JP4927274B2 - Coating apparatus and coating method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
In the present invention, a coating liquid is applied to a plate material such as a glass substrate used in a liquid crystal display device or the like, or a long web (hereinafter collectively referred to as a base material) such as a film, fabric, or paper. The present invention relates to a processing apparatus and a coating method.
[0002]
[Prior art]
The present applicant has previously proposed a coating method capable of thinly coating a coating liquid on the lower surface of a plate-like substrate such as a glass substrate such as a liquid crystal display device (Japanese Patent Laid-Open No. 2001-62370).
[0003]
This coating method includes a liquid tank containing a coating liquid, a nozzle that sinks in the coating liquid contained in the liquid tank, and extends in the left-right direction with a capillary gap, and the front-rear direction. The coating apparatus applies a coating liquid to the lower surface of the substrate traveling from the capillary gap of the nozzle, and applies the coating liquid to the substrate based on the following steps.
[0004]
In the first step, the liquid tank rises to the lower side of the base material with the nozzle submerged.
[0005]
In the second step, only the nozzle protrudes from the liquid tank.
[0006]
In the third step, the liquid tank rises with the nozzle protruding, and the coating liquid flowing out from the capillary gap of the nozzle is brought into contact with the coating start position on the lower surface of the substrate.
[0007]
In the fourth step, the liquid tank descends to the coating height position with the nozzle protruding and in contact with the lower surface of the substrate.
[0008]
In the fifth step, the base material is applied to the coating end position while applying the coating liquid to the lower surface of the base material.
[0009]
In the sixth step, the nozzle and the liquid tank descend from the position of the coating height.
[0010]
With this coating method, it is possible to apply a thin coating on the lower surface of the substrate with a predetermined coating thickness and in a flat state.
[0011]
[Problems to be solved by the invention]
In said coating method, after the 2nd process completion | finish, the distance of a nozzle and a base material is 100-1000 micrometers, and it is difficult to perform the liquid contact from which the coating liquid from a nozzle adheres to the lower surface of a base material.
[0012]
Therefore, in the third step, the liquid tank is raised together with the nozzle, the nozzle is further brought closer to the base material, and the coating liquid is in contact with the lower surface of the base material. In this wetted state, the distance between the nozzle and the substrate is too close, and therefore it is necessary to perform the fourth step of lowering the liquid tank again to the height of the coating thickness.
[0013]
Accordingly, in order to perform the liquid contact, the work time of the third process and the fourth process is necessary, which is contrary to the fact that the process time required by recent manufacturers of liquid crystal display devices is shortened. There is a point.
[0014]
Therefore, in view of the above problems, the present invention provides a coating apparatus and a coating method capable of easily and quickly performing liquid contact between a substrate and a nozzle.
[0015]
[Means for Solving the Problems]
  The invention of claim 1 is directed to a coating apparatus that guides a coating liquid by capillary action to an outlet of a capillary gap provided in a nozzle, and applies the coating liquid to a substrate that travels from the outlet. Promote surface tension between the substrate and the outlet.Needle or rodThe coating apparatus is characterized in that the coating liquid from the outlet is in contact with the base material with an intervening member interposed.
[0016]
  Invention of Claim 2 is a coating apparatus which pumps a coating liquid to the outlet of the slit provided in die | dye, and applies a coating liquid to the base material which drive | works from the said outlet, The said base material and the said Encourage surface tension between the outletNeedle or rodA coating apparatus, wherein a coating liquid from the outlet is in contact with the substrate with an intervening member interposed. It is.
[0017]
  The invention of claim 3 has a liquid tank containing a coating liquid, and a nozzle that sinks in the coating liquid contained in the liquid tank and extends in the left-right direction with a capillary gap. An application method of a coating apparatus for applying a coating liquid to the lower surface of a base material traveling in the front-rear direction from the capillary gap of the nozzle, and applying the coating liquid to the base material based on the following steps Work. A step in which the liquid tank rises below the base material in a state where the nozzle is sunk; A process in which only the nozzle rises from the liquid tank to a coating height. In order to contact the coating liquid flowing out from the capillary gap of the nozzle to the lower surface of the substrate,A coating liquid is brought into contact with the base material by interposing a needle body or a bar interposing member for promoting surface tension between the base material and the nozzle.Process. A step of running the substrate to a coating end position while applying a coating liquid to the lower surface of the substrate; A step of lowering the nozzle and the liquid tank from a coating height position;
[0035]
[Operation]
The present inventionIf so, the surface tension is promoted between the substrate and the outlet.needleThe coating liquid from the outlet can be easily and quickly brought into contact with the substrate by interposing an intermediate member made of a body or a rod to promote surface tension.
[0039]
DETAILED DESCRIPTION OF THE INVENTION
First embodiment
Hereinafter, the coating apparatus 10 which shows the 1st Example of this invention is demonstrated based on FIGS.
[0040]
The coating apparatus 10 is an apparatus that thinly applies a coating liquid to a plate material such as a glass substrate (hereinafter referred to as a base material 28) such as a liquid crystal display device.
[0041]
FIG. 1 is a left side view of the coating apparatus 10, and FIG. 2 is a front view.
[0042]
1. Overall structure of coating apparatus 10
As shown in FIGS. 1 and 2, the coating apparatus 10 includes a moving frame 16 that is movable in the front-rear direction via linear ways 14, 14 on a base frame 12 installed on a horizontal floor surface or the like. 16 is placed.
[0043]
A suction table (hereinafter simply referred to as a table) 24 is rotatably supported between a pair of left and right moving frames 16 and 16 by a rotating shaft 26. Note that the moving frames 16 and 16 are integrated on the left and right sides by a welding structure.
[0044]
Coating is performed by adsorbing a base material 28 made of a glass plate to the adsorption surface 27 of the table 24. The configuration of this table 24 will be described later.
[0045]
2. Structure of coating system 30
A coating system 30 for coating a coating liquid is provided inside the base frame 12. Hereinafter, the coating system 30 will be described.
[0046]
3 is a perspective view of the coating system 30, FIG. 4 is a front view, and FIG. 5 is a cross-sectional view taken along line XX in FIG.
[0047]
The coating system 30 is configured based on a base plate 32 arranged in the left-right direction of the base frame 12.
[0048]
A pair of left and right moving cotters 34 and 36 are provided on the upper surface of the base plate 32.
[0049]
Among these, the moving cotter 36 located on the right side is movable along a linear way 38 disposed on the upper surface of the base plate 32 in the left-right direction. The upper surface of the moving cotter 36 is a slope 40, and the left side is lower than the right side. A linear way 42 is also provided on the slope 40.
[0050]
Similarly, the moving cotter 34 is movable in the left-right direction by the linear way 44 with respect to the base plate 32, and a linear way 48 is provided on the slope 46.
[0051]
The pair of left and right moving cotters 34 and 36 are provided with a connecting shaft 50, and a servo motor 52 is disposed at the right end of the connecting shaft 50. A male screw portion is provided at the position of the moving cotters 34 and 36 of the connecting shaft 50, and a female screw portion is provided inside the moving cotters 34 and 36. By rotating the servo motor 52, the connecting shaft 50 rotates, and the moving cotters 34, 36 move in the left-right direction along the linear ways 38, 44.
[0052]
A support plate 54 is provided above the pair of moving cotters 34 and 36. The support plate 54 includes a support plate 56 extending in the left-right direction and a substrate 58 extending in the front-rear direction from the lower end of the support plate 56.
[0053]
A pair of left and right support legs 60 and 62 are provided on the lower surface of the substrate 58. The lower surfaces of the support legs 60 and 62 are inclined surfaces, and are movable along the linear ways 42 and 48 formed on the inclined surfaces of the moving cotters 34 and 36 described above.
[0054]
A guide shaft 64 for vertical movement projects from the base plate 32 to the center of the substrate 58 of the support plate 54. The support plate 54 can move up and down along the guide shaft 64, and movement in the left-right direction is restricted.
[0055]
A liquid tank 66 is provided at the upper end of the support plate 54 to store the coating liquid. The liquid tank 66 will be described later.
[0056]
A left and right moving plate 70 is provided on the support plate 56 of the support plate 54 via a pair of left and right linear ways 68. The linear way 68 is movable in the left-right direction. The left / right moving plate 70 can be moved in the left / right direction by an air cylinder 71.
[0057]
A vertical movement plate 74 is provided on the front surface of the left / right movement plate 70 via a linear way 72. The linear way 72 is movable in an oblique direction. Further, the vertical movement plate 74 is movable in the vertical direction along a pair of left and right guide shafts 76 protruding from the substrate 58 of the support plate 54, and the movement in the horizontal direction is restricted.
[0058]
A nozzle support shaft 78 protrudes from the vicinity of the left end and the right end of the vertical movement plate 74, and the nozzle 82 is supported by the pair of left and right nozzle support shafts 78 and 80. The nozzle 82 will be described later.
[0059]
3. Structure of liquid tank 66 and nozzle 82
Next, the structure of the liquid tank 66 and the nozzle 82 will be described with reference to FIGS.
[0060]
The liquid tank 66 supported on the upper part of the support plate 56 of the support plate 54 extends in the left-right direction, and the side surface has a trapezoidal shape as shown in FIG. A slit 84 extending in the left-right direction is formed at the center of the upper end of the liquid tank 66 (the top of the slope). The slit 84 can be closed by a lid 86 provided outside the liquid tank 66.
[0061]
A nozzle 82 is built in the liquid tank 66. The nozzle 82 includes a pair of front and rear front nozzle members 90 and a rear nozzle member 92 with a capillary gap 88 extending in the left-right direction. The front nozzle member 90 and the rear nozzle member 92 are symmetric in the front-rear direction, and have a sharp cross-sectional shape like a beak toward the upper side, and a capillary gap 88 is provided therebetween. The outlet 89 at the upper end portion of the capillary gap 88 opens along the left-right direction, and the lower surface also opens along the left-right direction.
[0062]
The pair of left and right nozzle support shafts 78 and 80 are fixed to the left end and the right end of the nozzle 82. The pair of left and right nozzle support shafts 78 and 80 slide in a pair of left and right holes 94 and 96 opened on the bottom surface of the liquid tank 66. In order to prevent the coating liquid from leaking from the holes 94 and 96, bellows-like closing members 98 and 100 are provided from the bottom surface of the nozzle 82 to the bottom surface of the liquid tank 66. Thereby, even if the support shafts 78 and 80 move up and down, the bellows-shaped closing members 98 and 100 extend and contract in the vertical direction so that the coating liquid does not leak from the holes 94 and 96 (FIG. 6).
[0063]
As shown in FIG. 6, a spray nozzle 150 for spraying a small amount of coating liquid is rotatably supported on a rear outer wall of the liquid tank 66 by a nozzle support base 152. The spraying direction of the spray nozzle 150 is sprayed toward the tip of the nozzle 82 in a state where the capillary gap 88 protrudes. In order to adjust the spraying direction of the spray nozzle 150, it is attached to the nozzle base 152 so as to be rotatable around a rotation shaft 154.
[0064]
As shown in FIGS. 3 and 4, the spray nozzle 150 is provided at one central portion in the width direction of the liquid tank 66.
[0065]
As shown in FIG. 11, the coating liquid is pumped out from the tank 102 storing the coating liquid by the pump 104, and is supplied to the coating liquid supply port 108 opened on the left side surface of the liquid tank 66 through the filter 106. . A circulation port 110 is opened at the bottom of the liquid tank 66, and the coating liquid circulates from the circulation port 110 to the tank 102. The filter 106 is used to circulate the coating liquid and removes foreign matter when it is present.
[0066]
Further, a hole 111 is opened in the upper part of the left side surface of the liquid tank 66, and an L-shaped height adjusting tube 112 projects therefrom. An upper end of the height adjusting pipe 112 is opened, and a detection sensor 114 for detecting the height of the coating liquid is provided on the outer side surface of the adjusting pipe 112. That is, when the liquid tank 66 is filled with the coating liquid, the height adjusting pipe 112 is filled with the coating liquid up to the same height. And the detection sensor 114 detects a coating liquid according to this satisfy | filled quantity, and detects the height. Then, the detected height data is sent to the control unit 115 made of a microcomputer, and the control unit 115 drives the motor 105 of the pump 104 according to the height data to set the height. Supply coating solution until
[0067]
Further, as shown in FIG. 11, the coating liquid is supplied from the tank 102 to the spray nozzle 150 by a pump 156. That is, the pump 156 pumps the spraying nozzle 150 by pressure so that a small amount of coating liquid can be sprayed by a signal from the control unit 115.
[0068]
4). Moving structure of table 24
Next, a structure for moving the table 24 to the position of the nozzle 82 will be described.
[0069]
As shown in FIGS. 1 and 2, the moving frames 16 and 16 are moved to linear ways 14 and 14 in the front-rear direction by rotating a screw rod 18 provided on the left side surface of the base frame 12 by a motor 20. It can move along.
[0070]
That is, a moving part 22 having a female threaded portion that engages with the screw rod 18 protrudes from the moving frame 16 on the left side of the pair of moving frames 16, 16, and the moving portion 22 is moved by rotating the screw rod 18. Moving along the screw rod 18, the pair of left and right moving frames 16, 16 moves in the front-rear direction.
[0071]
5. Adsorption structure of table 24
Next, a structure for adsorbing the base material 28 to the table 24 will be described.
[0072]
A table 24 provided between the pair of left and right moving frames 16, 16 can be rotated by approximately 180 ° along the rotation shaft 26. A plurality of suction holes 116 are opened on the suction surface 27 of the table 24. The suction hole 116 is opened over the front surface of the table 24, and the internal structure is as shown in FIGS. That is, the suction space 118 divided into a plurality of sections is provided inside the table 24.
[0073]
Specifically, the first section is composed of four adsorption spaces 118 provided at the center of the upper portion of the table 24 in FIG. 13, and each adsorption space 118 is connected by a thin air path 120. And four adsorption holes 116 are opened in each part of these four adsorption spaces 118. As shown in FIG. 12, a suction pipe 122 for sucking air is connected to the four suction spaces 118 of the first section, and the suction pipe 122 is inserted into the rotary shaft 26 through a manual valve 124. . The inserted suction pipe 122 is taken out from the left side of the moving frame 16 and connected to the vacuum pump 126.
[0074]
The second section of the table 24 is in a state of surrounding the first section in a U-shape, and is composed of six suction spaces 118, which are also connected by the air path 120. .
[0075]
Hereinafter, the third section and the fourth section are configured in the same manner.
[0076]
Here, the case where the table 24 adsorbs the base material 28 will be described.
[0077]
A base material 28 is placed on the center of the table 24. In this case, the manual valve 124 is opened from the first section to the nth section in accordance with the size of the base material 28, and the base material 28 is sucked from the suction holes 116 by the vacuum pump 126. That is, the first section at the center is always in the suction state, and the subsequent sections are in the suction state in accordance with the size of the base material 28. Further, in a section that is not necessary for suction, the manual valve 124 is closed to prevent suction.
[0078]
A motor 128 and a speed reducer for rotating the rotary shaft 26 of the table 24 are built in the moving frame 16.
[0079]
The reason why the four suction spaces 118 are provided without opening the first section in a rectangular shape and the respective suction spaces 118 are connected by the air path 120 is that the strength of the table 24 is taken into consideration.
[0080]
6). Coating process
The case where a coating liquid is applied to the base material 28 using the coating apparatus 10 having the above configuration will be described.
[0081]
(First step)
In FIG. 1, the table 24 is positioned at the base material position A. In this case, the suction surface 27 faces upward. Then, the base 28 is placed on the suction surface 27 with the surface to be coated facing upward. Then, the vacuum pump 126 is operated to suck the base material 28 from the suction hole 116 and fix the base material 28 to the table 24.
[0082]
(Second step)
The table 24 is rotated by approximately 180 °, and the suction surface 27, that is, the base material 28 is positioned downward as shown in the base material position B shown in FIG.
[0083]
A motor 128 and a speed reducer for rotating the rotary shaft 26 are built in the moving frame 16.
[0084]
(Third step)
The inverted table 24 is moved by the motor 20 and moved to the coating start position by the moving frames 16 and 16.
[0085]
(4th process)
The liquid tank 66 is filled with the coating liquid up to a predetermined height. In this case, the current height of the coating liquid is adjusted by the detection sensor 114 provided on the outer side surface of the height adjusting tube 112, and the control unit 115 is used when the height of the coating liquid is increased to a predetermined height. Operates the pump 104 to supply the coating liquid.
[0086]
Further, the nozzle 82 is set in a state of sinking in the liquid tank 66 filled with the coating liquid. Then, the lid 86 of the slit 84 of the liquid tank 66 is opened with the nozzle 82 submerged in the coating liquid in this manner, and the liquid tank 66 is raised below the base material 28. In this raising method, as shown in FIG. 4, the servo motor 52 is rotated to move the pair of left and right moving cotters 34 and 36. Then, the support plate 54, whose movement is restricted in the left-right direction, moves only upward along the linear ways 42, 48 provided on the inclined surfaces 40, 46 of the moving cotters 34, 36. When the support plate 54 moves upward, the liquid tank 66 and the nozzle 82 simultaneously move upward.
[0087]
When the liquid tank 66 is raised below the base material 28, the rise is temporarily stopped.
[0088]
(5th process)
The nozzle 82 is further raised from the liquid tank 66, and the base material 28 and the nozzle 82 are brought close to the coating thickness. As shown in FIG. 7, in this state, the coating liquid is guided to the upper end of the capillary gap 88 of the nozzle 82 by a capillary phenomenon.
[0089]
(6th process)
From the above state, as shown in FIG. 8, a small amount of coating liquid (for example, one drop of coating liquid) is sprayed between the nozzle 82 and the substrate 28 by the spray nozzle 150.
[0090]
When a small amount of coating liquid is interposed between the outlet 89 of the capillary gap 88 of the nozzle 82 and the lower surface of the coating start position of the substrate 28, as shown in FIG. The working liquid is in contact with the lower surface of the substrate 28 through the intervening coating liquid. More specifically, when one drop of the coating liquid is interposed between the outlet 89 and the base material 28 at the substantially central portion of the nozzle 82, the base material 28 spreads from the central portion toward both sides. Wetted toward.
[0091]
Instead of the conventional process of moving the nozzle 82 up and down to make contact with the liquid, the spraying nozzle 150 only sprays the coating liquid, so that the working time can be shortened and the liquid is reliably contacted. Can do.
[0092]
(Seventh step)
After the liquid contact as described above, as shown in FIG. 10, the base material 28 is moved to the coating end position at a constant speed by the table 24. Then. The coating liquid can be applied in a planar state by moving the base material 28 in the front-rear direction while being applied in the left-right direction by the nozzle 82. That is, it becomes possible to apply the coating liquid on the substrate 28 in a flat surface with a predetermined coating thickness. In addition, in this conveyance, both the posture in the front-rear direction and the posture in the left-right direction of the base material 28 are kept horizontal.
[0093]
(8th step)
The base material 28 is temporarily stopped at the coating end position, and the nozzle 82 and the liquid tank 66 are lowered from the position of the coating height and separated from the base material 28.
[0094]
(9th step)
After the nozzle 82 is separated from the lower surface of the base material 28, the table 24 is moved backward as shown in FIG.
[0095]
(10th step)
The table 24 moved to the substrate position C is rotated again by 180 ° and reversed to the state of the substrate position D. As a result, the substrate 28 is positioned on the upper surface of the table 24.
[0096]
(11th step)
The suction force of the suction surface 27 is released, and the base material 28 is removed from the table 24. This completes a series of coating operations.
[0097]
As described above, in the coating apparatus 10 of the present embodiment, by performing the coating process as described above, the base material 28 made of a glass substrate has a predetermined coating thickness and is flat at a time. Coating can be performed. Further, since the support plate 54 moves up and down on the slopes of the moving cotters 34 and 36, the vertical positions of the liquid tank 66 and the nozzle 82 can be moved accurately and even in the middle.
[0098]
Further, since the nozzle 82 moves the left / right moving plate 70 by the air cylinder 71 and moves the up / down moving plate 74 in the up / down direction, the nozzle 82 can be moved up / down accurately and reliably.
[0099]
Further, as described in the fifth step and the sixth step, when the coating liquid is in contact with the base material 28, the liquid can be easily contacted only by spraying with the spray nozzle 150. Time can be shortened.
[0100]
Second embodiment
FIG. 14 shows a coating apparatus 200 according to the second embodiment.
[0101]
This coating apparatus 200 does not apply the coating liquid to the plate-like base material 28 as in the coating apparatus 10 of the first embodiment, but is a long base material 202 (for example, a film or The coating liquid is applied to a web such as a nonwoven fabric.
[0102]
As shown in FIG. 14, the coating system 30 having the spray nozzle 150 described in the first embodiment is disposed below the backup roll 204.
[0103]
The base material 202 is conveyed along the backup roll 204 and is coated by the nozzle 82 at the lowest point of the backup roll 204. This coating method is the same as described above.
[0104]
With this method, coating can be performed not only on the plate-like substrate 28 but also on the elongated substrate 202.
[0105]
In addition, even in the case of liquid contact, since the coating liquid can be contacted to the lower surface of the substrate 202 simply by spraying the coating liquid with the spray nozzle 150, it can be easily performed, and the working time can be shortened. it can.
[0106]
Third embodiment
In the first embodiment and the second embodiment, the part for applying the coating liquid has a structure in which the nozzle 82 protrudes from the liquid tank 66. In this embodiment, however, the coating using a die is performed. The point is that it is a construction device.
[0107]
Hereinafter, based on FIG. 15, the coating apparatus 300 of a 3rd Example is demonstrated.
A long base material 302 (for example, a web such as a film, cloth, or paper) is run under the backup roll 304.
[0108]
A die 306 is arranged below the backup roll 304 along the width direction of the elongated base material 302. Inside the die 306 is a liquid reservoir 308, and a slit 310 is provided from the liquid reservoir 308 toward the upper end of the die 306. The liquid reservoir 308 and the slit 310 are also provided along the width direction. A pressure sensor 322 for measuring the internal pressure is provided inside the liquid reservoir 308. A vertical movement device 326 is provided for raising the die 306 from the standby height to the coating start height. The vertical movement device 326 is configured by, for example, an air cylinder or a motor.
[0109]
The coating liquid stored in the tank 312 is pumped by the pump 314 toward the liquid reservoir 308 of the die 306. The pressure-applied coating liquid spreads in the width direction in the liquid reservoir 308 and ascends the slit 310 with a constant pressure, and is applied to the lower surface of the substrate 302 at the outlet 311 at the upper end of the slit 310.
[0110]
At this coating start position and height, in order to easily and quickly contact the coating liquid at the outlet 311 of the slit 310 to the lower surface of the substrate 302, the spray nozzle 316 is provided in the same manner as in the first embodiment. Is provided. A small amount of coating liquid is also pumped from the tank 312 to the spray nozzle 316 by a pump 318, and a small amount of coating liquid is sprayed between the slit 310 and the substrate 302 at the coating start position and height. is there.
[0111]
A thickness detection sensor 320 for detecting the coating thickness of the substrate 302 is provided.
[0112]
A pump 314, a pump 318, a thickness detection sensor 320, a pressure sensor 322, and a vertical movement device 326 are connected to a control unit 324 formed of a microcomputer, and a conveyance speed V of the base material 302 is input.
[0113]
Next, the operation state of the coating apparatus 300 will be described.
[0114]
(First step)
The die 306 is raised from the standby height to the coating start height by the vertical movement device 326.
[0115]
(Second step)
At the start of coating, the base material 302 is transported at a transport speed V, pressure is applied by the pump 314, and the coating liquid is pumped to the outlet 311 of the slit 310.
[0116]
(Third step)
In this state, when a small amount of coating liquid is sprayed between the substrate 302 and the outlet 311 by the spray nozzle 316, the coating liquid at the outlet 311 is applied to the lower surface of the substrate 302 by the interposed coating liquid. Wetted.
[0117]
(4th process)
When the base material 302 is transported at the transport speed V, the coating liquid is applied with a predetermined coating thickness. In order to keep the coating thickness constant, the control unit 324 always measures the internal pressure of the liquid reservoir 308 by the pressure sensor 322 and keeps the pressure constant.
[0118]
Further, even when the coating thickness of the coating liquid becomes thin due to disturbance, the thinned portion is detected by the thickness detection sensor 320, and the pressure of the pump 314 is increased to increase the coating thickness.
[0119]
In the coating apparatus 300, since the liquid contact can be easily performed by the spray nozzle 316, the working time at the coating start position can be shortened.
[0120]
In addition, you may replace the order of a 1st process and a 2nd process.
[0121]
Example of change
(Modification 1)
In the first embodiment, the spray nozzle 150 is provided at one position in the center of the liquid tank 66 in the width direction. However, when the plate-like base material 28 to be coated is wide, the spray nozzle 150 is provided at a plurality of positions. May be.
[0122]
For example, you may provide in three places, a left end part, a center part, and a right end part.
[0123]
This modified example can also be applied to the second and third embodiments.
[0124]
(Modification 2)
In the first embodiment, the coating liquid is sprayed by the spray nozzle 150 so as to be interposed between the outlet 89 and the lower surface of the base material 28, but instead, it is attached to the lower surface of the base material 28. You may spray on. Even in this case, the liquid contact can be easily performed.
[0125]
This modified example can also be applied to the second and third embodiments.
[0126]
(Modification 3)
In the first embodiment, the spray nozzle 150 is used to perform the liquid contact at the coating start position. Instead of this, a small amount of coating is performed by the spray nozzle 150 in order to perform the liquid contact during the coating. A working fluid may be sprayed.
[0127]
For example, when a coating liquid is applied to the plate-like base material 28, the thickness is always detected by a thickness detection sensor that detects the coating thickness, and the coating thickness is set to a desired coating thickness. When it becomes thinner than the work thickness, a small amount of the coating liquid may be sprayed by the spray nozzle 150 and contacted again, so that the target coating thickness is obtained.
[0128]
This modified example can also be applied to the second and third embodiments.
[0129]
(Modification 4)
In the first embodiment, a small amount of coating liquid is interposed between the nozzle 82 and the base material 28 by the spray nozzle 150. Alternatively, the coating liquid may be interposed by the following method. Good.
[0130]
That is, a small amount of coating liquid is previously attached to the lower surface of the base material 28 at the coating start position, and when the base material 28 is transported, the attached coating liquid moves to the position of the nozzle 82. Liquid contact can be easily performed with the applied coating solution.
[0131]
This modified example can also be applied to the second and third embodiments.
[0132]
(Modification 5)
In the first embodiment, a small amount of coating liquid is interposed between the nozzle 82 and the base material 28 by the spray nozzle 150. However, even if the small amount of coating liquid is not a small amount of coating liquid, the outlet of the nozzle 82 is used. An interposition member 158 that promotes the surface tension of the coating liquid at 89 may be used.
[0133]
Specifically, as shown in FIG. 16, a plate-like interposition member 158 made of a film or the like is interposed between the base material 28 and the nozzle 82, and the interposition member 158 is a coating liquid for the capillary gap 88. The surface tension of the substrate 28 can be promoted, and the lower surface of the substrate 28 can be easily contacted with the liquid.
[0134]
The interposition member 158 is not limited to the plate shape as described above, but may be a needle shape or a rod shape.
[0135]
This modified example can also be applied to the second and third embodiments.
[0136]
(Modification 6)
As a coating method of the coating apparatus 200 and the third coating apparatus 300 of the second embodiment, the coating liquid is continuously applied to the lower surfaces of the base materials 202 and 302. The present invention can also be applied to intermittent coating in which a coated portion and an uncoated portion are formed in order.
[0137]
That is, the coating part can be reliably and rapidly formed by spraying the coating liquid with the spray nozzles 150 and 316 at the first part of the coating part in the intermittent coating, and the operation time can be shortened.
[0138]
(Modification 7)
In the blowing nozzle 150 of the first embodiment, the coating liquid was sprayed in the form of water droplets, but instead, the coating liquid was sprayed from the spray nozzle 150 in the form of a spray, and the substrate 28 and the nozzle You may interpose between.
[0139]
In addition, the quantity of the coating liquid sprayed in this spraying form may be small.
[0140]
This modified example can also be applied to the second and third embodiments.
[0141]
【The invention's effect】
As described above, in the coating apparatus and the coating method of the present invention, the coating liquid can be easily and quickly brought into contact with the substrate, so that the working time can be shortened.
[Brief description of the drawings]
FIG. 1 is a left side view of a coating apparatus showing a first embodiment of the present invention.
FIG. 2 is a front view of the same.
FIG. 3 is a perspective view of a coating system.
FIG. 4 is a front view of the coating system.
5 is a cross-sectional view taken along the X-ray line in FIG.
FIG. 6 is a longitudinal sectional view of a liquid tank and a nozzle, showing a state before coating.
FIG. 7 is a longitudinal sectional view of a liquid tank and a nozzle, in which a coating liquid is guided to an outlet of a capillary gap.
FIG. 8 is a vertical cross-sectional view of a liquid tank and a nozzle, in which a small amount of coating liquid is sprayed by the spray nozzle.
FIG. 9 is a longitudinal sectional view of a liquid tank and a nozzle, and shows a state in which a coating liquid is in contact with the lower surface of a substrate.
FIG. 10 is a longitudinal sectional view of a liquid tank and a nozzle, and is in a state of being coated on the lower surface of a substrate.
FIG. 11 is a longitudinal sectional view showing a relationship among a liquid tank, a nozzle, a tank, a pump, and a filter.
FIG. 12 is a longitudinal sectional view of a table.
FIG. 13 is a partially cutaway cross-sectional view of a table.
FIG. 14 is a side view of a coating apparatus according to a second embodiment.
FIG. 15 is a side view of a coating apparatus according to a third embodiment.
FIG. 16 is a longitudinal sectional view of a nozzle and a liquid tank of a coating apparatus according to Modification 5.
[Explanation of symbols]
10 Coating equipment
24 tables
28 Base material
30 Coating system
34 Moving cotter
36 Moving cotter
52 Servo motor
54 Support plate
60 support legs
62 Support legs
66 Liquid tank
70 Left and right moving plate
71 Air cylinder
74 Vertical movement plate
78 Nozzle support shaft
80 Nozzle support shaft
82 nozzles
84 slits
88 Capillary gap
89 Outlet
150 spray nozzle
152 Nozzle base
154 axis of rotation
156 pump
158 Interposition member

Claims (3)

In the coating apparatus for guiding the coating liquid by capillary action to the outlet of the capillary gap provided in the nozzle, and coating the coating liquid on the substrate traveling from the outlet,
An intervening member of a needle body or rod that promotes surface tension is interposed between the base material and the outlet, and the coating liquid from the outlet is in contact with the base material. Coating equipment. In the coating apparatus that pumps the coating liquid to the outlet of the slit provided in the die and applies the coating liquid to the substrate that travels from the outlet,
An intervening member of a needle body or rod that promotes surface tension is interposed between the base material and the outlet, and the coating liquid from the outlet is in contact with the base material. Coating equipment. A liquid tank containing a coating liquid, and a nozzle that sinks in the coating liquid stored in the liquid tank and extends in the left-right direction with a capillary gap,
A coating method of a coating apparatus for applying a coating liquid to the lower surface of a base material traveling in the front-rear direction from the capillary gap of the nozzle, and applying the coating liquid to the base material based on the following steps To do.
A step in which the liquid tank rises below the base material in a state where the nozzle is sunk;
A process in which only the nozzle rises from the liquid tank to a coating height.
In order to bring the coating liquid flowing out from the capillary gap of the nozzle into contact with the lower surface of the base material, a needle body or a rod body for promoting surface tension is interposed between the base material and the nozzle. A step of contacting the coating liquid with the substrate by interposing a member ;
A step of running the substrate to a coating end position while applying a coating liquid to the lower surface of the substrate;
A step of lowering the nozzle and the liquid tank from a coating height position;

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