KR970053287A - Wafer Fixture - Google Patents

Wafer Fixture Download PDF

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Publication number
KR970053287A
KR970053287A KR1019950046094A KR19950046094A KR970053287A KR 970053287 A KR970053287 A KR 970053287A KR 1019950046094 A KR1019950046094 A KR 1019950046094A KR 19950046094 A KR19950046094 A KR 19950046094A KR 970053287 A KR970053287 A KR 970053287A
Authority
KR
South Korea
Prior art keywords
wafer
fixing
holding device
fixing means
wafer holding
Prior art date
Application number
KR1019950046094A
Other languages
Korean (ko)
Other versions
KR0179156B1 (en
Inventor
문성열
Original Assignee
문정환
Lg 반도체 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 문정환, Lg 반도체 주식회사 filed Critical 문정환
Priority to KR1019950046094A priority Critical patent/KR0179156B1/en
Publication of KR970053287A publication Critical patent/KR970053287A/en
Application granted granted Critical
Publication of KR0179156B1 publication Critical patent/KR0179156B1/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge clamping, e.g. clamping ring

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Drying Of Semiconductors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

본 발명은 웨이퍼 고정장치에 관한 것으로, 식각공정중 발생하는 에지부분의 불순물 발생의 원천적 제거에 적당한 웨이퍼 고정장치를 제공하기 위한 것이다. 이를 위한 본 발명의 웨이퍼 고정장치를 정전기를 이용하여 웨이퍼를 고정시키는 제1고정 수단부, 샤도우 클램프를 이용하여 상기 웨이퍼를 고정시키는 제2고정 수단부, 플라즈마 이온의 분산을 방지하기 위한 에지링부를 포함하여 이루어짐을 특징으로 한다.The present invention relates to a wafer holding device, to provide a wafer holding device suitable for the fundamental removal of the generation of impurities in the edge portion generated during the etching process. The wafer holding device of the present invention for this purpose, the first fixing means for fixing the wafer using static electricity, the second fixing means for fixing the wafer using a shadow clamp, the edge ring for preventing the dispersion of plasma ions It is characterized by including the.

Description

웨이퍼 고정장치Wafer Fixture

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제3도는 본 발명의 웨이퍼 고정장치를 나타낸 도면3 is a view showing a wafer holding device of the present invention.

제4도는 본 발명에 따른 웨이퍼 에지부분의 확대도.4 is an enlarged view of a wafer edge portion according to the present invention.

Claims (2)

정전기를 이용하여 웨이퍼를 고정시키는 제1고정 수단부, 샤도우 클램프를 이용하여 상기 웨이퍼를 고정시키는 제2고정 수단부, 플라즈마 이온의 분산을 방지하기 위한 에지링부를 포함하여 이루어지는 웨이퍼 고정장치.And a first fixing means portion for fixing the wafer using static electricity, a second fixing means portion for fixing the wafer using shadow clamps, and an edge ring portion for preventing dispersion of plasma ions. 제1항에 있어서, 상기 샤도우 클램프는 웨이퍼와 직접 접촉되지 않으며, 식각공정시 웨이퍼 에지 부분의 도전층이 식각되는 것을 방지함을 특징으로 하는 웨이퍼 고정장치.The wafer holding device of claim 1, wherein the shadow clamp is not in direct contact with the wafer and prevents the conductive layer of the wafer edge portion from being etched during the etching process. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950046094A 1995-12-01 1995-12-01 Wafer fixing apparatus KR0179156B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950046094A KR0179156B1 (en) 1995-12-01 1995-12-01 Wafer fixing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950046094A KR0179156B1 (en) 1995-12-01 1995-12-01 Wafer fixing apparatus

Publications (2)

Publication Number Publication Date
KR970053287A true KR970053287A (en) 1997-07-31
KR0179156B1 KR0179156B1 (en) 1999-04-15

Family

ID=19437396

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950046094A KR0179156B1 (en) 1995-12-01 1995-12-01 Wafer fixing apparatus

Country Status (1)

Country Link
KR (1) KR0179156B1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20000019096A (en) * 1998-09-08 2000-04-06 윤종용 Wafer guard ring of semiconductor plasma equipment

Also Published As

Publication number Publication date
KR0179156B1 (en) 1999-04-15

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