JP2013250244A - Magnetic sensor device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a magnetic sensor device capable of securing dimension accuracy among a plurality of magnetic resistance elements mounted on a substrate at a prescribed interval.SOLUTION: A magnetic sensor device 1 includes: a plurality of magnetic resistance elements 3; a casing 8 where a plurality of element fixing parts for fixing each of the plurality of magnetic resistance elements 3 are formed; and a common substrate 7 where the plurality of magnetic resistance elements 3 are mounted. In the magnetic sensor device 1, since the plurality of element fixing parts for fixing each of the plurality of magnetic resistance elements 3 are formed in the casing 8, the magnetic resistance elements 3 can be positioned using the element fixing parts. As a result, the dimension accuracy among the plurality of magnetic resistance elements 3 mounted on the substrate 7 at a prescribed interval can be secured.

Description

  The present invention relates to a magnetic sensor device having a plurality of magnetoresistive elements.

  2. Description of the Related Art Conventionally, a magnetic sensor device including a substrate formed in a flat plate shape and a plurality of magnetoresistive elements provided on the substrate is known (see, for example, Patent Document 1). In the magnetic sensor device described in Patent Document 1, a plurality of magnetoresistive elements are mounted on a substrate at a predetermined interval. In this magnetic sensor device, a soft magnetic material is disposed between the plurality of magnetoresistive elements. A gap is formed between the magnetoresistive element and the soft magnetic material.

Japanese Patent No. 4837749

  Since the magnetic sensor device described in Patent Document 1 has a configuration in which a plurality of magnetoresistive elements are simply mounted on a flat substrate, the magnetic sensor device has a predetermined interval on the substrate. It is difficult to ensure the dimensional accuracy between the plurality of magnetoresistive elements mounted on.

  Accordingly, an object of the present invention is to provide a magnetic sensor device capable of ensuring dimensional accuracy between a plurality of magnetoresistive elements mounted on a substrate at a predetermined interval.

  In order to solve the above problems, a magnetic sensor device of the present invention includes a plurality of magnetoresistive elements, a housing in which a plurality of element fixing portions to which each of the plurality of magnetoresistive elements is fixed, and a plurality of magnetoresistive elements. And a common substrate on which the elements are mounted.

  In the magnetic sensor device of the present invention, a plurality of element fixing portions to which each of the plurality of magnetoresistive elements is fixed are formed in the housing. Therefore, the magnetoresistive element can be positioned using the element fixing portion. Therefore, in the present invention, it is possible to ensure the dimensional accuracy between the plurality of magnetoresistive elements mounted on the substrate at a predetermined interval by accurately forming the plurality of element fixing portions on the housing.

  In the present invention, the housing is preferably formed of a metal material, and a wall portion is formed between each of the plurality of element fixing portions. With this configuration, when the housing is formed of a metal material having magnetism, it is possible to suppress interference of electromagnetic signals between adjacent magnetoresistive elements via the wall portion. It is possible to reduce noise generated in each magnetoresistive element due to signal interference. Further, when the casing is made of a magnetic metal material, it is possible to reduce noise generated in each magnetoresistive element due to an electromagnetic signal from the outside of the magnetic sensor device. Also, with this configuration, when the housing is formed of a nonmagnetic metal material, it is possible to suppress interference of electrical signals between adjacent magnetoresistive elements via the wall, It is possible to reduce noise generated in each magnetoresistive element due to the interference of the electric signal. In addition, when the housing is formed of a nonmagnetic metal material, it is possible to reduce noise generated in each magnetoresistive element due to an electrical signal from the outside of the magnetic sensor device.

  In the present invention, the housing is made of, for example, a nonmagnetic material. In this case, as described above, it becomes possible to suppress the interference of the electric signal between the adjacent magnetoresistive elements through the wall portion, so that each magnetoresistive element is caused by the interference of the electric signal. It is possible to reduce the generated noise. In addition, it is possible to reduce noise generated in each magnetoresistive element due to an electrical signal from the outside of the magnetic sensor device.

  In the present invention, the magnetoresistive element is formed in a flat plate shape, and is fixed to the element fixing portion so that the thickness direction thereof substantially coincides with the height direction of the wall portion. The thickness of the resistor element is greater than the thickness of the resistor element, and the magnetoresistive element is preferably fixed to the element fixing portion so as not to protrude from the end face of the wall portion in the height direction of the wall portion. If comprised in this way, when the housing is formed with the metal material which has magnetism, it will become possible to suppress effectively the interference of the electromagnetic signal between the magnetoresistive elements which adjoin via a wall part. Also, with this configuration, when the housing is formed of a nonmagnetic metal material, it is possible to effectively suppress interference of electrical signals between adjacent magnetoresistive elements via the wall portion. Become.

  In the present invention, a through-hole penetrating in the height direction of the wall portion is formed between the plurality of wall portions, and the element fixing portion protrudes from the wall surface of the wall portion toward the inside of the through-hole and has a magnetoresistance. It is preferable that the element is fixed and a magnetoresistive element is also fixed to the wall surface of the wall portion, and this wall surface is a part of the element fixing portion. If comprised in this way, since the magnetoresistive element is being fixed to the protrusion part and the wall surface, it becomes possible to raise the fixed intensity | strength to the housing of a magnetoresistive element. Moreover, if comprised in this way, since it becomes possible to position a magnetoresistive element using the wall surface of a wall part, it becomes possible to simplify the structure of a housing.

  In the present invention, the wall portion is preferably formed with an abutting portion with which one end surface of the magnetoresistive element in the direction along the wall surface of the wall portion abuts. If comprised in this way, it will become possible to position a magnetoresistive element in the direction along a wall surface using a contact part.

  In the present invention, the magnetic sensor device includes a common sheet-like member that is formed in a sheet shape from a nonmagnetic metal material and covers the magnetic sensitive surfaces of the plurality of magnetoresistive elements, and the sheet-like member is fixed to the housing. It is preferable. If comprised in this way, it will become possible to reduce the noise which arises in a magnetoresistive element resulting from the electrical signal from the outside of a magnetic sensor apparatus. Further, with this configuration, the configuration of the magnetic sensor device can be simplified as compared with the case where a plurality of sheet-like members that cover the respective magnetosensitive surfaces of the plurality of magnetoresistive elements are provided. In addition, the assembly of the magnetic sensor device is facilitated.

  In the present invention, the magnetic sensor device includes, for example, a plate-like member that is formed in a flat plate shape using a nonmagnetic material and covers the substrate, and the plate-like member is fixed to the housing. In this case, it is possible to reduce noise generated in the substrate and the magnetoresistive element due to an electrical signal from the outside of the magnetic sensor device.

  As described above, in the magnetic sensor device of the present invention, it is possible to ensure dimensional accuracy between a plurality of magnetoresistive elements mounted on a substrate at a predetermined interval.

It is a top view of the magnetic sensor apparatus concerning embodiment of this invention. It is a bottom view of the magnetic sensor apparatus shown in FIG. It is a disassembled perspective view of the magnetic sensor apparatus shown in FIG. It is a perspective view which shows the state by which the magnetoresistive element is being fixed to the housing shown in FIG. 3 from another direction. It is a perspective view of the housing shown in FIG. It is a perspective view which shows the housing shown in FIG. 3 from another direction. It is an expansion perspective view which shows the E section of FIG. 6 from another direction. It is an enlarged plan view of the E section of FIG.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Configuration of magnetic sensor device)
FIG. 1 is a plan view of a magnetic sensor device 1 according to an embodiment of the present invention. FIG. 2 is a bottom view of the magnetic sensor device 1 shown in FIG. FIG. 3 is an exploded perspective view of the magnetic sensor device 1 shown in FIG. FIG. 4 is a perspective view showing the state in which the magnetoresistive element 3 is fixed to the housing 8 shown in FIG. 3 from another direction. FIG. 5 is a perspective view of the housing 8 shown in FIG. FIG. 6 is a perspective view showing the housing 8 shown in FIG. 3 from another direction. FIG. 7 is an enlarged perspective view showing the portion E of FIG. 6 from another direction. FIG. 8 is an enlarged plan view of a portion E in FIG.

  The magnetic sensor device 1 of this embodiment is a magnetic linear encoder for detecting the position and speed of a movable member in an electronic component mounting device, a machine tool, or the like. The magnetic sensor device 1 includes a magnetic scale (not shown), a head part 4 having a plurality of magnetoresistive elements 3 therein, and a main body part (not shown) connected to the head part 4 via a cable (not shown). ). The magnetic scale is alternately magnetized with N and S poles in the length direction. The magnetic sensor device 1 includes the same number of magnetic scales as the magnetoresistive elements 3, and the plurality of magnetic scales are arranged at predetermined intervals in a direction orthogonal to the length direction. The magnetic sensor device 1 of this embodiment includes six magnetoresistive elements 3, and six magnetic scales are arranged at predetermined intervals in a direction orthogonal to the length direction.

  In the magnetic sensor device 1, for example, each of a plurality of magnetic scales is attached to each of a plurality of movable members such as a mounting device, and the head portion 4 and the main body portion are attached to a fixed member such as a mounting device. Yes. The plurality of magnetic scales and the head unit 4 are arranged so that each of the plurality of magnetoresistive elements 3 in the head unit 4 faces each of the plurality of magnetic scales. The position and speed of each of the plurality of movable members such as the mounting apparatus are detected by performing a predetermined process on the signal output from.

  In the following description, the length direction of the magnetic scale (X direction in FIG. 1 etc.) is defined as the “left-right direction”, and the arrangement direction of a plurality of magnetic scales perpendicular to the length direction of the magnetic scale (Y in FIG. 1 etc.) (Direction) is a “front-rear direction”, and a direction (Z direction in FIG. 1 and the like) orthogonal to the length direction of the magnetic scale and the arrangement direction of the plurality of magnetic scales is the “vertical direction”. Further, the Z1 direction side in FIG. 1 or the like is the “upper” side, and the Z2 direction side is the “lower” side. Further, a plane composed of the left-right direction (X direction) and the front-rear direction (Y direction) is referred to as an “XY plane”, and a plane composed of the front-rear direction (Y direction) and the up-down direction (Z direction) is referred to as a “YZ plane”. A plane composed of the vertical direction (Z direction) and the horizontal direction (X direction) is referred to as a “ZX plane”.

  The head unit 4 includes, in addition to the plurality of magnetoresistive elements 3 described above, one substrate 7 on which the plurality of magnetoresistive elements 3 are mounted, and a housing 8 on which the plurality of magnetoresistive elements 3 and the substrate 7 are fixed. It has. In addition, the head unit 4 includes one sheet-like member 9 that covers the magnetic sensitive surfaces of the plurality of magnetoresistive elements 3 and one plate-like member 10 that covers one surface of the substrate 7.

  The substrate 7 is a rigid substrate formed of glass epoxy resin or the like. The substrate 7 is formed in a rectangular plate shape. A connector 12 is mounted on one surface of the substrate 7. One end of a cable connecting the head portion 4 and the main body portion is connected to the connector 12.

  The magnetoresistive element 3 includes a rigid substrate formed of silicon, ceramics, or the like, and a magnetoresistive pattern formed on the rigid substrate, and is formed in a substantially rectangular flat plate shape. The plurality of magnetoresistive elements 3 are fixed to the housing 8 at predetermined intervals in the front-rear direction. The plurality of magnetoresistive elements 3 are mounted on the other surface of the substrate 7. That is, in this embodiment, a plurality of magnetoresistive elements 3 are mounted on a common substrate 7.

  The casing 8 is made of a conductive metal material. The housing 8 is made of a nonmagnetic metal material. Specifically, the housing 8 is made of an aluminum alloy. The housing 8 is formed in a substantially rectangular tube shape with a flat bottom having a substantially rectangular plate-shaped bottom portion 8a and a substantially rectangular tube-shaped tube portion 8b. The upper surface 8c and the lower surface 8d of the bottom 8a are substantially parallel to the XY plane.

  On the lower surface 8d of the bottom portion 8a, a convex portion 8e protruding downward is formed as shown in FIGS. The convex part 8e is formed so that the shape when viewed from above and below is rectangular. Moreover, the convex part 8e is formed in the center position in the left-right direction of the lower surface 8d, and in the predetermined range in the left-right direction. Moreover, the convex part 8e is formed in the whole region in the front-back direction of the lower surface 8d.

  A plurality of through holes 8f penetrating in the vertical direction are formed at the center position of the bottom 8a in the left-right direction. In this embodiment, six through holes 8f are formed. The plurality of through holes 8f are formed at a predetermined interval in the front-rear direction. The plurality of through holes 8f are formed at positions where the convex portions 8e are formed in the left-right direction. The through hole 8f is formed so that the shape when viewed from above and below is substantially rectangular. The width of the through hole 8f in the left-right direction is wider than the width in the longitudinal direction of the magnetoresistive element 3 formed in a substantially rectangular flat plate shape. The width of the through hole 8f in the front-rear direction is substantially equal to the width of the magnetoresistive element 3 in the short direction. A wall 8g is formed between each of the plurality of through holes 8f. Moreover, the outer side of the left-right direction of the through-hole 8f arrange | positioned at the both ends of the front-back direction becomes the wall part 8h.

  One wall surface 8j (see FIG. 8) and the other wall surface 8k of the wall portion 8g are substantially parallel to the ZX plane. Further, the wall surfaces 8j and 8k are side surfaces of the through hole 8f in the front-rear direction. The wall surface 8j is formed with a protruding portion 8m protruding inside the through hole 8f in the front-rear direction, and the wall surface 8k is formed with a protruding portion 8n protruding inside the through hole 8f in the front-rear direction. The upper and lower surfaces of the protrusions 8m and 8n are substantially parallel to the XY plane. As shown in FIG. 5, the upper surfaces of the protruding portions 8m and 8n are arranged on the same plane as the upper surface 8c of the bottom portion 8a. The lower surface of the protruding part 8m and the lower surface of the protruding part 8n are arranged on the same plane. Further, as shown in FIG. 6 and the like, the lower surfaces of the protruding portions 8m and 8n are disposed above the lower surface 8p of the convex portion 8e. In the present embodiment, the lower surfaces of the protruding portions 8m and 8n are arranged on substantially the same plane as the lower surface 8d of the bottom portion 8a.

  The protruding portion 8m is formed over the entire wall surface 8j in the left-right direction. An intermediate position of the protruding portion 8m in the left-right direction is a protruding portion 8q that protrudes to the inside of the through hole 8f from both ends of the protruding portion 8m in the left-right direction. The protruding portion 8m is as viewed from the up-down direction. The shape is formed to be stepped. The width of the convex portion 8q in the left-right direction is substantially equal to the width in the longitudinal direction of the magnetoresistive element 3 formed in a substantially rectangular flat plate shape. The protruding portion 8n is formed at an intermediate position of the wall surface 8k in the left-right direction. The protruding portion 8n is formed so that the shape when viewed in the vertical direction is a rectangular shape. The width of the protruding portion 8n in the left-right direction is narrower than the width in the longitudinal direction of the magnetoresistive element 3 formed in a substantially rectangular flat plate shape.

  The protruding amount of the protruding portion 8n from the wall surface 8k in the front-rear direction is substantially equal to the protruding amount of the convex portion 8q from the wall surface 8j in the front-rear direction. In addition, a protruding portion 8m is formed on the inner wall surface in the front-rear direction of one wall portion 8h of the two wall portions 8h, and the front-rear direction of the other wall portion 8h of the two wall portions 8h. A protruding portion 8n is formed on the inner wall surface.

  At one end of the wall surface 8k in the left-right direction, an abutting portion 8r that slightly protrudes inside the through hole 8f in the front-rear direction is formed. The upper and lower surfaces of the contact part 8r are substantially parallel to the XY plane. As shown in FIG. 7 and the like, the lower surface of the contact portion 8r is disposed on the same plane as the lower surface 8p of the convex portion 8e, and the upper surface of the contact portion 8r is disposed below the upper surface 8c of the bottom portion 8a. ing. In the present embodiment, the upper surface of the contact portion 8r is disposed on substantially the same plane as the lower surfaces of the protruding portions 8m and 8n. The contact portion 8r is formed to have a rectangular shape when viewed in the vertical direction, and the end surface 8s of the contact portion 8r in the left-right direction is substantially parallel to the YZ plane. The protruding amount of the contact portion 8r from the wall surface 8k in the front-rear direction is smaller than the protruding amount of the protruding portion 8n from the wall surface 8k in the front-rear direction.

  In the magnetoresistive element 3, the vertical direction, which is the height direction of the wall portions 8g, 8h, and the thickness direction of the magnetoresistive element 3 are substantially aligned, and the magnetosensitive surface of the magnetoresistive element 3 is on the lower side. It is fixed between the wall portion 8h and the wall portion 8g and between the wall portions 8g so as to face. The magnetoresistive element 3 is fixed in contact with the lower surfaces of the protruding portions 8m and 8n so as to overlap the protruding portion 8q of the protruding portion 8m and the protruding portion 8n in the vertical direction. Further, the magnetoresistive element 3 is fixed in a state in which one end face of the magnetoresistive element 3 in the left-right direction, which is the direction along the wall surfaces 8g and 8h, is in contact with the end face 8s of the contact portion 8r. In addition, the magnetoresistive element 3 is such that the end face in the short direction of the magnetoresistive element 3 makes light contact with the inner wall surface and the wall surfaces 8j and 8k in the front-rear direction of the wall portion 8h, or the inner wall surface in the front-rear direction of the wall portion 8h The wall surfaces 8j, 8k and the magnetoresistive element 3 are fixed with a slight gap between them.

  In addition, the magnetoresistive element 3 has a lower surface of the projecting portions 8m and 8n, an inner wall surface in the front-rear direction of the wall portion 8h, and an adhesive applied to the wall surfaces 8j and 8k. Are fixed to the inner wall surface in the front-rear direction and the wall surfaces 8j, 8k. In this embodiment, an element fixing portion to which the magnetoresistive element 3 is fixed is constituted by the protruding portions 8m and 8n and the inner wall surface and the wall surfaces 8j and 8k in the front-rear direction of the wall portion 8h. A plurality of element fixing portions to which each of the plurality of magnetoresistive elements 3 is fixed are formed at predetermined intervals. A wall portion 8g is formed between each of the plurality of element fixing portions.

  The height of the walls 8g and 8h (the height in the vertical direction) is equal to or greater than the thickness of the magnetoresistive element 3. In this embodiment, the distance in the vertical direction between the lower surfaces of the protruding portions 8m and 8n and the lower surfaces of the wall portions 8g and 8h (that is, the lower surface 8p of the convex portion 8e) is equal to or greater than the thickness of the magnetoresistive element 3. Therefore, the lower surface of the magnetoresistive element 3 fixed in contact with the lower surfaces of the protruding portions 8m and 8n is disposed on the same plane as the lower surface 8p of the convex portion 8e or above the lower surface 8p. It does not protrude from 8p. In this embodiment, the plurality of magnetoresistive elements 3 after being fixed to the housing 8 are mounted on the substrate 7.

  A substrate 7 is fixed on the inner peripheral side of the cylindrical portion 8b. The substrate 7 is fixed to the inner peripheral side of the cylindrical portion 8b so that one surface on which the connector 12 is mounted faces upward. The left and right side surface portions 8t of the cylindrical portion 8b formed in a substantially square cylindrical shape are thicker than the front and rear side surface portions 8u of the cylindrical portion 8b. Moreover, the convex part 8v which protrudes upwards is formed in each of the four corners of the cylinder part 8b. In this embodiment, the head portion 4 is fixed to a fixed member such as a mounting device using the convex portion 8v.

  The sheet-like member 9 is formed in a sheet shape from a conductive metal material. The sheet-like member 9 is made of a nonmagnetic metal material. Specifically, the sheet-like member 9 is an aluminum foil. The sheet-like member 9 is formed in a substantially rectangular shape slightly smaller than the lower surface 8p of the convex portion 8e, and is fixed to the lower surface 8p. The sheet-like member 9 covers the magnetic sensitive surfaces of the plurality of magnetoresistive elements 3. That is, in this embodiment, the magnetic sensitive surfaces of the plurality of magnetoresistive elements 3 are covered with the common sheet-like member 9. In this embodiment, the lower surface 8p of the convex portion 8e to which the sheet-like member 9 is fixed is a sensor surface that is disposed to face the magnetic scale.

  The plate-like member 10 is formed in a flat plate shape with a conductive metal material. The plate member 10 is made of a nonmagnetic metal material. Specifically, the plate member 10 is formed of an aluminum alloy. The plate member 10 is formed in a substantially rectangular shape. On the left and right end faces of the plate-like member 10, fixing convex portions 10 a for fixing the plate-like member 10 to the housing 8 are formed so as to protrude outward in the left-right direction. The fixing convex portion 10a is fixed to the upper surface of the side surface portion 8t of the cylindrical portion 8b. Further, the plate-like member 10 is formed with a through hole 10b through which the connector 12 is inserted. The plate member 10 covers the upper surface of the substrate 7.

(Main effects of this form)
As described above, in this embodiment, the magnetoresistive element 3 is configured such that the end surface in the short direction of the magnetoresistive element 3 is in light contact with the inner wall surface and the wall surfaces 8j and 8k in the front-rear direction of the wall portion 8h. The inner wall surface in the front-rear direction of 8h and the wall surfaces 8j and 8k and the end surface in the short direction of the magnetoresistive element 3 are fixed to the housing 8 with a slight gap therebetween. Therefore, in this embodiment, it is possible to position the magnetoresistive element 3 in the front-rear direction using the wall portions 8g and 8h. Therefore, in this embodiment, it is possible to ensure dimensional accuracy between the plurality of magnetoresistive elements 3 mounted on the substrate at a predetermined interval in the front-rear direction. Further, in this embodiment, since it is possible to position the magnetoresistive element 3 in the front-rear direction using the walls 8g, 8h, a configuration for positioning the magnetoresistive element 3 in the front-rear direction is separately provided in the housing 8. Compared with the case where it provides, it becomes possible to simplify the structure of the housing 8.

  In this embodiment, the housing 8 is formed of a nonmagnetic metal material having conductivity. For this reason, it is possible to suppress interference of electric signals between the magnetoresistive elements 3 adjacent to each other via the wall portion 8g by the wall portion 8. Therefore, in this embodiment, it is possible to reduce noise generated in each magnetoresistive element 3 due to the interference of the electric signal. Further, in this embodiment, it is possible to reduce noise generated in each magnetoresistive element 3 due to an electrical signal from the outside of the head unit 4.

  In particular, in this embodiment, the lower surface of the magnetoresistive element 3 fixed in contact with the lower surfaces of the protruding portions 8m and 8n is disposed on the same plane as the lower surface 8p of the convex portion 8e or above the lower surface 8p. The magnetoresistive element 3 does not protrude from the wall 8g in the vertical direction. For this reason, in this embodiment, it is possible to effectively suppress interference of electric signals between the adjacent magnetoresistive elements 3 via the wall 8g. Therefore, in this embodiment, it is possible to effectively reduce noise generated in each magnetoresistive element 3 due to the interference of the electric signal.

  In the present embodiment, in addition to the adhesive applied to the inner wall surface in the front-rear direction of the wall portion 8h and the wall surfaces 8j, 8k, the magnetoresistive element 3 is formed by the adhesive applied to the lower surfaces of the protruding portions 8m, 8n. It is fixed to. Therefore, in this embodiment, it is possible to increase the fixing strength of the magnetoresistive element 3 to the housing 8.

  In this embodiment, a contact portion 8r is formed at one end of the wall surface 8k in the left-right direction, and an end surface 8s of the contact portion 8r in the left-right direction is substantially parallel to the YZ plane. In this embodiment, the magnetoresistive element 3 is fixed to the housing 8 in a state where one end face of the magnetoresistive element 3 in the left-right direction is in contact with the end face 8s. Therefore, in this embodiment, the magnetoresistive element 3 can be positioned in the left-right direction using the contact portion 8r.

  In this embodiment, the sheet-like member 9 that covers the magnetic sensitive surfaces of the plurality of magnetoresistive elements 3 is formed of a nonmagnetic metal material having conductivity. Therefore, in this embodiment, it is possible to reduce noise generated in the magnetoresistive element 3 due to an electric signal from the outside of the head unit 4. In this embodiment, since the magnetic sensitive surfaces of the plurality of magnetoresistive elements 3 are covered by the common sheet-like member 9, a plurality of sheet-like members covering each of the magnetic sensitive surfaces of the plurality of magnetoresistive elements 3 are provided. Compared with the case where it is provided, the configuration of the magnetic sensor device 1 can be simplified, and the assembly of the magnetic sensor device 1 is facilitated.

  In the present invention, the plate-like member 10 covering the upper surface of the substrate 7 is formed of a nonmagnetic metal material having conductivity. Therefore, in this embodiment, it is possible to reduce noise generated in the substrate 7 and the magnetoresistive element 3 due to an electrical signal from the outside of the head unit 4.

(Other embodiments)
The above-described embodiment is an example of a preferred embodiment of the present invention, but is not limited to this, and various modifications can be made without departing from the scope of the present invention.

  In the embodiment described above, the protrusions 8m and 8n are formed on the wall surfaces 8j and 8k of the housing 8, but the protrusions 8m and 8n may not be formed on the wall surfaces 8j and 8k of the housing 8. In this case, the magnetoresistive element 3 is applied to the inner wall surface and the wall surfaces 8j, 8k in the front-rear direction of the wall portion 8h by the adhesive applied to the inner wall surface and the wall surfaces 8j, 8k in the front-rear direction of the wall portion 8h. Fixed. In this case, the element fixing portion to which the magnetoresistive element 3 is fixed is constituted by the inner wall surface in the front-rear direction of the wall portion 8h and the wall surfaces 8j, 8k.

  In the embodiment described above, the lower surface of the magnetoresistive element 3 fixed in contact with the lower surfaces of the protruding portions 8m and 8n is disposed on the same plane as the lower surface 8p of the convex portion 8e or above the lower surface 8p. The magnetoresistive element 3 does not protrude from the wall 8g in the vertical direction. In addition to this, for example, the magnetoresistive element 3 may protrude from the wall 8g in the vertical direction as long as the effect of electrostatic shielding and electromagnetic shielding can be imparted to the wall 8g.

  In the embodiment described above, the casing 8 is formed of a nonmagnetic metal material having conductivity, but the casing 8 may be formed of a soft magnetic material or a resin material. When the casing 8 is formed of a soft magnetic metal material, it is possible to suppress interference of electromagnetic signals between the adjacent magnetoresistive elements 3 via the wall portion 8g. As a result, it is possible to reduce noise generated in each magnetoresistive element 3. In this case, noise generated in each magnetoresistive element 3 due to an electromagnetic signal from the outside of the head unit 4 can be reduced.

  In the embodiment described above, the magnetic sensor device 1 includes the six magnetoresistive elements 3. However, the number of the magnetoresistive elements 3 included in the magnetic sensor device 1 may be any of two to five. It may be 7 or more.

DESCRIPTION OF SYMBOLS 1 Magnetic sensor apparatus 3 Magnetoresistive element 7 Board | substrate 8 Housing 8f Through-hole 8g Wall part 8j, 8k Wall surface (a part of element fixing part)
8m, 8n Protruding part (part of element fixing part)
8p bottom surface (end of wall)
8r contact part 9 sheet-like member 10 plate-like member X direction along wall surface Z height direction of wall part

Claims (8)

  A plurality of magnetoresistive elements, a housing in which a plurality of element fixing portions to which each of the plurality of magnetoresistive elements is fixed are formed, and a common substrate on which the plurality of magnetoresistive elements are mounted. Magnetic sensor device. The housing is formed of a metal material,
The magnetic sensor device according to claim 1, wherein a wall portion is formed between each of the plurality of element fixing portions.   The magnetic sensor device according to claim 2, wherein the casing is made of a nonmagnetic material. The magnetoresistive element is formed in a flat plate shape, and is fixed to the element fixing portion so that a thickness direction thereof substantially coincides with a height direction of the wall portion,
The height of the wall is equal to or greater than the thickness of the magnetoresistive element,
The magnetic sensor device according to claim 2, wherein the magnetoresistive element is fixed to the element fixing portion so as not to protrude from an end surface of the wall portion in a height direction of the wall portion. A through hole penetrating in the height direction of the wall portion is formed between the plurality of wall portions,
The element fixing portion includes a protruding portion that protrudes from the wall surface of the wall portion toward the inside of the through hole and to which the magnetoresistive element is fixed,
The magnetic sensor device according to claim 2, wherein the magnetoresistive element is also fixed to the wall surface, and the wall surface is a part of the element fixing portion.   6. The abutting portion with which one end surface of the magnetoresistive element in the direction along the wall surface of the wall portion abuts is formed on the wall portion. Magnetic sensor device. A common sheet-like member that is formed in a sheet shape from a non-magnetic metal material and covers the magnetic sensitive surfaces of the plurality of magnetoresistive elements
The magnetic sensor device according to claim 1, wherein the sheet-like member is fixed to the housing. A plate-like member that is formed in a flat plate shape with a nonmagnetic metal material and covers the substrate,
The magnetic sensor device according to claim 1, wherein the plate-like member is fixed to the housing.

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