, facilities, etc.) as a measurement factor (measurement target). and processes the measured vibration values to perform the function of diagnosing and monitoring machine abnormalities. This function can be applied to a variety of machines, equipment, and facilities, including components that cause vibration.

The main point of the present invention is that it can streamline diagnostic monitoring using vibration measurement signals, improve the reliability of diagnosis and monitoring, and reduce system load during automation of manufacturing and integrated management of mechanical facilities such as smart factories or Industry 4.0. It is there.

This device 10 includes a vibration sensor 11 that measures vibration, a processing unit 12 and a storage unit 13 that process the measured vibration.

However, this is an example, and the vibration sensor 11 may be a part of a machine (F1 to FM in FIG. 5) or equipment that is a measurement target.

That is, the measurement and inspection device 10 (inspection system) of the present invention is

(i) may have the vibration sensor 11 as part of its components,

(ii) Although it is not part of the measurement and inspection device 10, it can also be implemented in the form of receiving a measurement signal related to vibration from the vibration sensor 11 attached to the measurement object.

In that sense, the vibration sensor 11 in FIG. 1 is indicated by a dotted line. In other words, the presence of the vibration sensor 11 itself is essential, but this means that the vibration sensor 11 may or may not be part of the measurement and inspection device 10.

The same applies to the fact that the storage unit 13 is indicated by a dotted line. Components for storing data are of course necessary, but this may be done on its own within the processing unit 12, or as a separate component located outside the processing unit 12 (which does not necessarily mean outside the measurement and inspection device 10). This means that even the storage unit 13 is fine.

The processed signal is a signal that has undergone processes such as noise removal, sampling, and conversion from the measurement signal (signal from the vibration sensor 11). Depending on the situation, the output of the A/D converter 12-2 may be referred to as a processed signal, or the output of the area converter 12-3 may be referred to as a processed signal. In this specification, the term 'processed signal' is often used to encompass a time domain processed signal and a frequency domain processed signal.

What is shown as machine 1 (F1) in FIG. 2 is not part of the measurement and inspection device 10, but is the object that the measurement and inspection device 10 is intended to measure.

The member labeled Machine 1 (F1) may be called by various names such as machine, mechanical device, equipment, or facility. Although it is not limited thereto, as a typical example, it may be one or more of 10 identical lathes (machine tools) placed in a factory. Although only machine 1 (F1) is shown in FIG. 2, the measurement target may be one machine, and for example, as described later in FIG. 5, multiple machines (preferably multiple machines of the same model) can be used as measurement targets. good night.

In Fig. 2, a vibration sensor 11 is installed (attached) to machine 1 (F1). This vibration sensor is connected to the processing unit 12, and the processing unit 12 is connected to the storage unit 13.

The presence of the vibration sensor 11 itself is essential, but it has been described above with reference to FIG. 1 that the vibration sensor 11 may or may not be part of the measurement and inspection device 10.

In FIG. 3, the vibration sensor 11 converts the physical vibration of one or more mechanical devices (such as F1) to be measured into electrical signals.

Although not limited thereto, the vibration sensor 11 may be one or more of a displacement sensor 11A that measures displacement according to the physical quantity to be measured, a speed sensor 11B that measures speed, and an acceleration sensor 11C that measures acceleration. there is. Of course, it could also be a sensor that measures other types of physical quantities.

The processing unit 12 includes reception of data from a vibration sensor, AD conversion of an electrical signal of vibration, conversion of a time domain signal into a frequency domain, processing signal information generation function, and transmission/storage.

This includes the reception unit 12-1, A/D conversion unit 12-2, area conversion unit 12-3, processing signal information generation unit 12-4, and transmission (and/or storage) shown in FIG. ) is carried out by part (12-5).

The time domain processing signal information includes sampling time section information and sampling time interval information, and the frequency domain processing signal information includes sampling frequency section information and sampling frequency interval information.

The processing unit 12 divides the signal into first data D1 and second data D2 and transmits and/or stores the signal (transfer/storage unit 12-5).

The first data (D1) is

(i) an identifier that identifies the inclusion of time-domain information and frequency-domain information in the processed signal (processed signal identifier);

(ii) Information on the processed signal in the area indicated by the processed signal identifier in (i) above,

(iii) Machine ID information from which processing signal information was collected, collected date and time information

Includes.

The second data D2 includes the processed signal indicated by the processed signal information indicated by the first data D1.

The measurement and inspection device 10 may be provided with a storage unit 13 that stores data (e.g., first data D1, second data D2, and/or other data) separately from the processing unit 12. there is. Of course, it is also possible for the transmission/storage unit (transmission and/or storage unit) 12-5 of the processing unit 12 to perform the function of the storage unit 13 without a separate storage unit 13. In that sense, the storage unit 13 is indicated by a dotted line.

The processing unit 12 may suspend or omit the generation of the frequency domain processing signal according to the user's settings, and in this case, the second data D2 may consist of only the time domain processing signal. That is, if necessary, the area conversion unit 12-3 may not exist at all, or even if the area conversion unit 12-3 exists, it may be turned off so that it does not function.

The processing unit 12 may exist for each individual machine, or one processing unit 12 may be provided to process vibration measurement signals from multiple machines. That is, as will be described later in FIG. 5, if there are M measurement objects (F1 to FM), it is possible to process signals from the M measurement objects (F1 to FM) with only the processing unit 12 (this case is also 5), or if there are M measurement objects (F1 to FM), it is possible for there to be M processing units 12, each corresponding to one machine (this case is not shown).

The processing unit 12 can generate information about the state of the machine, that is, whether it is normal, and add it to the first data D1.

The first data D1 may include information on whether there is a reference processing signal for reference in determining the machine state.

The first data D1 may include not only machine measurement signal information but also information on the installation and operation environment of the machine, such as temperature and humidity.

When one or more vibration sensors 11 are mounted on a machine (such as F1), information identifying the machine part where the sensor 11 where the vibration signal is measured may be mounted may be included in the first data D1.

The first data D1 and the second data D2 may be transmitted/stored as one bundle.

The first data D1 and the second data D2 may be transmitted, stored, or managed separately.

The first data D1 and the second data D2 may each include an association identifier capable of associating a pair of data.

When the first data (D1) and the second data (D2) are transmitted, stored, and/or managed separately, separate storage units for storing the first data (D1) and the second data (D2) may be provided.

FIG. 4 is almost the same as FIG. 3, but the difference is in the presence or absence of the 2-1 storage unit 12-2' and the 2-2 storage unit 12-2". Strictly speaking, FIG. The functions of the second storage unit 12-2 in 3 are separated into the 2-1 storage unit 12-2' and the 2-2 storage unit 12-2" in FIG. 4. And, although it cannot be seen from Figure 4 alone, the function of the transmission/storage unit 12-5 is also somewhat different accordingly. Depending on the situation, the function of the processing signal information generating unit 12-4 may also be somewhat different.

4 , the measurement and inspection device 10 for monitoring or diagnosing the state of a mechanical device by measuring vibration includes a vibration sensor 11 for measuring vibration, a processing unit 12 for processing the measured vibration, and a storage unit ( 13).

As described in FIG. 3, the vibration sensor 11 converts physical vibration into an electrical signal, and the processing unit 12 performs A/D conversion of the electrical signal of the vibration, conversion of the time domain signal to the frequency domain, and processing signals. Includes information generation function. The time domain processing signal information includes sampling time section information and sampling time interval information, and the frequency domain processing signal information includes sampling frequency section information and sampling frequency interval information.

However, the difference is that the transmission/storage unit 12-5 of the processing unit 12 transmits the signal to the first data D1, the 2-1 data D2-1, and the 2-2 data D2- 2) Separate and transmit or store.

That is, in FIG. 3, the transmission/storage unit 12-5 is divided into first data D1 and second data D2. The first data is a type of metadata (metadata + identification information). The second data is a processed signal and may be, for example, raw data.

In contrast, in FIG. 4, the transmission/storage unit 12-5 divides the data into first data D1, 2-1 data D2-1, and 2-2 data D2-2. The first data is a type of metadata (metadata + identification information). The 2-1st data is a time domain processed signal among processed signals and may be, for example, raw data. The 2-2 data is a frequency domain processed signal among processed signals and may be raw data, for example.

In other words, in FIG. 3, the first data D1 is stored in the first storage unit 13-1 of FIG. 3, and the second data D2 is stored in the second storage unit 13-2 of FIG. 3. do.

Meanwhile, in FIG. 4, the first data D1 is stored in the first storage unit 13-1 of FIG. 4, and the 2-1 data D2-1 is stored in the second storage unit 13-2 of FIG. 4. ), and the 2-2 data (D2-2) is stored in the 2-2 storage unit (13-2") of FIG. 4.

In a sense, it can be seen that the union of the 2-1 data (D2-1) and the 2-2 data (D2-2) related to FIG. 4 becomes the second data (D2) related to FIG. 3.

The first data (D1) is

(i) An identifier that identifies the inclusion of time domain information and frequency domain information in the processed signal,

(ii) Information on the processing signal in the area indicated by the processing signal identifier in (i) above,

Including,

The 2-1 data (D2-1) includes a processing signal indicated by the processing signal information in the time domain indicated by the first data (D1),

The 2-2 data D2-2 includes a processed signal indicated by the processed signal information in the frequency domain indicated by the first data D1.

The inspection device 10 of the present invention uses vibration occurring in one or more machines (F1 to FM) (referred to as machines, mechanical devices, equipment, facilities, etc.) as a measurement factor (measurement target), and processes the measured vibration value. It performs the function of diagnosing and monitoring machine abnormalities. This function can be applied to a variety of machines, equipment, and facilities, including components that cause vibration.

In the configuration of one embodiment of the present invention, the smart factory is equipped with a number of similar equipment (F1 to FM; mechanical devices), and a sensor 11 (vibration sensor 11), which is a means of measuring one or more vibrations for each machine. ), and the plurality of sensors 11 transmit the measured signals to the processing unit 12 (specifically, the receiving unit 12-1 of the processing unit 12).

Looking at Figure 5, it can be seen that this is the case where there are M machines (that is, from F1 to FM).

And, it can be seen that n sensors are attached to each machine. For example, n sensors from sensor 1-1 to sensor 1-n are attached to machine 1 (F1), and these are referred to as 'sensor 11 (vibration sensor 11) for machine 1 (F1)'. It is said that In addition, machine 2 (F2) is equipped with n sensors of sensors (2-1) to sensors (2-n), which are referred to as 'sensor 11 (vibration sensor 11) for machine 2 (F2)'. It is said that For example, n sensors from sensor (M-1) to sensor (M-n) are attached to machine M (FM), and this is called 'sensor 11 (vibration sensor 11) for machine M (FM)'. .

If M = 1 (i.e., there is one machine to be measured), the form is as shown in Figure 2.

However, it will be easily understood that monitoring and diagnosis of the plurality of mechanical devices can be performed more efficiently by attaching the same type of sensor 11 to the plurality of machines (F1 to FM) of the same type.

Looking at Figure 2, the vibration sensor 11 is shown as attached to the machine (F1). The vibration sensor 11 may be a single sensor, but this does not necessarily mean that there is only one vibration sensor 11 per machine. . As shown in Figure 5, one or more sensors (e.g. 1-1, 1-2, ... 1-n) are called vibration sensors 11 (collectively) for machine 1 (F1). Because you can see it.

Of course, for consistency of measurement and analysis, it is preferable that Machine 1 (F1) to Machine M (FM) are of the same type (e.g., the same model), and for sensors, 1 is the first sensor for each machine (F1 to FM). -1, 2-1, ..., M-1 are the same sensors, and the second sensors for each machine (F1~FM), 1-2, 2-2, ..., M-2, are the same sensors. It is a sensor, and it would be desirable for the nth sensor 1-n, 2-n, ..., M-n for each machine (F1 to FM) to be the same sensor.

Depending on the situation, the sensors 1-1 and 1-2 may be the same (that is, two or more sensors of the same type may be attached to one machine). This is because it allows a more detailed understanding of vibrations that may vary from part to part.

The processing unit 12 performs a signal processing function to process the analog vibration signals measured by each sensor 11 into data that can be used for diagnostic monitoring of the machine, such as digitization and Fourier transformation, and provides information related to the processed signals. It performs the function of generating, managing, transmitting, and storing processing signals and generated information.

Information about the processed signal is basically composed of time domain processed signal information including sampling time section information and sampling time interval information, and frequency domain processed signal information including sampling frequency section information and sampling frequency interval information. .

The details have been described in relation to each member 12-1 to 12-5 of the processing unit 12 in FIGS. 3 and 4.

The processing unit 12 may additionally determine whether the machine equipped with the sensor 11 that generated the signal is normal based on the processing signal and add it to the generated information. The standard for determining whether it is normal is by referring to the information on the previously processed signal measured by the relevant sensor 11 and the processed signal processed by the processing unit of the signal measured by sensors 11 mounted at the same location in other machines of the same type. Determine whether the sensor 11 measured value processing signal is normal.

In addition to adding whether the processed signal is normal or not as signal information, the processed signal is used as a reference processing signal to determine whether the vibration signal measured by the same equipment (F1 to FM) and the same location sensor (11) is abnormal in the future. Hanji can be added to the creation information. Processing signals marked as available for reference in this way can be added to the existing reference processing signal group and used to set reference thresholds and limits and calculate monitoring standards. The processing of the reference group and the judgment criteria are important factors that determine the reliability of the judgment, so separate mention is required.

In the processing signal transmission and storage functions mentioned in the processing unit 12 function, the processing signal and processing signal information can be transmitted and stored as a bundle, and in this case, they are stored in one storage unit 13.

Considering the capacity of the processed signal, the capacity of the storage unit 13 for storing the processed signal, and the processing efficiency of the storage and reproduction process, the processed signal information and the processed signal are stored in a separate storage unit (for example, the processed signal information is stored in the first data ( Stored in the first storage 13-1 as all or part of D1), the processed signal can be stored in the second storage 13-2 as all or part of the second data D2 (see above) (see Figure 3).

Additionally, the processed signal can be transmitted or stored separately into a time domain processed signal and a frequency domain processed signal, each in a separate storage unit (e.g., the processed signal information is stored in the first data D1 as all or part of the first data D1). Stored in the storage 13-1, the time domain processed signal is stored in the 2-1 storage unit 13-2' as all or part of the 2-1 data D2-1, and the frequency domain processed signal is stored in the 2-1 storage unit 13-2'. All or part of the 2-2 data (D2-2) can be stored in the 2-2 storage unit (13-2") (see FIG. 4 above).

That is, the second storage unit 13-2 in FIG. 5 follows the structure of the storage unit 13 in FIG. 3, and the storage unit 13-2 in FIG. 5 is similar to the storage unit 13 in FIG. 4. As in, it may be divided into a 2-1 storage unit 13-2' and a 2-2 storage unit 13-2".

When transmitting and storing the processed signal (included in the second data (D2)) and the processed signal information (included in the first data (D1)) separately, the processing unit 12 transmits and stores the processed signal (D2) and the processed signal information (included in the first data (D1)) An identifier associated with D1) is created, attached to each, transmitted/stored, and the corresponding processed signal (D2) can be searched for information during playback.

As shown in Figure 6, first, in S0, at least one vibration sensor 11 is attached to the machine/equipment/facility (F1 to FM) that is the measurement target, and the vibration sensor 11 is attached to the machine/equipment/facility (F1 to FM). FM) converts physical vibration into a signal (electrical signal).

This S0 step is a step performed by the measurement and inspection device 10 if the vibration sensor 11 is a part of the measurement and inspection device 10. If the vibration sensor 11 is a part of the measurement and inspection device 10, the S0 step is a step performed by the measurement and inspection device 10. If not, this is a previous step to the step performed by the measurement and inspection device 10.

Next, in S1, (the physical vibration of the mechanical device is converted into an electrical signal) is received from the vibration sensor 11 attached to the mechanical device (F1, etc.) (receiving unit 12-1).

In S2, the electrical signal is converted from analog to digital (A/D conversion unit 12-2).

In S3, the time domain signal, which is the signal output from the A/D converter 12-2, is converted into a frequency domain signal (domain converter 12-3).

In S4, time domain processing signal information for a processing signal that is a time domain signal or frequency domain processing signal information for a processing signal that is a frequency domain signal is generated (processing signal information generating unit 12-4).

In S5, (in relation to the configuration shown in FIG. 3) first data and second data are separately transmitted or stored (transmission/storage unit 12-5). Alternatively, (in relation to the configuration shown in FIG. 4) the first data, the 2-1 data, and the 2-2 data are transmitted or stored separately (transmission/storage unit 12-5).

In S4, the time domain processing signal information generated by the processing signal information generating unit 12-4 includes sampling time section information and sampling time interval information.

In S4, the frequency domain processing signal information generated by the processing signal information generating unit 12-4 includes sampling frequency section information and sampling frequency interval information.

In S5, in the transmission unit (transmission/storage unit) 12-5, the first data D1 is

- Processing signal information of the area indicated by the identifier

Includes.

In S5, in the transmission unit (transmission/storage unit) 12-5 (in relation to the configuration of FIG. 3), the second data D2 is processed signal information indicated by the first data D1. Includes the processing signal indicated by .

Or, in S5, in the transmission unit (transmission/storage unit) 12-5 (in relation to the configuration of FIG. 4), the 2-1 data (D2-1) is the first data (D1) It includes a processed signal indicated by the time domain processed signal information indicated by , and the 2-2 data D2-2 includes a processed signal indicated by the frequency domain processed signal information indicated by the first data D1.

Each stage (S0 to S5) is explained in detail as follows.

The vibration sensor 11 may be one of a displacement sensor 11A that measures displacement, a speed sensor 11B that measures speed, and an acceleration sensor that measures acceleration according to the physical quantity being measured. Displacement, velocity, and acceleration factors, which are the physical quantities measured here, can be calculated by applying differential or integral functions to other factors.

The vibration sensor 11 generates electrical signals proportional to their respective amplitudes. Since the sensor 11 that measures vibration varies depending on the amplitude band, frequency band, resonance band, etc., it is necessary to select appropriately according to the characteristics of the vibration to be measured. For example, speed sensors are precise and do not require power in some cases, but they have the disadvantage that their natural frequency is limited to 1 kHz or less. In many vibration measurement applications, acceleration sensors or displacement sensors are used.

The processing unit 12 digitizes (ADC: Analog digital conversion) the analog vibration signal measured by each sensor 11. Analog signals are sampled and signal values are extracted as a function of time.

When performing ADC, according to sampling theory, in principle, the effective sampling frequency for measurement/measurement should be more than twice the signal frequency of the measurement target, and the maximum frequency of this measurement target is called the Nyquist frequency. do. Accordingly, when sampling the signal value, the sampling time interval, that is, the frequency, must be determined by referring to the frequency band area that requires attention for diagnosing and monitoring the condition of the machine after converting the vibration signal to the frequency domain. Sampling should be performed at a frequency that is twice the maximum frequency of the frequency region of interest. It is ideal to sample based on the maximum frequency covered by the inspection device 10, but the frequency region of interest for analysis may vary depending on the machine to be diagnosed (F1 to FM) and the mounting location of the sensor 11. Therefore, the sampling frequency may be different for each machine/sensor. When sampling at a sampling frequency corresponding to the maximum frequency of interest, there is a disadvantage in that the amount of stored analysis data increases and the load on the inspection system 10 increases. However, since sampling and processing are performed at a single frequency, processing can be simplified and diagnosis can be improved. Since it can be used when reviewing or reviewing improvements such as reviewing the appropriateness of diagnosis/analysis, it is effective to determine the sampling frequency by considering the capacity of the system 10 and future data usability.

Depending on the type and condition of the facility being diagnosed, it is necessary to sample at a frequency that does not cause distortion/error of the vibration spectrum signal to streamline data extraction, storage, and transmission, so it is necessary to sample at an appropriate sampling frequency. It is efficient to set the appropriate sampling frequency suggested by the present invention to between 2 and 2.56 times the Nyquist frequency, and preferably between 2 and 2.2 times. The higher the sampling frequency, the denser the sampling, making it possible to obtain a clear measurement vibration spectrum, but the amount of data increases. Conversely, when a low sampling frequency is applied, the amount of data in the vibration spectrum is reduced, reducing the load on the measurement system, but the vibration spectrum may be distorted and measured.

Converting time domain data to frequency domain data follows the mathematical Fourier Transformation theory, but the mathematical Fourier Transform theory is a form that performs continuous integration on the wave form in the infinite time domain. There are limits to practical application. In reality, analytical method calculations of software and electronic calculation systems are applied to data of discontinuous time functions, such as FFT (Fast Fourier transform), DFT (Discrete Fourier Transform), and STFT (Short Time Fourier transform). Convert it to frequency domain data using this method.

(Other embodiments)

1. Modification 1

As a modified example, in FIG. 5, M may be 1 or more, and n may be 2 or more.

In other words, since the present invention is premised on collecting and processing a large amount of measurement data from the same type of equipment (F1 to FM) from the perspective of smart factory and factory automation, two or more sensors are required for each machine (e.g., F1). In many cases, it is desirable to attach.

In some cases, one sensor per machine may not be enough to measure the vibration. Attaching two or more sensors per machine may mean the same or different types of sensors in different locations on the same machine, or may mean installing different types of sensors at the same location.

With this configuration, the 'inspection device configured to collect vibration measurement data from one or more machines and two or more vibration sensors' operates efficiently and functions as a solution for diagnosing/monitoring multiple facilities.

2. Modification 2

As another modified example, there is information on reference data added to the first data D1 including metadata.

In other words, so that the tester 10 can refer to the many and various types of vibration sensors that collect vibration information, sensors mounted on the same machine and in the same area have each classification identification number corresponding to the machine type and mounting location. It is given, added to the first data, and used for management such as judgment, classification, and search.

In other words, 'information on which sensor is installed on which machine' (machine type information) and 'information on which part of the machine it is installed on' (installation location information) are created as identification data, and the first data It is added to (D1).

3. Modification 3

As another modified example, the reference data of item 2 above is additionally specified, four sensors are attached to different parts of machine 1 (F1), and according to the relative positions of the sensors, which path is the problem is determined. There are also cases.

This is further explained through FIG. 7.

Of course, analyzing the signal from the vibration sensor itself is based on the analysis of the vibration signal from the sensors (1-1 to 1-4) and sensors (2-1 to 2-4) shown in FIG. 7. Before generating or analyzing such a vibration signal, it may be advantageous for the processing unit 12 or a server that can be connected to the processing unit 12 to have some reference data (reference data, reference waveform, etc.) as a standard.

That is, (i) what vibration is standard at the location of the sensor 1-1 (e.g., upper left), and what vibration is standard at the location of the sensor 1-2 (e.g., upper right); , reference data indicating what vibration is standard at the position of the sensor 1-3 (eg, lower left), and what vibration is standard at the position of the sensor 1-4 (eg, lower right). The measurement and inspection device 10 of the present invention can determine whether there is an abnormality in the 'part' by comparing it with the signals actually obtained from each sensor (1-1 to 1-4).

(ii) To modify it somewhat, for example, if there is a distortion from the upper right to the lower left (see arrow in FIG. 7), it may be possible to have as reference data whether any vibration occurs. In this case, (i) above Compared to making a judgment based on only a specific part (spot), more specific diagnostic information about the current state of the machine can be obtained (i.e., using reference data for the set of sensors (1-2) and sensors (1-3) ).

Comparison with such standard data (reference data) can be done through remote communication, and it is possible to know which sensor the data is from or which path (set of sensors) the data is from.

Advantages of processing this case include, for example:

- It is also possible to find out which part of the machine has a problem,

- Also, in Figure 7, the vibration results of 'Sensor (1-2) → Sensor (1-3) path' and 'Sensor (2-2) → Sensor (2-3) path' are different, and which vibration is wrong? There is also the point that it becomes easier to determine whether the problem is with machine 1 (F1) or machine 2 (F2).

To summarize from a different perspective, in a smart factory where machine tools (lathes, milling machines, etc.) are installed, in distinguishing between metadata (D1; first data) and actual vibration information (D2; second data), meta This means that the location information of the sensor is stored in the data (first data (D1)) (taking FIG. 7 as an example, it is not limited to the information that '4 sensors are attached to machine 1 (F1)', but 'machine 1 (F1)'. Sensor (1-1) is at a specific location in the upper left corner of (F1), sensor (1-2) is at a specific location in the upper right corner, sensor (1-3) is at a specific location in the lower left corner, and sensor (1-3) is at a specific location in the lower right corner. This means that information indicating that the sensor 1-4 is installed is included in the first data D1.

If this information (specific location information of the sensor) is stored in the first data (D1), it becomes possible to compare the standard data (reference information) and the information obtained from the current sensor in a more accurate form.

Of course, this reference data may be in the time domain or the frequency domain.

Additionally, this comparison may be a comparison of each sensor as in (i) above, or may be a comparison of a specific path (or area) in which sensors are grouped (as a set) as in (ii) above.

In (ii) above, the 'path from sensor (1-2) → sensor (1-3)' was used as the standard data, but it is not limited to this, and other sets may be used, and even standard data for a set of three sensors may be used. good night.

The more combinations of sensors we have as baseline data, the more likely we are to get more specific information about what shape the machine is currently in.

In other words, the reference data when the position of 'sensor (1-4)' is distorted by 1,

Reference data when the position of 'sensor (1-4)' is distorted by 2,

Standard data when the 'Sensor (1-1) → Sensor (1-3)' path is distorted by 1,

Standard data when the 'Sensor (1-1) → Sensor (1-3)' path is distorted by 2,

Standard data when the 'Sensor (1-1) → Sensor (1-4)' path is distorted by 1,

Standard data when the 'Sensor (1-1) → Sensor (1-3)' path is distorted by 2,

Standard data when the path ‘Sensor (1-1) → Sensor (1-4) → Sensor (1-2)’ is distorted by 1,

Standard data when the path ‘Sensor (1-1) → Sensor (1-4) → Sensor (1-2)’ is distorted by 2

The more various types of standard data you have in advance, the more helpful it is to compare it with the standard data after measurement and diagnose/monitor the current condition.

What is indicated as ‘path’ above can be understood as a ‘set’ of each sensor. The expression ‘distorted’ above is an example of damage, deformation, or deterioration.

4. Modification 4 (related to noise reduction from adjacent facilities)

Equipment or devices that rotate or undergo regular movement generate vibration, and the equipment vibration spectrum changes due to wear and deterioration of the parts that make up the target equipment, deterioration, and loosening of assembly.

The size of the change in the vibration spectrum of the target facility may be relatively small compared to the amplitude of the intrinsic vibration spectrum of the target facility.

Vibration occurring in the same type of equipment or heterogeneous equipment installed adjacent to or in the same space (hereinafter also referred to as ‘adjacent other equipment’ or ‘other equipment’) installed in the target facility changes the vibration spectrum measured by the target sensor installed in the target facility. may act as noise.

In order to offset the distortion of the spectrum caused by vibration noise of the target facility due to vibration of other facilities, the vibration spectrum of the target facility is analyzed by subtracting the vibration data of other adjacent facilities.

For example, when subtracting vibration noise data from adjacent other facilities, a weight is set considering the impact of vibration from adjacent other facilities on the measured value of the target sensor of the target facility, and noise data is subtracted by reflecting the weight to the target facility/target sensor. Measured vibration spectrum data can be analyzed.

To determine whether to subtract noise data from other facilities, the spectrum of the target facility/sensor is analyzed by sensing the operating load of other facilities generating noise and subtracting noise data from other facilities in operation.

Although not limited to this, specific examples of reflection methods are as follows.

For example, in FIG. 5, let us assume that machine 1 (F1) is the main facility, and machine 2 (F2) to machine M (FM) are other facilities. At this time, the vibration measured in Machine 1 (F1) is not, in fact, purely caused by Machine 1 (F1) alone, but is strictly caused by other equipment (one or more of Machine 2 (F2) to Machine M (FM)). This includes the effects of vibrations that occur.

Therefore, as a way to offset such effects, the influence of other equipment (one or more of Machine 2 (F2) to Machine M (FM)) on the vibration of this equipment (Machine 1 (F1)) is known in advance and reduced ( It is good to summarize.

In other words, the vibration that will be added to the main equipment (Machine 1 (F1)) due to overlap due to other equipment (one or more of Machine 2 (F2) to Machine M (FM)) is subtracted from the main equipment (Machine 1 (F1)). ) is to numerically correct the vibration result value. Of course, it is difficult to attenuate actual physical vibration, and conceptually, by subtracting the vibration value estimated to have been added due to other equipment from the vibration value measured for Machine 1 (F1), This means that the abnormality is determined based on the corrected vibration value.

For reference, this does not mean that the 'vibration value of Machine 2 (F2)' is subtracted from the vibration value of Machine 1 (F1) to obtain the corrected vibration value of Machine 1 (F1). It subtracts only the amount of influence that Machine 2 (F2) has on Machine 1 (F1). Of course, this impact is quantifiable.

Impact on machine 1 (F1) due to an increase in the load on machine 2 (F2), impact on machine 1 (F1) due to an increase in the load on machine 3 (F3), ... , due to an increase in the load on machine M (FM). For the influence on Machine 1 (F1), it is good to set a standard value (e.g., weight) in advance. Setting a standard value in advance means, for example, recording the vibration value of Machine 1 (F1) when only Machine 2 (F2) is vibrating (operating) among Machine 1 (F1) to Machine M (FM), and Record the vibration value of machine 1 (F1) when only machine 3 (F3) is vibrating (operating) among machines 1 (F1) to machine M (FM), ..., machine 1 (F1) to machine M. This is possible by recording the vibration value of machine 1 when only machine M (FM) is vibrating (operating) among (FM). In this way, the influence of a specific machine on other machines can be known independently, and assuming that the final vibration of the main equipment (Machine 1 (F1)) is determined due to their overlap, the influence by other equipment can be identified. It becomes possible to correct by subtracting.

Of course, this is just one example, and many other methods may be possible. For example, the weight value may be determined experimentally and/or computationally depending on the distance between Machine 1 (F1) and other equipment (any one of Machine 2 to Machine M), or learning based on statistics for multiple machines through machine learning. You may do so.

If the above-mentioned information is generalized, the flow can be progressed as shown in Figures 8a and 8b. That is, FIGS. 8A and 8B are one continuous flow and represent a flow related to noise reduction from adjacent facilities.

8A to 8B, in S8-1 to S8-M, the vibration felt by each machine when only one machine among the plurality of machines in FIG. 5 is operated is measured.

In S9-1 to S9-M, based on the vibration measurements in S8-1 to S8-M, the influence of other equipment on a specific machine (main equipment; measurement target machine) is numerically determined (e.g., experimental , the weight is identified and reflected through calculation, machine learning, etc.).

In S10-1 to S10-M, during normal operation (i.e., multiple machines are in operation), the influence of other equipment is subtracted from the specific equipment (this equipment; the machine to be measured), and the corrected value of the specific equipment is calculated. Obtain vibration readings.

Of course, the flow in FIGS. 8a to 8b is an example, and it is also possible to simplify it further and apply it only to machine 1 (F1).

Additionally, Modification Example 5 and Modification Example 4 described later may be applied together.

5. Modification 5 (related to increase in power consumption (increase in load))

In addition, the present inventor believes that if there is an abnormality in the state of the machine (which may be one or more of F1 to FM) (or if a high load operation that is different from normal work is performed), the load of the machine (which may be one or more of F1 to FM) increases. It was recognized that power consumption may increase due to an increase in power consumption.

Accordingly, in a modified example of the present invention, the measurement and inspection device 10 measures the power consumption of each machine (F1 to FM) or receives data on power consumption (hereinafter also referred to as measured power consumption). As a member, a load measuring unit (not shown) may be additionally included.

Although the term load measurement unit (or measurement power consumption) is used, as described above, a method may be used in which the power consumption as a load is directly measured by the measurement and inspection device 10, and the power consumption as a load is measured (measurement and inspection device 10). It is also okay to receive transmission from another device (not .). Additionally, the components shown in FIGS. 1 to 3 may serve as the load measurement unit described above.

This data on power consumption (i.e., measured power consumption) is included and stored in first data (metadata, etc.).

In addition, the measurement and inspection device 10 of the present invention (e.g., the conversion unit 12-2 and/or 12-3 in the processing unit 12) senses the operating load of other equipment and determines the reflection of noise vibration deduction. do.

Regarding Modification 4, the influence of other equipment on the vibration of this equipment has been considered. In Modification 5, independently of or in addition to Modification 4, the influence of changes in power consumption (load changes) of each machine is considered.

For example, in FIG. 5, let us assume that machine 1 (F1) is the main facility, and machine 2 (F2) to machine M (FM) are other facilities. At this time, if there is little change in the vibration of Machine 1 (F1) but there is an increase in vibration in other equipment (one or more of Machine 2 (F2) to Machine M (FM)), the vibration of Machine 1 (F1) may increase. There may be cases where it is sensed as increasing. In fact, even if there is no change in the true motion of Machine 1 (F1) itself, if the vibration increases due to an increase in load in other equipment (one or more of Machine 2 (F2) to Machine M (FM)), the vibration of other equipment increases. This is because it is delivered to the facility (Machine 1 (F1)). In other words, even if there is no change in the operation of the equipment (Machine 1 (F1)) itself, the vibration of the equipment (Machine 1 (F1)) may be sensed as increased due to the influence of other equipment, which is unwanted.

Therefore, as a way to offset such effects, if an increase in load is detected in other equipment (one or more of Machine 2 (F2) to Machine M (FM)), the machine with the increased load (Machine 2 (F2) to Machine M (FM)) is detected. The vibration result of this equipment (Machine 1(F1)) is numerically calculated by subtracting the vibration that will be added to this equipment (Machine 1(F1)) due to overlap due to (one or more of M(FM)). It is corrected. Of course, it is difficult to attenuate actual physical vibration, and conceptually, by subtracting the vibration value estimated to have been added due to other equipment from the vibration value measured for Machine 1 (F1), This means that the abnormality is determined based on the corrected vibration value.

Impact on machine 1 (F1) due to an increase in the load on machine 2 (F2), impact on machine 1 (F1) due to an increase in the load on machine 3 (F3), ... , due to an increase in the load on machine M (FM). It is good to set a standard value in advance regarding the influence on Machine 1 (F1). Setting a standard value in advance means, for example, recording the vibration value of machine 1 when only machine 2 among machines 1 to machine M is vibrating (operating), and among machines 1 to machine M, only machine 3 is vibrating (operating). This is possible by recording the vibration value of machine 1 when it is in vibration, and recording the vibration value of machine 1 when only machine M is in vibration (operating) among machines 1 to machine M. Of course, this is just one example, and many other methods may be possible. For example, the weight value may be determined experimentally and/or computationally depending on the distance between Machine 1 (F1) and other equipment (any one of Machine 2 to Machine M), or learning based on statistics for multiple machines through machine learning. You may do so. And, for each machine, it is assumed that vibration increases in proportion to the rate at which the load increases (although it may not necessarily be in direct proportion), and the proportional rate (weight) is set as a standard value. This weight may also be determined experimentally and/or computationally, or may be learned using statistical values for multiple machines through machine learning.

As described above, in Modification Example 5,

(i) Independently of Modification 4, the influence of changes in power consumption (load changes) of each machine may be considered,

(ii) In addition to Modification 4 (i.e., while considering the influence of other equipment on the vibration of this equipment), the influence of changes in power consumption (load changes) of each machine may be considered.

As a specific example of (i) above,

Regarding machines 1 (F1) to machines M (FM) in Figure 5,

- Measure (or receive transmission) the power consumption for each machine (i.e., Machine 1 (F1) to Machine M (FM)) (S101 in FIGS. 9A to 9B),

- Monitor whether the power consumption for each machine (i.e., Machine 1 (F1) to Machine M (FM)) increases or decreases and/or the magnitude of the increase or decrease (in particular, whether the increase or decrease and the magnitude) (S102 in FIGS. 9a to 9b) ),

- Measure and/or calculate the impact (contribution) of the vibration of Machine 2 (F2) to Machine 1 (F1) depending on the amount by which the power consumption of Machine 2 (F2) increases, and the power consumption of Machine 3 (F3) Depending on this increased amount, the impact (contribution) of the vibration of machine 3 (F3) to machine 1 (F1) is measured and/or calculated, ..., and the power consumption of machine M (FM) is increased. Therefore, the effect (contribution) of the vibration of machine M (FM) on machine 1 (F1) is measured and/or calculated (S103-1 in FIGS. 9a-9b),

- Repeat this to measure and/or calculate all mutual influences (S103-2 to S103-M in FIGS. 9a and 9b),

- For example, when this equipment (Machine 1 (F1)) is the measurement target, (if necessary, if an increase is detected in the above step), the vibration measurement values of Machine 1 (F1) are not used as is, but the vibration measurement values of Machine 2 (F2) are measured. )~Under the assumption that additional unwanted vibration (i.e., vibration caused by machine 2(F2)~machine M(FM)) is superimposed on machine 1(F1) due to an abnormality (or overload) in machine M(FM). , the corrected vibration value is used by subtracting a predetermined value from the vibration measurement value of Machine 1 (F1) (at this time, the predetermined value is the amount of power consumed by Machine 2 (F2) depending on the amount by which the power consumption of Machine 2 (F2) is increased. (S104-1).

- Also, for example, when this equipment (Machine M(FM)) is the measurement target, (if necessary, if an increase is detected in the above step), the vibration measurement values of Machine M(FM) are not used as is, but Machine 1( Unwanted additional vibration to machine M(FM) due to an abnormality (or overload) occurring in machine F1) to machine M-1(FM-1) (i.e., to machine 1(F1) to machine M-1(FM-1). Under the assumption that the resulting vibration) is overlapped, a corrected vibration value is used by subtracting a predetermined value from the vibration measurement value of machine M (FM) (S104-M).

This process can be summarized as shown in Figures 9a and 9b. That is, FIGS. 9A and 9B are one continuous flow and represent a flow related to an increase in power consumption (load increase).

Meanwhile, as a specific example of (ii) above, the procedure shown in FIGS. 9A to 9B (modification example 5) is performed in parallel with the procedure shown in FIGS. 8A to 8B (modification example 4).

6. Modification 6

It has been described above that the vibration sensor 11 may or may not be part of the measurement and inspection device 10 of the present invention (although the existence of the vibration sensor 11 itself is necessary).

In this regard, for example, it may be assumed that a person selling machine 1 (F1) sells it including the sensor 11 from the beginning.

In this case, from the perspective of the measurement and inspection device 10, the server (which may be the processing unit 12 itself or a separate server capable of communicating with the processing unit 12) will not have the reference data for item 3 above. .

In this case, a modification in which the user of machine 1 (F1) creates and designates the reference data by himself and includes it in metadata (first data (D1)) is also possible.

7. Modification 7

On the other hand, even if the vibration is measured and the results are different from the standard data, this does not necessarily mean that there is a problem with the machine (F1, etc.), but may be due to changes in temperature/humidity. Therefore, taking this into account, It is desirable to have provincial standard data.

The present embodiments and modified examples of the present application can be applied overlapping with each other as long as they do not conflict with their properties. For example, Modification 4 and Modification 5 can be implemented together.

Although embodiments of the present invention have been described above with reference to the attached drawings, the present invention is not limited to the above embodiments and can be manufactured in various different forms, and can be manufactured in various different forms by those skilled in the art. It will be understood by those who understand that the present invention can be implemented in other specific forms without changing its technical spirit or essential features. Therefore, the embodiments described above should be understood in all respects as illustrative and not restrictive.

The present invention can be used in the industrial field for measurement and inspection devices for monitoring or diagnosing the state of a mechanical device by, for example, measuring vibration.

Claims

A measurement and inspection device that monitors or diagnoses the condition of a mechanical device by measuring vibration,

The measurement and inspection device includes a processing unit,

The processing unit,

(a) a receiving unit that converts the physical vibration of the mechanical device into an electrical signal and receives it from a vibration sensor attached to the mechanical device;

(b) an A/D conversion unit that converts the electrical signal from analog to digital;

(c) a domain converter that converts the time domain signal, which is the signal output from the A/D converter, into a frequency domain signal;

(d) a processed signal information generator that generates time domain processed signal information for the processed signal that is the time domain signal, or frequency domain processed signal information for the processed signal that is the frequency domain signal;

(e) A transmission unit that transmits or stores first data and second data separately.

Includes,

The time domain processing signal information generated by the processing signal information generating unit of (d) includes sampling time section information and sampling time interval information,

The frequency domain processing signal information generated by the processing signal information generation unit of (d) includes sampling frequency section information and sampling frequency interval information,

In the delivery unit of (e), the first data is

- An identifier that identifies whether the processed signal is a time domain signal or a frequency domain signal,

- Processing signal information of the area indicated by the identifier

- ID information of the mechanical device from which the processing signal information was collected, and information on the date and time of collection

Includes,

In the delivery unit of (e), the second data includes a processing signal indicated by the processing signal information indicated by the first data,

Measurement inspection device.
A measurement and inspection device that monitors or diagnoses the condition of a mechanical device by measuring vibration,

The measurement and inspection device includes a processing unit,

The processing unit,

(a) a receiving unit that converts the physical vibration of the mechanical device into an electrical signal and receives it from a vibration sensor attached to the mechanical device;

(b) an A/D conversion unit that converts the electrical signal from analog to digital;

(c) a domain converter that converts the time domain signal, which is the signal output from the A/D converter, into a frequency domain signal;

(d) a processed signal information generator that generates time domain processed signal information for the processed signal that is the time domain signal, or frequency domain processed signal information for the processed signal that is the frequency domain signal;

(e) A transmission unit that transmits or stores the first data, 2-1 data, and 2-2 data separately.

Includes,

The time domain processing signal information generated by the processing signal information generating unit of (d) includes sampling time section information and sampling time interval information,

The frequency domain processing signal information generated by the processing signal information generation unit of (d) includes sampling frequency section information and sampling frequency interval information,

In the delivery unit of (e), the first data is

- An identifier that identifies whether the processed signal is a time domain signal or a frequency domain signal,

- Processing signal information of the area indicated by the identifier

- ID information of the mechanical device from which the processing signal information was collected, and information on the date and time of collection

Includes,

In the transmission unit of (e), the 2-1 data includes a processing signal indicated by time domain processing signal information indicated by the first data,

In the transmission unit of (e), the 2-2 data includes a processed signal indicated by the frequency domain processed signal information indicated by the first data,

Measurement inspection device.
According to paragraph 1,

It further includes a storage unit,

The storage unit includes a first storage unit and a second storage unit,

The first data is stored in the first storage unit,

The second data is stored in the second storage unit,

Measurement inspection device.
According to paragraph 2,

It further includes a storage unit,

The storage unit includes a first storage unit, a 2-1 storage unit, and a 2-2 storage unit,

The first data is stored in the first storage unit,

The 2-1 data is stored in the 2-1 storage unit,

The 2-2 data is stored in the 2-2 storage unit,

Measurement inspection device.
According to claim 1 or 2,

The processing unit generates normal status information, which is whether the mechanical device is normal, and adds it to the first data.

Measurement inspection device.
According to claim 1 or 2,

The first data includes sensor location information that identifies where the vibration sensor is mounted on the mechanical device,

Measurement inspection device.
According to claim 1 or 2,

In the A/D converter, the sampling frequency is set to be at least 2 times and at most 2.2 times the highest peak frequency of the electrical signal,

The first data includes the sampling frequency,

Measurement inspection device.
According to claim 1 or 2,

If there are a plurality of mechanical devices, one of the plurality of mechanical devices is called a target facility, and any of the mechanical devices excluding the target facility is called another facility,

The processing unit includes a subtraction conversion unit having a function of converting a signal by subtracting noise vibration generated from the other equipment other than the target equipment.

Measurement inspection device.
According to clause 8,

The subtraction conversion unit,

(i) Measure the vibration felt by each mechanical device when only one mechanical device is operating among the plurality of mechanical devices,

(ii) Based on the vibration measurements in (i) above, the influence of the other equipment on the target equipment is numerically determined,

(iii) When the plurality of mechanical devices are in operation, the influence of the other equipment is subtracted from the specific equipment to obtain a corrected vibration value of the specific equipment,

Measurement inspection device.
According to claim 1 or 2,

If there are a plurality of mechanical devices, one of the plurality of mechanical devices is called a target facility, and any of the mechanical devices excluding the target facility is called another facility,

The processing unit senses the operating load of the other equipment and determines the reflection of noise vibration reduction to the target equipment.

Measurement inspection device.
According to clause 10,

The processing unit,

(iv) measure or receive power consumption for each of the plurality of mechanical devices,

(v) monitoring whether power consumption for each of the plurality of mechanical devices increases or decreases,

(vi) Measure or calculate the impact of vibration of the other equipment on the target equipment according to the amount of increase in power consumption of the other equipment.

(vii) From the vibration measured in the target equipment, the value obtained by subtracting the measured or calculated influence in (vi) above is used as the corrected vibration value of the target equipment,

Measurement inspection device.
According to clause 6,

A plurality of vibration sensors are installed in one of the mechanical devices,

A measurement and inspection device that identifies sensor position information for each vibration sensor, compares vibration information data from the vibration sensor corresponding to the sensor position information with pre-stored reference data, and determines whether the specific position is abnormal.
According to clause 12,

In comparing vibration information data from the vibration sensor with reference data,

A measurement inspection device for comparing, in addition to reference data for one of the vibration sensors, reference data for a set of a plurality of said vibration sensors.
According to clause 12,

When the reference data corresponding to the vibration sensor is not stored in advance, a user of the mechanical device specifies the reference data and includes it in the first data.
According to clause 14,

A measurement and inspection device in which the user uses vibration information data of a machine that has operated without problems for a certain period of time when specifying the reference data.