JPH06142567A - Apparatus for forming protective film - Google Patents

Abstract

PURPOSE:To provide an apparatus for forming a protective film which can improve adhesion efficiency of a coating material and productivity by shortening a tact time. CONSTITUTION:A protective film is formed on a disk 10 by applying a synthetic resin 48. A suction table 9 which chucks and rotates the disk 10 and a discharge nozzle 46 which sprays the synthetic resin 48 on the disk 10 chucked on the suction table 9 are installed so that the disk 10 rotated by the suction table 9 is coated with the synthetic resin 48 sprayed from the discharge nozzle 46.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a protective film forming apparatus for forming a protective film by applying a coating material on a flat surface of a disk.

[0002]

2. Description of the Related Art Conventionally, when forming a protective film on a flat surface of a disk such as a wafer of a semiconductor device or a compact disk (CD), a spin coating method has been adopted. In this spin coating method, as shown in FIG. 10, a synthetic resin 2 as a coating material is dropped on a horizontal disc 1 and the disc 1 is rotated to uniformly synthesize the disc 1. A protective film made of resin is formed.

[0003]

However, this spin coating method has the following problems (1) to (4). (1) Most of the synthetic resin 2 dropped on the disk 1 scatters due to centrifugal force, resulting in poor coating efficiency. (2) The circular groove 3 is formed in the central portion of the disc 1,
When the synthetic resin 2 enters the circumferential groove 3, the synthetic resin 2 is projected to the outside by centrifugal force due to the rotation and forms radial streaks or the like, which causes a loss of flatness. (3) When the rotational angular velocity is increased to reduce the working time, small irregularities on the surface of the disc 1 entrain air,
This disturbs the flow of air on the disk 1, and it is difficult to obtain a protective film with a clean finish. (4) Since the work is performed in two steps, that is, the step of applying the synthetic resin 2 and the step of shaking off by rotating the disk, there is a limit in reducing the tact time.

The present invention has been made in view of the above problems, and an object thereof is to improve a coating efficiency of a coating material and to shorten a tact time to improve productivity. To provide a forming apparatus.

[0005]

To achieve the above object, a protective film forming apparatus according to the present invention is a device for forming a protective film by applying a coating material on a disc plane.
An adsorption table that chucks and rotates the disc, and a discharge nozzle that atomizes and sprays the coating material on the flat surface of the disc chucked by the adsorption table, and are rotated by the adsorption table The coating material is sprayed onto the disk by the discharge nozzle. Further, the discharge nozzle may be arranged below the disc, and the coating material may be sprayed from below the disc. Further, means for forming a region for preventing the coating material from adhering by spraying nitrogen gas or clean air on substantially the center of the disk on the surface side to which the coating material is applied, and the coating material Means may be provided for blowing nitrogen gas or clean air to the opposite surface side to be coated to prevent the coating material from being applied to the opposite surface of the disk. Further, the suction table may be arranged on an index table which rotates over other steps.

[0006]

According to this structure, the suction table for chucking and rotating the disc and the discharge nozzle for spraying the coating material in the form of mist on the flat surface of the disc chucked by the suction table are provided. Since the coating material is sprayed on the disc rotated by the suction table by the discharge nozzle, the coating efficiency of the supplied coating material is good as compared with the conventional protective film forming method such as spin coating method. The waste of the coating material is reduced, and a uniform and clean protective film can be formed.

Further, when the discharge nozzle is arranged below the disk and the coating material is sprayed from below the disk, the coating material drops onto the disk and becomes a defective product. You can prevent anything.

Further, means for forming a region for preventing the coating material from adhering by spraying nitrogen gas or clean air on substantially the center of the disk on the surface side to which the coating material is applied, and the coating material. When a means for preventing the coating material from being applied by spraying nitrogen gas or clean air on the opposite surface side where the coating material is applied, it is possible to apply the coating material only to the part that requires coating. it can.

Further, when the suction table is arranged on the index table which rotates over other steps, the disk can be moved to each step while being held on the suction table. The disk loading time can be shortened and the tact time can be shortened.

[0010]

Embodiments of the present invention will be described in detail below with reference to the drawings. FIG. 4 is an overall configuration diagram of the protective film forming apparatus according to the present invention. In this device, the base table 11
A manifold portion 12 and a disk-shaped index table 13 are disposed at the upper center, and the index table 13 can be rotated by an index rotation motor 18. Also, the base table 11
Above, facing the lower surface of the index table 13,
Coating section 14, cleaning section 15, disk supply unit section 16, disk discharge section 17, UV
The (ultraviolet) irradiation unit 8 and the like are arranged in a scattered state along the peripheral surface of the index table 13.

More specifically, the manifold portion 12
As shown in FIG. 5 with a part broken away, is provided with a rotary joint 12a at the upper part to which a pipe 19 into which N ₂ (nitrogen) gas for blowing is sent is connected, and a vacuum joint at the lower part. The joint 12b is provided, and a plurality of joints 12c communicating with the rotary joint 12a and a plurality of joints 12d communicating with the joint 12b are provided on the peripheral surface.

On the lower surface side of the index table 13,
The suction table 9 is attached so as to correspond to the coating section 14, the cleaning section 15, the disk supply unit section 16, the disk discharge section 17, and the UV (ultraviolet) irradiation section 8. Further, these suction tables 9 are connected to each joint 12d of the manifold portion 12 via a hose 31, and the suction suction adjustment control of air at the joint 12b of the manifold portion 12
The disc 10 can be sucked and released. In addition, the index table 13 is provided with the other end of the hose 32, one end of which is connected to the joint 12c of the manifold portion 12, corresponding to the part to which the suction table 9 is attached, and the joint 12a. Further, the N ₂ gas sent in through the hose 32 can be blown out from the lower surface of the index table 13 (see FIGS. 1 and 2).

As shown in detail in FIGS. 6 and 7, the disk supply unit section 16 includes the upper plate 1 of the base table 11.
The first base plate 21 is attached to the back side of the la through the support shaft 20, and is fixed to the back side of the first base plate 21 by vertically penetrating the first base plate 21. The cylinder 22 is provided.

Further, the rod 22a protruding through the first base plate 21 is provided with the first base plate 21.
Above, coil spring 23, washer 24, movable base plate 2
5 are attached in such a manner that they are sequentially mounted, and these are nuts 26 with washers screwed to the tip of the rod 20a.
It is locked in.

When the rod 22a is not pulled by the cylinder 22, the movable base plate 25 is displaced upward by the urging force of the coil spring 23. When the rod 22a is pulled by the cylinder 22, the urging force of the coil spring 23 is resisted. It is configured to be displaced downward.

Further, the movable base plate 25 has a rod 2
A pair of push pins 27 are attached to the left and right sides sandwiching 2a in a state of protruding upward. The tip side of each push pin 27 is
A plate 28 fixedly attached to the upper plate 11a of the base table 11 is vertically penetrated and is held by the plate 28 via a guide member 29 so as to be slidable in the vertical direction.

Further, the disk 10 is provided at the center of the plate 28.
A guide pole 6 for positioning the vehicle is disposed in a state of being extended straight upward, and a lift base 30 is disposed on the guide pole 6 so as to be vertically movable. It should be noted that a plurality of discs 10, which are similarly mounted using the guide poles 6 as guides, are stacked and arranged on the lift base 30. And push pin 27
Is lifted, the lift base 30 is pushed up by the push pin 27, and the entire disc 10 laminated together with the lift base 30 is raised, and the uppermost portion of the disc 10 (the disc at the top) 10) is the index table 13
Of the suction table 9 (see FIG. 4) attached to the bottom surface of the suction table.

The coating section 14 corresponds to the suction table 9 attached to the index table 13 as shown in detail in FIGS.
It is attached to 1.

First, the structure of the suction table 9 will be described. The suction table 9 includes a drive unit 9A arranged on the base table 11 via the holder plate 5.
The driven portion 9 mounted on the index table 13 side so as to be movable integrally with the index table 13.
It is composed of B and. Of these, the driven portion 9B includes a cylindrical protection house 33 that is attached in a state of hanging from the lower surface of the index table 13. The protection house 33 has one end fixed to the index table 13 with a screw (not shown) and is attached with the lower end opened so that the inner diameter is larger than the outer diameter of the disc 10.

Further, in the index table 13,
A pipe-shaped support shaft 34 is rotatably attached to the substantially central portion surrounded by the protection house 33 while vertically penetrating the index table 13. Further, a disc-shaped rotation transmission half body 36 having a rotation transmission magnet 35 attached to the upper surface thereof is fixedly attached to one upper end of the support shaft 34, and the vacuum chuck portion 3 is attached to one lower end.
7 are formed. The support shaft 34 is connected to the joint 12b of the manifold unit 12 via a hose 31. The disc 10 is chucked by the vacuum on the manifold unit 12 side, and the chuck can be released by stopping the vacuum. It is configured.

On the other hand, the drive unit 9A has a motor 38 fixedly attached to the holder plate 5 corresponding to the upper side of the rotation transmission unit half 36, and the tip of the rotary shaft 38a of the motor 38. The rotation transmission part half body 39 is attached to the so as to be integrally rotatable. In addition, the rotation transmission part half 3
A magnet 40 is fixedly attached to the lower surface of 9 so as to face the magnet 35 of the rotation transmitting part half body 36.

On the suction table 9 side, the drive unit 9
When the motor 38 is rotated in a state in which A and the driven portion 9B correspond to each other, the rotation causes the rotation of the support shaft 3 via the magnetic coupling of the magnets 35 and 40 arranged between the rotation transmitting portion halves 36 and 39.
4 is transmitted in a non-contact state to the vacuum chuck portion 3
The disc 10 chucked on 7 can be rotated.

On the other hand, the coating section 14 is provided with a coater house 41 formed as a substantially cylindrical box body. The coater house 41 is arranged on a plate 50 attached to the back surface of the upper plate 11a of the base table 11 via a pair of guide rods 52 and a cylinder 53. Among these, the guide rod 52 is held by the plate 50 so as to be slidable in the vertical direction via the guide member 51, the cylinder 53 is fixed on the plate 50, and the rod 53a that advances and retracts is attached to the back surface of the bottom wall 41b. It is attached. And this coater house 41
The rod 53a of the cylinder 53 is moved up and down to move up and down.

An exhaust duct 49 is attached to the bottom wall 41b of the coater house 41, and the N ₂ gas and the like inside can be discharged through the exhaust duct 49. On the other hand, on the upper wall 41a of the coater house 41, a circular opening 42 that is larger than the outer diameter of the disc 10 and smaller than the inner diameter of the protective house 33 is formed. Upper wall 41
An air shutter portion 43 having an inner diameter larger than the outer diameter of the protection house 33 is provided on the surface a so as to surround the outside of the opening 42. It should be noted that the pipe 56 in which N ₂ gas is sent to the outer peripheral surface side of the air shutter portion 43.
Is connected to the inner peripheral surface of the pipe N
₂ Injection nozzle 4 for ejecting gas toward the center of opening 42 to form air curtain 7 (see FIGS. 2 and 3)
A plurality of 3a (see FIGS. 1 and 2) are provided in a scattered manner.

Further, in the coater house 41, a sticking prevention rod 45 and a discharge nozzle 46 are arranged.
Of these, the sticking prevention rod 45 has a pipe shape, and one end thereof is fixed to the center of the bottom wall 41b of the coater house 41.
The other end side extends to the center of the opening 42. A branch pipe 47 is provided on the peripheral surface of the sticking prevention rod 45, and N ₂ gas can be sent from the outside through the branch pipe 47. On the other hand, the discharge nozzle 46 can spray the molten synthetic resin 48 for forming a protective film on the disc 10 in the form of mist from the tip nozzle portion toward the opening 42.

Next, the operation of this protective film forming apparatus will be described. In this apparatus, the discs 10 are sequentially transported to other processing steps by the suction table 9 of the index table 13 from the disc supply unit section 16 stacked on the lift base 30. Then, in the disk supply unit section 16, when the driven section 9B, which rotates the suction table 9 integrally with the index table 13, is arranged right above the disk supply unit section 16, the cylinder 22 is provided.
Is moved to push out the rod 22a to move the movable base plate 2
5 and push pin 27 are raised. Then, the lift base 30 is pushed up, and together with this lift base 30, the discs 10 in the stacked state rise, and the suction table 9
It stops at a position just below the vacuum chuck part 37.
Next, the vacuum chuck portion 37 of the suction table 9 on the side of the driven portion 9B is vacuum-operated to lift the lift base 30.
The uppermost discs 10 stacked on top are sucked and held. When the uppermost disc 10 is sucked and held, the cylinder 2
2, the rod 22a is pulled downward, and the lift base 30 descends together with the remaining disc 10.

Next, the index table 13 rotates with the manifold portion 12 as a fulcrum. Then, the disk 10 sucked and held by the vacuum chuck 37 of the driven part 9B of the suction table 9 in the disk supply unit 16 is sent to the cleaning part 15 together with the driven part 9B, and the surface of the disk 10 is cleaned by the cleaning part 15. Then, N ₂ gas is blown to perform a cleaning process.

When the cleaning process is completed, the disk 10 is sent by the index table 13 to the coating section 14 together with the driven section 9B, and the coating section 14 is coated with the synthetic resin 48 on one surface of the disk 10 as described later. The ejection nozzle 46 sprays and coats.

When the coating process is completed, the disk 10
Is sent to the UV irradiation section 8 together with the driven section 9B, and the synthetic resin 4
8 is cured, and a protective film made of synthetic resin 48 is formed.

The disk 10 on which the protective film is formed is the driven portion 9
It is sent together with B to the disc ejecting unit 17. Then, when the vacuum to the suction table 9 is turned off at this position, the vacuum chuck portion 37 of the driven portion 9B and the disc 10 are separated, and the plate 28 of the disc supply unit portion 16 is separated.
Also, it is guided by a mechanism (not shown) having the same structure as the guide pole 6 and is stacked in the disc ejecting portion 17 in a stacked state.

Thus, a series of operations from the supply of the disc 10 to the step of forming the protective film and further stocking at the discharge position are completed. Then, this same operation is performed by the disk 1 stacked on the disk supply unit section 16.
0 is sequentially executed.

Next, the operation of the coating section 14 will be described. In the coating section 14, the disk 10 after the cleaning process is sucked and held by the vacuum chuck section 37 of the driven section 9B of the suction table 9, and the drive section 9A and the driven section 9B correspond to each other. It will be sent. At this time, on the coating portion 14 side, the cylinder 53 pulls the rod 53a, and the coater house 41 is held at the standby position (see FIG. 2) moved downward.

When a new disk 10 that has not been coated is sent by the driven portion 9B of the suction table 9, the cylinder 53 is driven and the coater house 41 is pushed up from the lower standby position to the coating position. (See Figure 1). Next, the motor 38 on the drive unit 9A side of the suction table 9 starts rotating. Then, the magnets 35, 40 disposed between the rotation transmitting part halves 36, 39 are arranged.
Due to the magnetic coupling, the rotation transmission part halves 36 and 39 are attracted to each other, and the support shaft 34 on the driven part 9B side also starts to rotate together with the vacuum chuck part 37.

When the vacuum chuck portion 37 starts to rotate, at the same time, the hose 32 connected to the index table 13 discharges N ₂ gas from above the protective house 33, and at the same time the coating installed in the coater house 41. N ₂ gas is discharged from the central portion of the prevention rod 45 toward the center of the disc 10. Then, the synthetic resin 48 atomized and sprayed from the discharge nozzle 46 by the discharged N ₂ gas is a synthetic resin non-coatable region (in the present embodiment, the back surface side of the disk 10 and the central portion of the disk 10). In some cases, it prevents the wraparound to the center portion of the disc 10. In this embodiment, the center of the sticking prevention rod 45 and the center of the disk 10 sucked and held by the vacuum chuck portion 37 coincide with each other, and the upper end of the sticking prevention rod 45 and the vacuum chuck portion 37. The distance from the disk 10 adsorbed and held by is adjusted to about 0.5 to 1.0 mm.

Further, the hose 32 and the sticking prevention rod 4
In a state where N ₂ gas is being discharged from No. 5, the synthetic resin 48 is atomized by the jet nozzle 46 and sprayed on the lower surface of the disk 10 to coat the synthetic resin 48. At this time, the mist-like synthetic resin 48 sprayed and left in the coater house 41 is exhausted to the outside of the coater house 41 through the exhaust duct 49.

When the coating process is completed in this way,
The rotation of the motor 38 is stopped, and then the cylinder 53 is driven to lower the coater house 41 to the standby position. Then, the protection house 33 and the coater house 41 are separated from each other and the opening 42 of the coater house 41 is exposed. At this time, the N ₂ gas from the air shutter portion 43 vigorously moves toward the center of the opening 42. The air curtain 7 (see FIGS. 2 and 3) is formed by being jetted, and the opening 42 is blocked by the air curtain 7 of N ₂ gas. This prevents the mist-like synthetic resin 48 remaining in the coater house 41 from leaking to the outside and scattering.

Therefore, according to this embodiment, the disc 10
Since the synthetic resin 48 is sprayed and coated while rotating, it is possible to form a uniform and finished protective film in a short time. Further, when the synthetic resin 48 is sprayed onto the disk 10 from the discharge nozzle 46, N ₂ gas is jetted from the coating prevention rod 45, and the synthetic resin 48 is not coated on the central portion of the jetted disk 10. At the same time, N ₂ gas is jetted from the lower side of the index table 13 into the protective house 33 to increase the pressure, and the synthetic resin 4 is injected into the protective house 33.
Since 8 does not wrap around, it is possible to easily obtain the disk 10 in which the central portion and the back surface of the disk are not coated with the synthetic resin 48. Furthermore, since the synthetic resin 48 is sprayed from below the disc 10, the synthetic resin 48 attached to the coating prevention rod 45 or the like does not drop on the disc 10 and have an adverse effect.

In the above embodiment, the structure in which the disc 10 is rotated and fed by the rotating index table 13 is disclosed, but linear feeding may be performed as shown in FIG. 8, of course. Further, in that case, the discharge nozzle 46 may be arranged on the upper side of the disc 10 and sprayed from the upper side of the disc 10.

FIG. 9 shows a main part of FIG. 8, and in this structure, a moving table 55 which is moved on the conveyor 54.
The discs 10 are rotatably arranged in two rows on the left and right, and the synthetic resin 48 is atomized and sprayed onto the discharge nozzle 46.
Are moved left and right, and the synthetic resin 48 is
It has a structure that can spray. Although the detailed structure is omitted, the disk 10 is horizontally rotated by means (not shown) when the synthetic resin 48 is sprayed even in this structure.

In the above embodiment, the case where N ₂ gas is used has been described, but clean air may be used instead of N ₂ gas.

[0041]

As described above, according to the protective film forming apparatus of the present invention, the suction table for chucking and rotating the disc, and the coating on the flat surface of the disc chucked by the suction table are provided. A discharge nozzle for atomizing and spraying the material is provided, and the coating material is sprayed by the discharge nozzle onto the disk rotated by the suction table, so that a protective film is formed by a conventional spin coating method or the like. The coating efficiency of the supplied coating material is good and the waste of the coating material is reduced as compared with the case of performing. Further, since the coating is performed by spraying, it is possible to form a uniform and clean protective film. As a result,
The cost can be reduced, the quality can be improved, and the working time can be shortened. Further, when the discharge nozzle is arranged below the disc and the coating material is sprayed from below the disc, the coating material may drop onto the disc and become a defective product. Can be prevented and the yield can be improved. Further, means for forming a region for preventing the coating material from adhering by spraying nitrogen gas or clean air on substantially the center of the disk on the side where the coating material is applied, and the coating material is applied. When a means for preventing the coating material from adhering by spraying nitrogen gas or clean air is provided on the opposite surface side, the coating material can be applied only to the portion requiring coating. Further, when the suction table is arranged on an index table that rotates over other steps, the disk can be moved to each step while being held on the suction table. Loading time can be shortened and takt time can be shortened.

[Brief description of drawings]

FIG. 1 is a schematic cross-sectional view showing a coating portion of a protective film forming apparatus according to an embodiment of the present invention in a state where a coater house is arranged at a coating position.

FIG. 2 is a schematic cross-sectional view showing a coating portion of a protective film forming apparatus in this embodiment in a state where a coater house is arranged at a standby position.

FIG. 3 is a perspective view of a main part in a coating portion of the protective film forming apparatus according to the present embodiment.

FIG. 4 is a perspective view showing a general configuration of a protective film forming apparatus according to this embodiment.

FIG. 5 is a side view showing a partially cutaway view of a manifold portion of the protective film forming apparatus according to the present embodiment.

FIG. 6 is a perspective view of a disk supply unit portion in the present embodiment.

FIG. 7 is a side view showing a part of the disc supply unit in the present embodiment in a cutaway manner.

FIG. 8 is a schematic perspective view for explaining a modification of the present invention.

9 is a side view of a main part of the modification example shown in FIG.

FIG. 10 is a cross-sectional view for explaining a conventional protective film forming method.

[Explanation of symbols]

 7 Air curtain 9 Adsorption table 9A Drive part 9B Followed part 10 Disc 13 Index table 14 Coating part 43 Air shutter part 45 Coating prevention rod 46 Discharge nozzle 48 Synthetic resin (coating material)

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Yuno Senda 6-735 Kita-Shinagawa, Shinagawa-ku, Tokyo Sony Corporation (72) Nobuhiko Iida 3--9-17 Nishigotanda, Shinagawa-ku, Tokyo No. Sony Magnescale Co., Ltd. (72) Inventor Masayuki Konno 3-9-17 Nishigotanda, Shinagawa-ku, Tokyo Sony Magnescale Co., Ltd.

Claims (4)

[Claims] 1. A protective film forming apparatus for forming a protective film by applying a coating material onto a flat surface of a disk, comprising: a suction table for chucking and rotating the disk; and a disk chucked on the suction table. A discharge nozzle for spraying the coating material in a mist form on a flat surface, and the coating material is sprayed by the discharge nozzle onto the disk rotated by the suction table. apparatus. 2. The protective film forming apparatus according to claim 1, wherein the discharge nozzle is arranged below the disc, and the coating material is sprayed from below the disc. 3. Means for forming a region for preventing the coating material from adhering by spraying nitrogen gas or clean air on substantially the center of the disk on the surface side to which the coating material is applied, A means for spraying nitrogen gas or clean air on the side of the disk opposite to the side where the coating material is applied to prevent the coating material from being applied to the opposite side of the disk. Item 2. The protective film forming apparatus according to item 2. 4. The protective film forming apparatus according to claim 1, wherein the suction table is arranged on an index table that rotates over other steps.