JP2007008763A - Manufacturing method of quartz glass tube and manufacturing unit - Google Patents

Manufacturing method of quartz glass tube and manufacturing unit Download PDF

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JP2007008763A
JP2007008763A JP2005191677A JP2005191677A JP2007008763A JP 2007008763 A JP2007008763 A JP 2007008763A JP 2005191677 A JP2005191677 A JP 2005191677A JP 2005191677 A JP2005191677 A JP 2005191677A JP 2007008763 A JP2007008763 A JP 2007008763A
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quartz glass
inner diameter
glass tube
glass cylinder
outer diameter
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Makoto Mitani
真 三谷
Yuichi Miyagishi
裕一 宮岸
Keigo Nakajima
啓吾 中島
Takeshi Nishise
武司 西瀬
Ariyoshi Hase
有祥 長谷
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Nippon Steel Corp
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Sumitomo Metal Industries Ltd
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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B23/00—Re-forming shaped glass
    • C03B23/04—Re-forming tubes or rods
    • C03B23/047—Re-forming tubes or rods by drawing
    • C03B23/0476—Re-forming tubes or rods by drawing onto a forming die, e.g. a mandrel or a wire

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  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a quartz glass tube excellent in the dimensional accuracy of its inner diameter, and its manufacturing unit. <P>SOLUTION: This quartz glass tube is manufactured by heating a quartz glass cylinder 2, then in the disformation region, it is drawn while making the inner surface of the quartz glass cylinder 2 in contact with an inner diameter forming tool 5. It is favorable to make the inner surface of the quartz glass cylinder 2 in contact with the inner diameter forming tool 5 inserted from the upper stream side. The inner diameter forming tool 5 has a cylindrical forming part and a body, and it is favorable that the outer diameter of the body is not smaller than (the outer diameter of the forming part) but not greater than (the inner diameter of the quartz glass cylinder minus 10 mm). <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、光ファイバプリフォーム製造用のクラッド管などに用いることができる内径寸法精度の優れた石英ガラス管の製造方法および製造装置に関する。   The present invention relates to a method and an apparatus for manufacturing a quartz glass tube having excellent inner diameter dimensional accuracy that can be used for a cladding tube for manufacturing an optical fiber preform.

現在、光通信の更なる高速化・大容量化をはかるため光通信システムにおいては、波長多重数の増大、使用波長領域の拡大が進められている。そして、波長多重(WDM：Wavelength Division Multiplexing)光伝送を行う光伝送システムにおいて幹線系では、ノンゼロ分散シフト光ファイバのような比較的コア径の小さい光ファイバが使用される。このような光ファイバにおいては、伝送損失の低減が求められている。伝送損失を生じさせる原因の一つとして、光ファイバ同士の接続によって生じる接続損失と呼ばれるものがある。   At present, in order to further increase the speed and capacity of optical communication, in the optical communication system, the number of wavelength multiplexing is increased and the use wavelength region is expanded. In an optical transmission system that performs wavelength division multiplexing (WDM) optical transmission, an optical fiber having a relatively small core diameter, such as a non-zero dispersion shifted optical fiber, is used in the trunk line system. Such optical fibers are required to reduce transmission loss. One cause of transmission loss is what is called connection loss caused by connection between optical fibers.

この接続損失を発生させる要因の一つに、つなぎ合わせる光ファイバのコアの軸芯が一致していないこと挙げられる。これは光ファイバの規格において、コア／クラッド偏芯量として定義されている。コア／クラッド偏芯量による接続損失の影響は、特にコア径の小さい光ファイバにおいて大きくなる。   One of the factors that cause this connection loss is that the axes of the cores of the optical fibers to be joined do not match. This is defined as the core / clad eccentricity in the optical fiber standard. The influence of the connection loss due to the eccentricity of the core / cladding is particularly large in an optical fiber having a small core diameter.

一般的に光ファイバプリフォームは、主としてＭＣＶＤ法（Modified Chemical Vapor Deposition Method；内付け法）、ＶＡＤ法（Vapor Phase Axial Deposition Method；気相軸付け法）、ＯＶＤ法（Outside Vapor Phase Deposition Method；外付け法）により製造される。光ファイバは、この光ファイバプリフォームを線引きすることによって得られる。   Generally, optical fiber preforms are mainly formed by MCVD (Modified Chemical Vapor Deposition Method), VAD (Vapor Phase Axial Deposition Method), and OVD (Outside Vapor Phase Deposition Method). Manufactured by the attaching method). An optical fiber is obtained by drawing this optical fiber preform.

ＭＣＶＤ法の場合には、まずサブストレイト管と呼ばれる石英ガラス管を使用し、光ファイバのコアに相当する部分をＭＣＶＤ法により内付けしてコアロッドを作製する。光ファイバプリフォームは、コアロッドをクラッド管と呼ばれる石英ガラス管に挿入し、これらを加熱して一体化することで製造される。なお、コアロッドとクラッド管とを一体化する技術は、ＶＡＤ法やＯＶＤ法で製作されたコアロッドをクラッド管と一体化する場合にも用いられる。   In the case of the MCVD method, first, a quartz glass tube called a substrate tube is used, and a portion corresponding to the core of the optical fiber is internally attached by the MCVD method to produce a core rod. An optical fiber preform is manufactured by inserting a core rod into a quartz glass tube called a clad tube, and heating and integrating them. The technology for integrating the core rod and the cladding tube is also used when the core rod manufactured by the VAD method or the OVD method is integrated with the cladding tube.

これらの製造方法で使用される石英ガラス管の寸法精度は、コア／クラッド偏芯量に多大な影響を及ぼすため、その偏肉量、内径等の精度に対する要求が厳しい。即ち、石英ガラス管の偏肉量が大きいと、石英ガラス管の外径軸中心および内径軸中心のズレが大きくなる。また、石英ガラス管の内径が設計値と異なると、一体化した際にクラッド管とコアロッドの軸中心がずれる。従って、いずれの場合もコア／クラッド偏芯量が悪化する。   Since the dimensional accuracy of the quartz glass tube used in these manufacturing methods has a great influence on the core / cladding eccentricity, there are severe demands for the accuracy of the thickness deviation and the inner diameter. That is, when the thickness deviation of the quartz glass tube is large, the deviation between the outer diameter axis center and the inner diameter axis center of the quartz glass tube increases. Further, if the inner diameter of the quartz glass tube is different from the design value, the axial centers of the clad tube and the core rod are shifted when they are integrated. Accordingly, in any case, the core / cladding eccentric amount is deteriorated.

これらの問題を回避する一つの手段として、特許文献１には、熱間プラグ圧入法により石英ガラス体を開口する方法において、開口された部分を減圧しつつ開口する石英ガラスシリンダ（半製品）の製造方法、および、この石英ガラスシリンダを所望の寸法に延伸する石英ガラス管の製造方法が開示されている。   As one means for avoiding these problems, Patent Document 1 discloses a method of opening a quartz glass body by a hot plug press-fitting method in a quartz glass cylinder (semi-finished product) that opens while decompressing the opened portion. A manufacturing method and a manufacturing method of a quartz glass tube for extending the quartz glass cylinder to a desired dimension are disclosed.

特開２００２−１２４３３号公報JP 2002-12433 A

特許文献１に記載の方法で製造された石英ガラスシリンダそれ自体は、非常に寸法精度が優れている。しかし、その後の延伸工程において、製造条件によっては内径を安定させるのが困難となる場合がある。また、特許文献１の段落０００６に記載されているように、この方法では、石英ガラスシリンダの外径／内径比は、石英ガラス管の外径／内径比とほぼ同じであるような製造条件を前提としている。しかし、このような前提のもとでは、他品種の生産をする場合に、それぞれの石英ガラス管の外径／内径比にあわせて、対応する外径／内径比の石英ガラスシリンダを準備する必要がある。   The quartz glass cylinder itself manufactured by the method described in Patent Document 1 has very high dimensional accuracy. However, in the subsequent stretching process, it may be difficult to stabilize the inner diameter depending on the manufacturing conditions. Further, as described in paragraph 0006 of Patent Document 1, in this method, the manufacturing conditions are such that the outer diameter / inner diameter ratio of the quartz glass cylinder is substantially the same as the outer diameter / inner diameter ratio of the quartz glass tube. It is assumed. However, under such assumptions, when producing other types, it is necessary to prepare a quartz glass cylinder with a corresponding outer diameter / inner diameter ratio in accordance with the outer diameter / inner diameter ratio of each quartz glass tube. There is.

本発明は、上記の問題を解決するためになされたものであって、光ファイバを製造する際に使用される石英ガラス管の内径寸法精度を良くし、かつ延伸前後で外径／内径比を変更することができる石英ガラス管の製造方法および製造装置を提供することを目的とする。   The present invention has been made to solve the above-mentioned problems, and improves the accuracy of the inner diameter of a quartz glass tube used for manufacturing an optical fiber, and the outer diameter / inner diameter ratio before and after stretching. It is an object of the present invention to provide a method and apparatus for manufacturing a quartz glass tube that can be changed.

本発明は、下記の（１）〜（３）に示す石英ガラスの製造方法および下記（４）〜（６）に示す製造装置を要旨とする。   The gist of the present invention is a manufacturing method of quartz glass shown in the following (1) to (3) and a manufacturing apparatus shown in the following (4) to (6).

（１）石英ガラスシリンダを加熱しつつ、延伸する石英ガラス管の製造方法であって、変形領域において石英ガラスシリンダの内面を内径成形治具に接触させながら延伸することを特徴とする石英ガラス管の製造方法。   (1) A method for producing a quartz glass tube that is stretched while heating the quartz glass cylinder, wherein the quartz glass tube is stretched while the inner surface of the quartz glass cylinder is brought into contact with an inner diameter forming jig in a deformation region. Manufacturing method.

（２）石英ガラスシリンダの内面を、その上流側から挿入した内径成形治具に接触させながら延伸することを特徴とする上記の（１）に記載の石英ガラス管の製造方法。   (2) The method for producing a quartz glass tube according to (1), wherein the inner surface of the quartz glass cylinder is stretched while being brought into contact with an inner diameter forming jig inserted from the upstream side.

（３）内径成形治具として、円柱状の成形部および胴体部で構成され、胴体部の外径が〔成形部の外径〕以上、かつ〔石英ガラスシリンダの内径−10mm〕以下であるものを用いることを特徴とする上記の（２）に記載の石英ガラス管の製造方法。   (3) The inner diameter forming jig is composed of a cylindrical molding part and a body part, and the outer diameter of the body part is not less than [the outer diameter of the molding part] and not more than [the inner diameter of the quartz glass cylinder−10 mm]. The method for producing a quartz glass tube according to (2) above, wherein

（４）石英ガラスシリンダを回転可能な状態で保持するチャックと、石英ガラスシリンダを加熱する加熱装置と、石英ガラスシリンダ内部に挿入して内径を成形する内径成形治具を有することと特徴とする石英ガラス管の製造装置。   (4) A chuck that holds the quartz glass cylinder in a rotatable state, a heating device that heats the quartz glass cylinder, and an inner diameter forming jig that is inserted into the quartz glass cylinder to form an inner diameter. Quartz glass tube manufacturing equipment.

（５）内径成形治具は、上流側から石英ガラスシリンダに挿入されていることを特徴とする上記の（４）に記載の石英ガラス管の製造装置。   (5) The quartz glass tube manufacturing apparatus according to (4), wherein the inner diameter forming jig is inserted into the quartz glass cylinder from the upstream side.

（６）内径成形治具は、円柱状の成形部および胴体部を有し、胴体部の外径が〔成形部の外径〕以上、かつ〔石英ガラスシリンダの内径−10mm〕以下であることを特徴とする上記の（５）に記載の石英ガラス管の製造装置。   (6) The inner diameter forming jig has a cylindrical molding part and a body part, and the outer diameter of the body part is not less than [the outer diameter of the molding part] and not more than [the inner diameter of the quartz glass cylinder−10 mm]. The apparatus for producing a quartz glass tube according to the above (5), characterized in that

本発明によれば、石英ガラス管の内径寸法精度を安定化できるので、この石英ガラス管を光ファイバプリフォーム製造用クラッド管に用いた場合には、接続損失の小さい光ファイバを提供することができる。また、延伸前の石英ガラスシリンダの外径ＯＤ1および内径ＩＤ1ならびに延伸後の石英ガラス管の外径ＯＤ2および内径ＩＤ2がＯＤ1＞ＯＤ2およびＩＤ1＞ＩＤ2の条件を満足する延伸条件において、ＯＤ1／ＩＤ1≧ＯＤ2／ＩＤ2の条件を満たす延伸も、ＯＤ1／ＩＤ1＜ＯＤ2／ＩＤ2の条件を満たす延伸も行うことができるので、他品種小ロット生産においても、準備すべき石英ガラスシリンダの種類を少なくできる。   According to the present invention, since the accuracy of the inner diameter of the quartz glass tube can be stabilized, when this quartz glass tube is used as a cladding tube for manufacturing an optical fiber preform, it is possible to provide an optical fiber having a small connection loss. it can. Further, in the stretching conditions where the outer diameter OD1 and inner diameter ID1 of the quartz glass cylinder before stretching and the outer diameter OD2 and inner diameter ID2 of the quartz glass tube after stretching satisfy the conditions of OD1> OD2 and ID1> ID2, OD1 / ID1 ≧ Since the drawing satisfying the condition of OD2 / ID2 and the drawing satisfying the condition of OD1 / ID1 <OD2 / ID2 can be performed, the types of quartz glass cylinders to be prepared can be reduced even in small lot production of other varieties.

図１は、本発明の石英ガラス管の製造装置を例示した模式図である。   FIG. 1 is a schematic view illustrating a quartz glass tube manufacturing apparatus according to the present invention.

図１に示すように、本発明の石英ガラス管の製造装置１においては、例えば、石英ガラスシリンダ２を回転可能な状態で保持するチャック3-1、3-2と、石英ガラスシリンダ２を加熱するヒータ４と、石英ガラスシリンダ２内部に挿入して内径を成形する内径成形治具５が設置されている。石英ガラスシリンダ２は、ダミー材6-1、6-2を介してチャック3-1、3-2に保持されており、上流側ダミー材（ダミーシリンダ）6-1後端には密閉ホルダ7-1が設置され、その後方には真空ポンプ（図示しない）が配置されている。   As shown in FIG. 1, in the quartz glass tube manufacturing apparatus 1 of the present invention, for example, chucks 3-1 and 3-2 that hold the quartz glass cylinder 2 in a rotatable state and the quartz glass cylinder 2 are heated. The heater 4 that is to be inserted and the inner diameter forming jig 5 that is inserted into the quartz glass cylinder 2 to form the inner diameter are provided. The quartz glass cylinder 2 is held by chucks 3-1 and 3-2 via dummy materials 6-1 and 6-2, and a sealing holder 7 is provided at the rear end of the upstream dummy material (dummy cylinder) 6-1. -1 is installed, and a vacuum pump (not shown) is arranged behind it.

なお、下流側のダミー材6-2としては、石英ガラスシリンダ２の先端が閉塞している場合は、ダミーロッドを使用し、石英ガラスシリンダ２先端が開口している場合は、ダミーシリンダもしくはダミーロッドを使用すればよい。また、ダミー材6-2としてダミーシリンダを使用する場合には、ダミーシリンダ後端（図の右側）に密閉ホルダ7-2を設置し、その後方には真空ポンプ（図示しない）が配置されていることが好ましい。   As the downstream dummy material 6-2, when the tip of the quartz glass cylinder 2 is closed, a dummy rod is used. When the tip of the quartz glass cylinder 2 is open, a dummy cylinder or a dummy is used. A rod may be used. When a dummy cylinder is used as the dummy material 6-2, a hermetic holder 7-2 is installed at the rear end (right side of the figure) of the dummy cylinder, and a vacuum pump (not shown) is placed behind it. Preferably it is.

石英ガラスシリンダ２は、予めダミー材6-1と溶着された状態でチャック3-1に保持され、回転が与えられた状態で、ヒータ４内に挿入される。一方、ダミー材6-2はチャック3-2に保持され、回転が与えられた状態で、下流側からヒータ４内に挿入される。そして、石英ガラスシリンダ２およびダミー材6-2は、ヒータ４の中心部付近で加熱され、溶着され、一体化した状態となる。   The quartz glass cylinder 2 is held by the chuck 3-1 in a state where it is welded to the dummy material 6-1 in advance, and is inserted into the heater 4 while being rotated. On the other hand, the dummy material 6-2 is held by the chuck 3-2, and is inserted into the heater 4 from the downstream side in a state where rotation is given. The quartz glass cylinder 2 and the dummy material 6-2 are heated, welded, and integrated in the vicinity of the center of the heater 4.

ダミー材6-2と一体化した石英ガラスシリンダ２は、チャック3-1、3-2により回転が与えられつつ、ヒータ４により所定の温度に加熱された状態で、所定の移動速度で下流側へと移動する。このとき、溶着した位置の移動とともに内径成形治具５も移動させ、所定の位置に内径成形治具５の先端が到達した時点でこれを固定する。その後、石英ガラスシリンダ２内部を減圧し、石英ガラスシリンダの内面と内径成形治具５外表面とを接触させる。   The quartz glass cylinder 2 integrated with the dummy material 6-2 is heated at a predetermined temperature by the heater 4 while being rotated by the chucks 3-1 and 3-2, and is downstream at a predetermined moving speed. Move to. At this time, the inner diameter forming jig 5 is also moved together with the movement of the welded position, and is fixed when the tip of the inner diameter forming jig 5 reaches a predetermined position. Thereafter, the inside of the quartz glass cylinder 2 is decompressed, and the inner surface of the quartz glass cylinder and the outer surface of the inner diameter forming jig 5 are brought into contact with each other.

本発明の石英ガラス管の製造装置においては、内径成形治具５は、上流側から石英ガラスシリンダ２に挿入されていることが望ましい。延伸後の石英ガラス管は延伸前の石英ガラスシリンダより相当長くなり、しかも、石英ガラス管の内径は石英ガラスシリンダのそれより小さい。このため、内径成形治具を、下流側から石英ガラスシリンダに挿入する場合には、石英ガラス管の内径目標値と同じ外径を有する成形部と、更にそれより小さい外径の胴体部および指示ロッドを設ける必要がある。そうすると、内径成形治具の剛性が不十分となって、偏芯量が増加したり、内径にバラツキが生じたりする場合がある。このため、内径成形治具は、上流側から石英ガラスシリンダに挿入されていることが望ましい。   In the quartz glass tube manufacturing apparatus of the present invention, it is desirable that the inner diameter forming jig 5 is inserted into the quartz glass cylinder 2 from the upstream side. The quartz glass tube after stretching is considerably longer than the quartz glass cylinder before stretching, and the inner diameter of the quartz glass tube is smaller than that of the quartz glass cylinder. For this reason, when the inner diameter forming jig is inserted into the quartz glass cylinder from the downstream side, the molded part having the same outer diameter as the inner diameter target value of the quartz glass tube, the body part having an outer diameter smaller than that, and the instruction It is necessary to provide a rod. If it does so, the rigidity of an internal diameter shaping | molding jig | tool may become inadequate, the amount of eccentricity may increase, or an internal diameter may vary. For this reason, it is desirable that the inner diameter forming jig is inserted into the quartz glass cylinder from the upstream side.

なお、図１では、石英ガラスシリンダの上流側および石英ガラス管の下流側からそれぞれ減圧する構成の装置を示しているが、このような減圧を行うのは必須ではない。チャック3-1の移動速度を調整するなどにより石英ガラスシリンダの内面を内径成形治具の外面に密着させて延伸させることができるからである。   Although FIG. 1 shows an apparatus configured to depressurize from the upstream side of the quartz glass cylinder and the downstream side of the quartz glass tube, such depressurization is not essential. This is because the inner surface of the quartz glass cylinder can be brought into close contact with the outer surface of the inner diameter forming jig and can be extended by adjusting the moving speed of the chuck 3-1.

しかし、石英ガラスシリンダ内を減圧すれば、石英ガラスシリンダ内を減圧しない場合よりも石英ガラスシリンダ内面の収縮が進みやすくなる。このため、石英ガラスシリンダの内面が内径成形治具の外面に密着が容易となり、石英ガラス管の内径変動を抑制しやすくなる。また、延伸過程において内径変動が抑制されているため、外径の変動も抑制された石英ガラス管を製造することが可能である。従って、石英ガラスシリンダ内および／または石英ガラス管内を減圧するのが望ましい。   However, if the pressure inside the quartz glass cylinder is reduced, the inner surface of the quartz glass cylinder is more easily contracted than when the pressure inside the quartz glass cylinder is not reduced. For this reason, the inner surface of the quartz glass cylinder can be easily adhered to the outer surface of the inner diameter forming jig, and the inner diameter fluctuation of the quartz glass tube can be easily suppressed. In addition, since fluctuations in the inner diameter are suppressed during the stretching process, it is possible to manufacture a quartz glass tube in which fluctuations in the outer diameter are also suppressed. Therefore, it is desirable to reduce the pressure in the quartz glass cylinder and / or the quartz glass tube.

図２は、内径成形治具を例示した模式図である。図２に示すように、内径成形治具は、内径成形治具支持ロッド（図１の８）と接続される胴体部5-1と目的とする石英ガラス管の内径寸法と同一の外径を有する成形部5-3とを有し、胴体部5-1と成形部5-3の間にはテーパー部5-2を有するものが望ましい。胴体部5-1とテーパー部5-2の外径は、成形部5-3の外径と同一にしても良いが、目的とする石英ガラス管の内径寸法が小さい場合は、内径成形治具支持ロッド（図１の８）と胴体部5-1との接続部の強度が低下し、使用中に破損する恐れがある。   FIG. 2 is a schematic view illustrating an inner diameter forming jig. As shown in FIG. 2, the inner diameter forming jig has the same outer diameter as the inner diameter dimension of the body portion 5-1 connected to the inner diameter forming jig support rod (8 in FIG. 1) and the target quartz glass tube. It is desirable to have a molded part 5-3 having a tapered part 5-2 between the body part 5-1 and the molded part 5-3. The outer diameter of the body part 5-1 and the taper part 5-2 may be the same as the outer diameter of the molding part 5-3, but if the target quartz glass tube has a small inner diameter, the inner diameter forming jig The strength of the connecting portion between the support rod (8 in FIG. 1) and the body portion 5-1 is reduced, and there is a risk of damage during use.

このため、内径成形治具５としては、胴体部5-1の外径が（成形部5-3の外径）以上であるものを用いるのがよい。また、胴体部5-1が石英ガラスシリンダと接触すると、内面疵を生じさせるので、胴体部5-1の外径の上限は、石英ガラスシリンダ５内面と接触しない程度、即ち、〔石英ガラスシリンダの内径−10mm〕以下であることが好ましい。なお、胴体部5-1の形状は、円柱状のみならず角柱等の非円形柱状でもよい。さらに、胴体部5-1の表面には凹凸状の加工等が施されていてもよい。   For this reason, as the inner diameter forming jig 5, it is preferable to use one having an outer diameter of the body portion 5-1 equal to or larger than (the outer diameter of the forming portion 5-3). Further, when the body portion 5-1 comes into contact with the quartz glass cylinder, an inner surface flaw is generated. Therefore, the upper limit of the outer diameter of the body portion 5-1 is such that it does not contact the inner surface of the quartz glass cylinder 5, that is, [quartz glass cylinder The inner diameter is preferably −10 mm or less. The shape of the body portion 5-1 may be not only a cylindrical shape but also a non-circular column shape such as a prism. Further, the surface of the body portion 5-1 may be subjected to uneven processing or the like.

成形部5-3の長さについては、石英ガラスシリンダを石英ガラス管に延伸する際の変形領域が十分に確保されていればよい。内径成径治具は、回転させても、固定させてもよいが、石英ガラス管内面に発生する傷を防止するためには、内径成形治具との摺擦を少なくするべく、内径成形治具を回転させることが望ましい。特に、内径成形治具は、それ自体が回転する必要はなく、延伸過程において石英ガラス管内面によって拘束されて必然的に同期回転する構造にしておけばよい。成形部5-3の形状は、円柱状が好ましいが、内径成形治具を回転させない場合は、非円形柱状でもよい。また、成形部5-3の表面に凹凸状の加工等が施されていてもよい。成形部5-3の先端部形状は、図２に示す例では半球状であるが、それ以外の形状としてもよい。   About the length of the shaping | molding part 5-3, the deformation | transformation area | region at the time of extending | stretching a quartz glass cylinder to a quartz glass tube should just be ensured enough. The inner diameter forming jig may be rotated or fixed, but in order to prevent scratches generated on the inner surface of the quartz glass tube, the inner diameter forming jig is used to reduce the friction with the inner diameter forming jig. It is desirable to rotate the tool. In particular, the inner diameter forming jig does not need to rotate itself, and may be configured to be constrained by the inner surface of the quartz glass tube during the stretching process and necessarily rotate synchronously. The shape of the forming portion 5-3 is preferably a columnar shape, but may be a non-circular columnar shape when the inner diameter forming jig is not rotated. Further, the surface of the molded part 5-3 may be subjected to uneven processing or the like. The shape of the tip of the molded part 5-3 is hemispherical in the example shown in FIG. 2, but may be other shapes.

本発明の製造方法においては、石英ガラスシリンダが変形する領域、即ち、ヒータの中央付近（ヒータ入口から全長の１／３〜２／３の位置）から後端までの領域に連続的に目的とする石英ガラス管の内径寸法を有する内径成形治具が配置されているため、目的とする内径寸法を有する石英ガラス管を連続的に安定して製造することができる。尚、図１では、両側のダミーシリンダから減圧可能なように真空ポンプを配置しているが、いずれか片側のダミーシリンダのみから減圧しても良い。   In the manufacturing method of the present invention, the objective is continuously in a region where the quartz glass cylinder is deformed, that is, a region from the vicinity of the center of the heater (position from 1/3 to 2/3 of the full length from the heater inlet) to the rear end. Since the inner diameter forming jig having the inner diameter dimension of the quartz glass tube is arranged, the quartz glass tube having the target inner diameter dimension can be manufactured continuously and stably. In FIG. 1, the vacuum pump is arranged so that the pressure can be reduced from the dummy cylinders on both sides, but the pressure may be reduced only from one of the dummy cylinders.

図３は、石英ガラスシリンダの変形状況を例示した模式図であり、(a)は、ＯＤ1／ＩＤ1≧ＯＤ2／ＩＤ2の条件を満たす延伸状態、(b)は、ＯＤ1／ＩＤ1＜ＯＤ2／ＩＤ2の条件を満たす延伸状態を示す。ただし、ＯＤ1は石英ガラスシリンダの外径、ＩＤ1は石英ガラスシリンダの内径、ＯＤ2は石英ガラス管の外径、ＯＤ2は石英ガラス管内径をそれぞれ意味する。本発明の製造装置を用いれば、石英ガラスシリンダの断面積に対する石英ガラス管の断面積に応じて、石英ガラス管の引き抜き速度を調整することにより、図３(a)および(b)のいずれの延伸の状態にすることも可能である。   FIG. 3 is a schematic view illustrating the deformation state of a quartz glass cylinder, where (a) is a stretched condition that satisfies the condition of OD1 / ID1 ≧ OD2 / ID2, and (b) is a condition of OD1 / ID1 <OD2 / ID2. The extending | stretching state which satisfy | fills conditions is shown. However, OD1 means the outer diameter of the quartz glass cylinder, ID1 means the inner diameter of the quartz glass cylinder, OD2 means the outer diameter of the quartz glass tube, and OD2 means the inner diameter of the quartz glass tube. If the manufacturing apparatus of the present invention is used, the drawing speed of the quartz glass tube is adjusted according to the sectional area of the quartz glass tube with respect to the sectional area of the quartz glass cylinder. It is also possible to make it a stretched state.

本発明の製造方法において、石英ガラスシリンダの回転数は、製造する石英ガラス管の寸法によるが、５〜２０rpmとすることが望ましい。これは、回転数が５rpm未満の場合、石英ガラスシリンダの均熱性が損なわれるため、減圧した際断面方向で均等に石英ガラスシリンダが収縮せず、断面内で肉厚が不均一になる可能性がある。また回転数が２０rpmを超える場合には、石英ガラス管の内面と内径成形治具外面との摺擦力が大きくなり石英ガラス管の内面に傷を発生させてしまうことがある。   In the production method of the present invention, the rotation speed of the quartz glass cylinder is preferably 5 to 20 rpm, although it depends on the size of the quartz glass tube to be produced. This is because when the number of rotations is less than 5 rpm, the thermal uniformity of the quartz glass cylinder is impaired, so when decompressed, the quartz glass cylinder may not shrink evenly in the cross-sectional direction, and the thickness may be non-uniform in the cross-section. There is. When the rotational speed exceeds 20 rpm, the frictional force between the inner surface of the quartz glass tube and the outer surface of the inner diameter forming jig may be increased, and scratches may be generated on the inner surface of the quartz glass tube.

入側チャックの走行速度と出側チャック走行速度との比は、石英ガラスシリンダの断面積と製造される石英ガラス管の断面積の比の逆数と一致するように設定すればよい。また、入側チャックの回転速度と出側チャックの回転速度とは、基本的には速度差を持たせないことが望ましい。また速度差を持たせる場合でも、入側チャックの走行速度並びに出側チャックの走行速度にもよるが、石英ガラス管のねじれ防止の観点から１rpm以下とする必要がある。   The ratio between the traveling speed of the inlet chuck and the traveling speed of the outlet chuck may be set so as to coincide with the reciprocal of the ratio of the sectional area of the quartz glass cylinder and the sectional area of the manufactured quartz glass tube. It is desirable that the rotational speed of the inlet chuck and the rotational speed of the outlet chuck basically have no speed difference. Even in the case of providing a speed difference, it is necessary to set it to 1 rpm or less from the viewpoint of preventing twisting of the quartz glass tube, although it depends on the traveling speed of the inlet side chuck and the traveling speed of the outlet side chuck.

石英ガラスシリンダを形成する石英ガラス素材としては、ＶＡＤ法などで製造される合成石英ガラスのみではなく、天然石英ガラスその他の石英ガラスを用いてもよい。   As the quartz glass material forming the quartz glass cylinder, not only synthetic quartz glass manufactured by the VAD method or the like, natural quartz glass or other quartz glass may be used.

加工時の石英ガラスシリンダの温度は、軟化点を左右するＯＨ基、Ｃｌ基等の濃度との関係で設定すればよい。加熱炉内は、酸化防止のため不活性雰囲気であるのがよい。これらの温度域に適用できる内径成形治具としては、酸化アルミナ系の酸化物、タングステン、モリブデン等の金属、黒鉛等を用いればよい。この中でも高温域での強度並びに純度の面から黒鉛を用いるのが最も好ましい。   What is necessary is just to set the temperature of the quartz glass cylinder at the time of a process in relation to the density | concentrations, such as OH group and Cl group which influence a softening point. The inside of the heating furnace is preferably an inert atmosphere to prevent oxidation. As an inner diameter forming jig applicable to these temperature ranges, an oxide of alumina oxide, a metal such as tungsten or molybdenum, graphite, or the like may be used. Among these, it is most preferable to use graphite in terms of strength and purity in a high temperature range.

高純度のＳｉＣｌ4を酸水素火炎中で加水分解反応させて、ＳｉＯ2微粒子を堆積成長させた多孔質体を焼結、透明化して、合成石英ガラスインゴットとし、この合成石英ガラスインゴットを出発素材として、石英ガラス素材としての石英ガラスシリンダ（外径１６０mm、内径６０mm、外径／内径の比２．６７）を作製した。 A high-purity SiCl 4 is hydrolyzed in an oxyhydrogen flame, and the porous body on which SiO 2 fine particles are deposited and grown is sintered and transparentized to form a synthetic quartz glass ingot. This synthetic quartz glass ingot is the starting material. As a quartz glass material, a quartz glass cylinder (outer diameter 160 mm, inner diameter 60 mm, outer diameter / inner diameter ratio 2.67) was produced.

（本発明例１）
上記の石英ガラスシリンダ（長さ１１００mm）を、図１に記載の製造装置を用いて延伸し、石英ガラス管(外径６０mm、内径２２.５mm、外径／内径の比２.６７)の製作を試みた。このとき、ヒータ温度は２３００℃、回転速度は１０rpm、石英ガラスシリンダの内圧は５０,０００Paにし、更に石英ガラスシリンダの送り込み速度を１７.５４mm/min、石英ガラス管の延伸速度を１２４.７１mm/minに設定し、長さ１１００mmの石英ガラスシリンダ全域を延伸させ長さ７２００mmの石英ガラス管を得た。内径成形治具としては、概ね図２に示す形状であって、胴体部の長さが150mm、外径が42mm、テーパー部の長さが150mm、成形部の長さが550mm、外径が22.5mmであるものを用いた。 (Invention Example 1)
The quartz glass cylinder (length 1100 mm) is stretched using the manufacturing apparatus shown in FIG. 1 to produce a quartz glass tube (outer diameter 60 mm, inner diameter 22.5 mm, outer diameter / inner diameter ratio 2.67). Tried. At this time, the heater temperature is 2300 ° C., the rotation speed is 10 rpm, the internal pressure of the quartz glass cylinder is 50,000 Pa, the feeding speed of the quartz glass cylinder is 17.54 mm / min, and the drawing speed of the quartz glass tube is 124.71 mm / min. Set to min, the entire quartz glass cylinder with a length of 1100 mm was stretched to obtain a quartz glass tube with a length of 7200 mm. The inner diameter forming jig generally has the shape shown in FIG. 2, and the body portion has a length of 150 mm, the outer diameter is 42 mm, the taper portion has a length of 150 mm, the formed portion has a length of 550 mm, and the outer diameter is 22.5. What was mm was used.

（本発明例２）
外径／内径の比を大きくする延伸における効果を確認するため、上記の石英ガラスシリンダ（長さ８００mm）を、図１に記載の製造装置を用いて延伸し、石英ガラス管（外径６０mm、内径２０mm、外径／内径の比３.００）の製作を試みた。このとき、ヒータ温度は２３５０℃、回転速度は１２rpm、石英ガラスシリンダの内圧は４０,０００Paにし、更に石英ガラスシリンダの送り込み速度を１７.５４mm/min、石英ガラス管の延伸速度を１２０.５７mm/minに設定し、長さ８００mmの石英ガラスシリンダ全域を延伸させ、長さ４６００mmの石英ガラス管を得た。内径成形治具としては、概ね図２に示す形状であって、胴体部の長さが150mm、外径が42mm、テーパー部の長さが150mm、成形部の長さが550mm、外径が20mmであるものを用いた。 (Invention Example 2)
In order to confirm the effect of stretching to increase the ratio of outer diameter / inner diameter, the quartz glass cylinder (800 mm in length) is stretched using the manufacturing apparatus shown in FIG. 1, and a quartz glass tube (outer diameter 60 mm, An attempt was made to produce an inner diameter of 20 mm and an outer diameter / inner diameter ratio of 3.00). At this time, the heater temperature is 2350 ° C., the rotation speed is 12 rpm, the internal pressure of the quartz glass cylinder is 40,000 Pa, the feeding speed of the quartz glass cylinder is 17.54 mm / min, and the drawing speed of the quartz glass tube is 120.57 mm / min. Set to min, the entire area of the 800 mm long quartz glass cylinder was stretched to obtain a 4600 mm long quartz glass tube. The inner diameter forming jig generally has the shape shown in FIG. 2, the body part length is 150 mm, the outer diameter is 42 mm, the taper part length is 150 mm, the molded part length is 550 mm, and the outer diameter is 20 mm. The thing which is is used.

（本発明例３）
外径／内径の比を小さくする延伸における効果を確認するため、上記の石英ガラスシリンダ（長さ１０００mm）を、図１に記載の製造装置を用いて延伸し、石英ガラス管（外径６０mm、内径２５mm、外径／内径の比２.４０）の製作を試みた。このとき、ヒータ温度は２２５０℃、回転速度は７rpm、石英ガラスシリンダの内圧は４０,０００Paにし、更に石英ガラスシリンダの送り込み速度を１７.５４mm/min、石英ガラス管の延伸速度を１２９.６９mm/minに設定し、長さ１０００mmの石英ガラスシリンダ全域を延伸させ、長さ６９００mmの石英ガラス管を得た。内径成形治具としては、概ね図２に示す形状であって、胴体部の長さが150mm、外径が42mm、テーパー部の長さが150mm、成形部の長さが550mm、外径が25mmであるものを用いた。 (Invention Example 3)
In order to confirm the effect of stretching to reduce the ratio of outer diameter / inner diameter, the quartz glass cylinder (length 1000 mm) is stretched using the manufacturing apparatus shown in FIG. 1, and the quartz glass tube (outer diameter 60 mm, An attempt was made to produce an inner diameter of 25 mm and an outer diameter / inner diameter ratio of 2.40). At this time, the heater temperature is 2250 ° C., the rotation speed is 7 rpm, the internal pressure of the quartz glass cylinder is 40,000 Pa, the feeding speed of the quartz glass cylinder is 17.54 mm / min, and the drawing speed of the quartz glass tube is 129.69 mm / min. It was set to min, and the entire area of the quartz glass cylinder having a length of 1000 mm was stretched to obtain a quartz glass tube having a length of 6900 mm. The inner diameter forming jig is generally in the shape shown in FIG. 2, the body part length is 150 mm, the outer diameter is 42 mm, the taper part length is 150 mm, the molded part length is 550 mm, and the outer diameter is 25 mm. The thing which is is used.

（比較例１）
上記の石英ガラスシリンダ（長さ１１００mm）を、図１に示す装置と同様の装置（内径成形治具を用いず、減圧を実施しなかった。）により、延伸し、石英ガラス管(外径６０mm、内径２２.５mm、外径／内径の比２.６７)の作製を試みた。このとき、ヒータ温度は２３００℃、回転速度は１０rpm、石英ガラスシリンダの送り込み速度を１７.５４mm/min、石英ガラス管の延伸速度を１２４.７１mm/minに設定し、長さ１１００mmの石英ガラスシリンダ全域を延伸させ、長さ６９００ｍｍの石英ガラス管を得た。 (Comparative Example 1)
The quartz glass cylinder (length: 1100 mm) was stretched by a device similar to the device shown in FIG. 1 (the inner diameter forming jig was not used and the pressure was not reduced), and the quartz glass tube (outer diameter 60 mm). An inner diameter of 22.5 mm and an outer diameter / inner diameter ratio of 2.67) were tried. At this time, the heater temperature is set to 2300 ° C., the rotation speed is set to 10 rpm, the feeding speed of the quartz glass cylinder is set to 17.54 mm / min, the drawing speed of the quartz glass tube is set to 124.71 mm / min, and the length of the quartz glass cylinder is 1100 mm. The entire region was stretched to obtain a quartz glass tube having a length of 6900 mm.

延伸開始から終了までの間、延伸中の石英ガラス管の外径をモニタしながら、目的とする石英ガラス管の外径に近づけるため石英ガラス管の延伸速度を１１１〜１３９mm/minの間で調整した。石英ガラス管の外径をモニタしながら延伸速度を調整するものの、目的とする石英ガラス管の外径に到達するまでに一定の時間を費やし、また目的とする外径に到達しても、終了までの間、絶えず外径が変動した。   From the start to the end of stretching, while monitoring the outside diameter of the quartz glass tube being drawn, the drawing speed of the quartz glass tube is adjusted between 111 and 139 mm / min in order to approach the outside diameter of the target quartz glass tube. did. Although the drawing speed is adjusted while monitoring the outer diameter of the quartz glass tube, it takes a certain time to reach the outer diameter of the target quartz glass tube, and even if the target outer diameter is reached, the process ends. Until then, the outer diameter constantly fluctuated.

（評価）
製作した石英ガラス管の外径を長手方向１００mmピッチ、円周方向２点(９０゜ピッチ)測定した。また内径については、石英ガラス管の肉厚を長手方向１００mmピッチ、円周方向４点(９０゜ピッチ)測定し、計算により求めた。 (Evaluation)
The outer diameter of the manufactured quartz glass tube was measured at a pitch of 100 mm in the longitudinal direction and at two points in the circumferential direction (90 ° pitch). The inner diameter of the quartz glass tube was calculated by measuring the thickness of the quartz glass tube at a pitch of 100 mm in the longitudinal direction and four points in the circumferential direction (90 ° pitch).

なお、１断面内での外径差および内径差は、本発明例１および本発明例２ではいずれの測定箇所においても０.０２mm以下であり、本発明例３および比較例１ではいずれの測定箇所においても０.０３mm以下であった。   The outer diameter difference and the inner diameter difference in one cross section are 0.02 mm or less at any measurement location in the present invention example 1 and the present invention example 2, and any measurement in the present invention example 3 and the comparative example 1. Also in the part, it was 0.03 mm or less.

本発明例１および比較例１における石英ガラス管の外径および内径の変動状況を図４および図５に示す。また、本発明例２における石英ガラス管の外径および内径の変動状況を図６に、本発明例３における石英ガラス管の外径および内径の変動状況を図７にそれぞれ示す。なお、図４〜７における測定原点とは、得られた石英ガラス管の下流側（延伸開始側）の先端部を意味する。   The fluctuation state of the outer diameter and inner diameter of the quartz glass tube in the present invention example 1 and the comparative example 1 is shown in FIGS. Moreover, the fluctuation | variation state of the outer diameter of a quartz glass tube in the example 2 of this invention is shown in FIG. 6, and the fluctuation | variation state of the outer diameter of a quartz glass tube in the example 3 of this invention is shown in FIG. In addition, the measurement origin in FIGS. 4-7 means the front-end | tip part of the downstream (stretching start side) of the obtained quartz glass tube.

図４および図５に示すように、比較例１では、延伸開始直後および延伸終了直前の変動が大きいとともに、中間位置においても、外径および内径ともに変動した。これに対し、本発明例１では、延伸開始時から延伸終了までの間、安定して目的とする寸法を有する石英ガラス管が得られた。   As shown in FIGS. 4 and 5, in Comparative Example 1, the fluctuations immediately after the start of stretching and immediately before the end of stretching were large, and both the outer diameter and the inner diameter were also varied at the intermediate position. On the other hand, in Example 1 of the present invention, a quartz glass tube having a target dimension stably was obtained from the start of stretching to the end of stretching.

図６および図７に示すように、外径／内径の比を大きくする延伸を施した本発明例２、外径／内径の比を小さくする延伸を施した本発明例３のいずれの場合においても、延伸開始時から延伸終了までの間、安定して目的とする寸法を有する石英ガラス管が得られた。   As shown in FIGS. 6 and 7, in either case of the present invention example 2 in which the stretching was performed to increase the outer diameter / inner diameter ratio, or the present invention example 3 in which the stretching was performed to decrease the outer diameter / inner diameter ratio. In addition, a quartz glass tube having a desired dimension was stably obtained from the start of stretching to the end of stretching.

本発明によれば、石英ガラス管の内径寸法精度を安定化できるので、この石英ガラス管を光ファイバプリフォーム製造用クラッド管に用いた場合には、接続損失の小さい光ファイバを提供することができる。また、延伸前の石英ガラスシリンダの外径ＯＤ1および内径ＩＤ1ならびに延伸後の石英ガラス管の外径ＯＤ2および内径ＩＤ2がＯＤ1＞ＯＤ2およびＩＤ1＞ＩＤ2の条件を満足する延伸条件において、ＯＤ1／ＩＤ1≧ＯＤ2／ＩＤ2の条件を満たす延伸も、ＯＤ1／ＩＤ1＜ＯＤ2／ＩＤ2の条件を満たす延伸も行うことができるので、他品種小ロット生産においても、準備すべき石英ガラスシリンダの種類を少なくできる。   According to the present invention, since the accuracy of the inner diameter of the quartz glass tube can be stabilized, when this quartz glass tube is used as a cladding tube for manufacturing an optical fiber preform, an optical fiber having a small connection loss can be provided. it can. Further, in the stretching conditions where the outer diameter OD1 and inner diameter ID1 of the quartz glass cylinder before stretching and the outer diameter OD2 and inner diameter ID2 of the quartz glass tube after stretching satisfy the conditions of OD1> OD2 and ID1> ID2, OD1 / ID1 ≧ Since the drawing satisfying the condition of OD2 / ID2 and the drawing satisfying the condition of OD1 / ID1 <OD2 / ID2 can be performed, the types of quartz glass cylinders to be prepared can be reduced even in the production of other types of small lots.

本発明の石英ガラス管の製造装置を例示した模式図である。It is the schematic diagram which illustrated the manufacturing apparatus of the quartz glass tube of this invention. 内径成形治具を例示した模式図である。It is the schematic diagram which illustrated the internal diameter formation jig | tool. 石英ガラスシリンダの変形状況を例示した模式図であり、(a)は、ＯＤ1／ＩＤ1≧ＯＤ2／ＩＤ2の条件を満たす延伸状態、(b)は、ＯＤ1／ＩＤ1＜ＯＤ2／ＩＤ2の条件を満たす延伸状態を示す。It is the model which illustrated the deformation | transformation condition of a quartz glass cylinder, (a) is the extending | stretching state which satisfy | fills the conditions of OD1 / ID1> = OD2 / ID2, (b) is the extending | stretching which satisfy | fills the conditions of OD1 / ID1 <OD2 / ID2. Indicates the state. 本発明例１および比較例１の外径変動を示す図である。It is a figure which shows the outer-diameter fluctuation | variation of this invention example 1 and the comparative example 1. FIG. 本発明例１および比較例１の内径変動を示す図である。It is a figure which shows the internal diameter fluctuation | variation of this invention example 1 and the comparative example 1. FIG. 本発明例２の外径変動および内径変動を示す図である。It is a figure which shows the outer diameter fluctuation | variation of this invention example 2, and an internal diameter fluctuation | variation. 本発明例３の外径変動および内径変動を示す図である。It is a figure which shows the outer diameter fluctuation | variation of this invention example 3, and an internal diameter fluctuation | variation.

符号の説明Explanation of symbols

１．石英ガラス管の製造装置
２．石英ガラスシリンダ
3-1、3-2．チャック
４．ヒータ
５．内径成形治具（5-1．胴体部、5-2．テーパー部、5-3．成形部）
6-1、6-2．ダミー材
7-1、7-2．密閉ホルダ
８. 内径成形治具支持ロッド 1. 1. Quartz glass tube manufacturing equipment Quartz glass cylinder
3-1, 3-2. Chuck 4. 4. Heater Inner diameter forming jig (5-1. Body part, 5-2. Tapered part, 5-3. Molded part)
6-1, 6-2. Dummy material
7-1, 7-2. Sealing holder 8. Inner diameter forming jig support rod

Claims (6)

石英ガラスシリンダを加熱しつつ、延伸する石英ガラス管の製造方法であって、変形領域において石英ガラスシリンダの内面を内径成形治具に接触させながら延伸することを特徴とする石英ガラス管の製造方法。   A method for producing a quartz glass tube that is drawn while heating the quartz glass cylinder, wherein the quartz glass tube is drawn while contacting the inner surface of the quartz glass cylinder with an inner diameter forming jig in the deformation region. . 石英ガラスシリンダの内面を、その上流側から挿入した内径成形治具に接触させながら延伸することを特徴とする請求項１に記載の石英ガラス管の製造方法。   2. The method for producing a quartz glass tube according to claim 1, wherein the quartz glass tube is stretched while being brought into contact with an inner diameter forming jig inserted from the upstream side of the quartz glass cylinder. 内径成形治具として、円柱状の成形部および胴体部で構成され、胴体部の外径が〔成形部の外径〕以上、かつ〔石英ガラスシリンダの内径−10mm〕以下であるものを用いることを特徴とする請求項２に記載の石英ガラス管の製造方法。   Use an inner diameter forming jig composed of a cylindrical molded part and a body part, and the outer diameter of the body part is not less than [the outer diameter of the molding part] and not more than [the inner diameter of the quartz glass cylinder−10 mm]. The method for producing a quartz glass tube according to claim 2. 石英ガラスシリンダを回転可能な状態で保持するチャックと、石英ガラスシリンダを加熱する加熱装置と、石英ガラスシリンダ内部に挿入して内径を成形する内径成形治具を有することと特徴とする石英ガラス管の製造装置。   A quartz glass tube having a chuck that holds the quartz glass cylinder in a rotatable state, a heating device that heats the quartz glass cylinder, and an inner diameter forming jig that is inserted into the quartz glass cylinder to form an inner diameter. Manufacturing equipment. 内径成形治具は、上流側から石英ガラスシリンダに挿入されていることを特徴とする請求項４に記載の石英ガラス管の製造装置。   The quartz glass tube manufacturing apparatus according to claim 4, wherein the inner diameter forming jig is inserted into the quartz glass cylinder from the upstream side. 内径成形治具は、円柱状の成形部および胴体部を有し、胴体部の外径が〔成形部の外径〕以上、かつ〔石英ガラスシリンダの内径−10mm〕以下であることを特徴とする請求項５に記載の石英ガラス管の製造装置。
The inner diameter forming jig has a cylindrical molding part and a body part, and the outer diameter of the body part is not less than [the outer diameter of the molding part] and not more than [the inner diameter of the quartz glass cylinder−10 mm]. The apparatus for producing a quartz glass tube according to claim 5.
JP2005191677A 2005-06-30 2005-06-30 Manufacturing method of quartz glass tube and manufacturing unit Pending JP2007008763A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115215536A (en) * 2022-06-02 2022-10-21 东南大学 Processing technology, processing die and processing equipment for saddle-shaped quartz glass tube

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005097064A (en) * 2003-09-26 2005-04-14 Sumitomo Electric Ind Ltd Method for manufacturing glass tube and apparatus for manufacturing glass tube used for the same

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005097064A (en) * 2003-09-26 2005-04-14 Sumitomo Electric Ind Ltd Method for manufacturing glass tube and apparatus for manufacturing glass tube used for the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115215536A (en) * 2022-06-02 2022-10-21 东南大学 Processing technology, processing die and processing equipment for saddle-shaped quartz glass tube

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