JPH0734073B2 - PLZT display device manufacturing apparatus and device manufacturing method - Google Patents

Description

The present invention relates to a PLZT display device manufacturing apparatus and a manufacturing method for the PLZT display device, which are used as optical shutters and display devices, by utilizing the birefringence of transparent PLZT. is there.

[Conventional example] In recent years, PLZT (Pb
O, LaO, ZrO ₂ , TiO) are about to be used for optical shutters and display devices. An example of using the PLZT as a display device is, for example, Japanese Patent Application No. 63-108648, which describes the display device of the PLZT, its manufacturing process, and its use (light valve type projector).

Here, the contents of the above-mentioned Japanese Patent Application No. 63-108648 will be briefly described with reference to FIGS. 5 to 7 in order to obtain a PLZT plate used for a PLZT display device. 35; La / Zr / Ti ratio; green sheet) is used as a starting material, and the raw sheet is cut into a predetermined size to form vertical scanning / horizontal scanning internal electrodes, and the laminated block of these raw sheets 1 and 2 is removed from the binder. Then, the laminated PLZT3 is fired in an atmosphere to form a laminated PLZT3, and the laminated PLZT3 has a predetermined thickness (for example, 1.0 m).
m), and both sides of this cut are polished to
I have obtained LZT plate 4. That is, PLZT plate 4
Since the starting materials of (1) are raw sheets 1 and 2, it is possible to improve the transmittance of PLZT, and an inexpensive furnace or apparatus has improved.
Further, since the PLZT plate 4 has the laminated internal electrode structure, it is possible to reduce the driving voltage.

[Problems to be Solved by the Invention] By the way, in the PLZT display device and the method for manufacturing the device, the laminated block is debindered and fired in an atmosphere, but the binder is removed uniformly. Sometimes there is not. That is, it is difficult to evenly remove the gas-vaporized binder, and the binder is better removed near the surface, but the binder is more removed away from the surface. Thus, if the binder is not removed uniformly, defects will occur in the laminated PLZT3 sintered in the atmosphere. For example, as shown in FIG. 8 and FIG. The laminated portion between the sheet 1 and the green sheet 2 (shown in FIG. 5) is delaminated, or the laminated PL
ZT3's large shape causes large shrinkage and cracks
Or the warp caused by the crack (bending;
(Indicated by the arrow a in the figure) will occur.

The present invention has been made in view of the above problems, and its purpose is to remove the binder, suppress the occurrence of defects when obtaining a PLZT plate by firing in an atmosphere, and improve the yield of PLZT display devices. A PLZT display device manufacturing jig and a manufacturing method of the device.

[Means for Solving the Problems] In order to achieve the above object, a PLZT display device manufacturing apparatus according to the present invention comprises a plurality of wafers cut into a predetermined thickness from a stacked block of PLZT raw sheets on which electrodes are formed. The gist of the present invention is to provide jigs that are arranged side by side with their cut surfaces being vertical, a porous support plate disposed between the wafers, and edge restraining plates provided at both ends thereof.

Further, a method of manufacturing a PLZT display device according to the present invention, a PLZT green sheet having electrodes is laminated to form a laminated block, and the laminated block is cut into a predetermined thickness to obtain a plurality of wafers. While placing a porous support plate made of ceramic in, while suppressing the wafer and the laminated body made of the porous support plate by arranging the end restraint plate made of porous ceramics at both ends thereof, The PLZT display device is characterized by being debindered and fired in an atmosphere to form a PLZT plate, and the PLZT plate is used to obtain a PLZT display device.

[Operation] With the above configuration, a plurality of wafers and porous support plates are alternately arranged in the jig, and both ends thereof are held by the end holding plates. That is, the wafers are held by the porous support plate and the edge restraining plate so that they are not deformed, that is, warped. In this way, when the placed wafer is debindered and baked in the atmosphere, the gasified binder is extracted through the porous support plate.

Further, since the above method is used, when a PLZT plate used as a PLZT display device is obtained, a wafer obtained by cutting a laminated block into a predetermined thickness (small laminated block) is debindered while being placed on the jig, and , The atmosphere will be fired. That is, since the shape of the wafer is reduced, the gasified binder is easily removed, that is, the binder is uniformly removed.

[Embodiment] An embodiment of the present invention will be described below with reference to FIGS. 1 to 4.

1 to 3, a PLZT display device manufacturing apparatus according to the present invention comprises a plurality of wafers 5 obtained by cutting a laminated block (a plurality of raw sheets having internal electrodes formed thereon) into a predetermined thickness. A jig 6 for placing a single piece and a porous support plate 7 arranged between the wafers 5 are provided. The jig 6 is ceramic, and the jig 6
Is a V-groove 6a and an edge restraining plate that match the shape of the wafer 5.
6b is provided. Further, the porous support plate 7
Is also a ceramic, but has a shape larger than that of the wafer 5, and also has a function of preventing the wafer 5 from bending, together with the edge restraint plate 6b. In addition,
Instead of the porous support plate 7, a ceramic powder may be filled between the wafers 5.

Next, the operation of the PLZT display device manufacturing apparatus and the device manufacturing method will be described.

First, PLZT green sheets (eg 9/65/35;
La / Zr / Ti ratio; green sheet) is obtained, this raw sheet is cut into a predetermined size, and internal electrodes are formed on this cut wafer, and a plurality of laminated blocks 8 are obtained to obtain a laminated block 8. (As shown in Fig. 4).
The laminated block 8 is cut perpendicularly to the laminating direction to obtain a wafer (small laminated block) 5, and the binder is removed.
In addition, although the baking is performed in the atmosphere, the wafer 5 is placed in the V-groove 6a of the jig 6 for performing the baking. The thickness and shape of the wafer 5 may be, for example, the shape of the final pellet, that is, the shape of the PLZT display device. At this time, as shown in FIG. 1 and FIG.
Although it leans against 6a, it is performed so that the porous support plate 7 is interposed between the end holding plates 6b and 6b and that no gap is formed between them.

Subsequently, with the wafer 5 still mounted on the jig 6, the binder is removed by heating for several hours in the same manner as in the conventional technique, and the atmosphere is fired. At the time of removing the binder, since the wafers 5 are plate-shaped and the wafers 5 are sandwiched by the porous support plates 7, the binder is easily removed and the binder is uniformly removed. Therefore, when the binder is removed or the atmosphere is fired, peeling does not occur in the laminated portion of the green sheet, and the shape of the wafer 5 is small, so that the shrinkage rate is small and cracks do not occur. The warp also disappears. Furthermore, since the wafers 5 are plate-shaped,
Since warpage may occur, the edge restraint plate 6b and the porous support plate 7 suppress the warp to prevent the warp.

[Effects of the Invention] As described above, according to the manufacturing tool of the PLZT display device of the present invention and the manufacturing method of the device, the raw sheets having the internal electrodes are laminated, and the laminated block is debindered, Moreover, when obtaining a laminated PLZT by firing in an atmosphere, the laminated block is cut into a predetermined thickness to form wafers, which are placed in the V-grooves of the jig (ceramic), and the wafers are also held by the edge restraining plate. And a porous support plate (ceramic), and the porous support is provided between the wafers without gaps. In this state, the wafers are debindered and fired in an atmosphere, making it a PLZT display device. Defects in the PLZT plate used,
It is possible to prevent peeling, cracking and warpage of the laminated part,
It is possible to improve the yield of ZT display devices.

[Brief description of drawings]

1 to 3 are schematic perspective views and sectional views of a PLZT display device manufacturing apparatus showing an embodiment of the present invention, and FIG. 4 is a diagram for explaining a method of manufacturing the PLZT display device. 5 to 7 are schematic manufacturing process diagrams for explaining the manufacturing method of the LPZT display device,
8 and 9 are diagrams for explaining defects in the conventional method for manufacturing a PLZT display device. In the figure, 5 is a wafer, 6 is a jig (ceramic), and 6a is V
Grooves, 6b are end holding plates (ceramic), 7 is a porous support plate (ceramic), and 8 is a laminated block.

Claims (4)

[Claims] 1. A jig in which a plurality of wafers cut to a predetermined thickness from a stacked block of PLZT green sheets on which electrodes are formed are arranged side by side with their cut surfaces being vertical, and is arranged between the wafers. An apparatus for manufacturing a PLZT display device, comprising a porous support plate and end holding plates provided on both end surfaces thereof. 2. The PLZT display device manufacturing apparatus according to claim 1, wherein the jig, the porous support plate and the edge restraining plate are made of ceramic. 3. The PLZT display device manufacturing apparatus according to claim 1, wherein the jig is provided with a groove conforming to the shape of the wafer. 4. A PLZT green sheet having electrodes formed thereon is laminated to form a laminated block, the laminated block is cut to a predetermined thickness to obtain a plurality of wafers, and a porous support plate made of ceramic is provided between the wafers. Is placed, and the wafer and the porous support plate are held in place at both ends thereof by holding edge restraining plates made of porous ceramic, and the respective wafers are debindered and fired in an atmosphere. And a PLZT plate, and a PLZT display device is obtained from the PLZT plate.