EP3331644A1

EP3331644A1 - Perforatable sheets of graphene-based material

Info

Publication number: EP3331644A1
Application number: EP16833429.0A
Authority: EP
Inventors: Jacob L. SWETT; Peter V. Bedworth; Scott E. Heise; Steven W. Sinton; Sarah M. Simon
Original assignee: Lockheed Corp; Lockheed Martin Corp
Current assignee: Lockheed Martin Corp
Priority date: 2015-08-05
Filing date: 2016-04-14
Publication date: 2018-06-13
Also published as: CN107847835A; EP3331644A4; EP3331816A1; CN107921402A; EP3331816A4

Abstract

Sheets of graphene-based material comprising single layer graphene and suitable for formation of a plurality of perforations in the single layer graphene are provided. In an aspect, the sheets of graphene-based material are formed by chemical vapor deposition followed by one or more conditioning steps. In a further aspect, the sheets of graphene-based material include non-graphenic carbon-based material and may be characterized the amount, mobility and/or volatility of the non-graphenic carbon-based material.

Description

PERF ORAT ABLE SHEETS OF GRAPHENE-BASED MATERIAL

CROSS REFERENCE TO RELATED APPLICATIONS

[0001] The present application claims the benefit of priority to U.S. Provisional Application No. 62/201,539, entitled "Perforatable Sheets of Graphene-based Material," filed on August 5, 2015, and U.S. Provisional Application No. 62/201,527, entitled "Perforated Sheets of

Graphene-based Material," filed August 5, 2015, both of the contents of which are incorporated herein by reference in their entirety. Contemporaneously with this application, another U.S. Patent Application claiming the benefit of priority to the same two provisional applications is being filed as Serial No. _/ , entitled "Perforated Sheets of Graphene-Based Material," the contents of which are incorporated herein by reference in their entirety.

BACKGROUND

[0002] In its various forms, graphene has garnered widespread interest for use in a number of applications, primarily due to its favorable combination of high electrical and thermal conductivity values, excellent in-plane mechanical strength, and unique optical and electronic properties. Perforated graphene has been suggested for use in filtration applications.

[0003] Formation of apertures or perforations in graphene by exposure to oxygen (O2) has been described in Liu et al, Nano Lett. 2008, Vol.8, no.7, pp. 1965-1970 As described therein, through apertures or holes in the 20 to 180 nm range were etched in single layer graphene using 350 Torr of oxygen in 1 atmosphere (atm) Argon at 500°C for 2 hours. The graphene samples were reported to have been prepared by mechanical exfoliation of Kish graphite.

[0004] Another method is described in Kim et al. "Fabrication and Characterization of Large Area, Semiconducting Nanoperforated Graphene Materials, " Nano Letters 2010 Vol. 10, No. 4, March 1, 2010, pp 1125-1131 . This reference describes use of a self-assembling polymer that creates a mask suitable for patterning using reactive ion etching (RIE). A P(S-blockMMA) block copolymer forms an array of PMMA columns that form vias for the RIE upon removal. It was reported that the graphene was formed by mechanical exfoliation. BRIEF SUMMARY

[0005] Some embodiments provide a sheet comprising single layer graphene, the sheet being suitable for formation of a plurality of perforations in the single layer graphene. The sheet may be a macroscale sheet with at least one lateral dimension of the sheet being greater than 1 mm, greater than 1 cm or greater than 3 cm.

[0006] Some embodiments provide a sheet of graphene-based material comprising: a single layer of graphene having a surface and a non-graphenic carbon-based material provided on said single layer graphene. In some embodiments, the single layer of graphene may comprise at least two surfaces and a non-graphenic carbon-based material provided on said single layer graphene; wherein greater than 10% and less than 80% of said surfaces of said single layer graphene may be covered by said non-graphenic carbon-based material. In some further embodiments, said non-graphenic carbon-based material may be characterized by substantially limited mobility. In further embodiments, said non-graphenic carbon-based material may be substantially nonvolatile.

[0007] In some embodiments, the macroscale sheet may be suitable for formation of perforations through exposure of the sheet to ions. In some further embodiments, the macroscale sheet may be suitable for formation of perforations through exposure of the sheet to ultraviolet light and an oxygen containing gas such as air. The perforated sheets may have a variety of applications including, but not limited to, filtration applications. In some embodiments, suspended macroscale sheets and methods for making macroscale sheets comprising single layer graphene are provided.

[0008] In some embodiments, the macroscale sheet may be a sheet of graphene-based material comprising single layer graphene. In some embodiments, the sheet of graphene-based material comprises a sheet of single layer graphene, multilayer graphene, or a combination thereof. In some embodiments, the sheet of graphene-based material may be formed by chemical vapor deposition (CVD) followed by at least one additional conditioning or treatment step. In some embodiments, the conditioning step may be selected from thermal treatment, UV-oxygen treatment, ion beam treatment, or combinations thereof. In some embodiments, thermal treatment may include heating to a temperature from 200 °C to 800 °C at a pressure of 10^'7 torr to atmospheric pressure for a time of 2 hours to 8 hours. In some embodiments, UV-ozone treatment may involve exposure to light from 150 nm to 300 nm and intensity from 10 to 100 mW/cm² or 100 to 1000 mW/cm² at 6mm distance for a time from 60 to 600 seconds. In some embodiments, UV-oxygen treatment may be performed at room temperature or at a temperature greater than room temperature. In some further embodiments, UV-oxygen treatment may be performed at atmospheric pressure (e.g. 1 atm) or under vacuum. In some embodiments, ion beam treatment may involve exposure of the graphene-based material to ions having an ion energy is from 50 eV to 1000 eV (for pretreatment) and the fluence is from 3 x 10¹⁰ ions/cm² to 8 x 10 11 ions/cm 2 or 3 x l010 ions/cm 2 to 8 x 1013 ions/cm 2 (for pretreatment). In some further embodiments, the source of ions may be collimated, such as a broad beam or flood source. In some embodiments, the ions may be noble gas ions such as Xe⁺ In some embodiments, one or more conditioning steps may be performed while the graphene-based material is attached to a substrate, such as a growth substrate.

[0009] In some embodiments, the sheet of graphene-based material following chemical vapor deposition may comprise a single layer of graphene having at least two surfaces and non- graphenic carbon based material provided on said surfaces of the single layer graphene. In some embodiments, the non-graphenic carbon based material may be located on one of the two surfaces or on both. In some further embodiments, additional graphenic carbon may also be present on the surface(s) of the single layer graphene.

[0010] In some embodiments, methods for conditioning sheets of graphene based material may reduce the extent to which the non-graphenic carbon based material covers the surface(s) of the single layer graphene, or reduce the mobility of said non-graphenic carbon based material, or reduce the volatility of said non-graphenic carbon based material, or combinations thereof. In some embodiments, greater than 10% and less than 80%, greater than 20% and less than 80%, greater than 40% and less than 80%) or greater than 60% and less than 80% of the surface(s) of the single layer graphene may be covered by the non-graphenic carbon-based material following additional conditioning step(s). In some embodiments, the graphene-based material may not be perforated after the conditioning step(s). In some embodiments, the conditioning/treatment process may not substantially affect the domain size or extent of defects in the material. For example, said single layer graphene before or after conditioning treatment may be characterized by an average size domain for long range order greater than or equal to 1 micrometer, long range lattice periodicity on the order of 1 micrometer and/or has an extent of disorder characterized by less than 1% content of lattice defects.

[0011] In some embodiments, the non-graphenic carbon-based material may comprise at least 50% carbon, from 10% carbon to 100% carbon or at or 20% to 100% carbon. In some embodiments, said non-graphenic carbon-based material may further comprise non-carbon elements. In some embodiments, said non-carbon elements may be selected from the group consisting of hydrogen, oxygen, silicon, copper, iron, aluminum, magnesium, calcium, boron, and nitrogen and combinations thereof. In an embodiment, aluminum, magnesium, calcium, boron, and nitrogen are present only in trace amounts In some embodiments, said non- graphenic carbon-based material may have an elemental composition comprising carbon, hydrogen and oxygen. In some further embodiments, said non-graphenic carbon-based material may have a molecular composition comprising amorphous carbon, one or more hydrocarbons, oxygen containing carbon compounds, nitrogen containing carbon compounds, or any combination of these. In some further embodiments, the non-carbon element, such as boron or silicon substitutes for carbon in the lattice. In some embodiments, said non-graphenic carbon- based material may not exhibit long range order. In some embodiments, the non-graphenic carbon-based material may be in physical contact with at least one of said surfaces of said single layer graphene. In some embodiments, the characteristics of the non-graphenic carbon material may be determined after at least one conditioning process.

[0012] Some embodiments provide sheets of graphene-based material suspended over a supporting structure. In various embodiments, CVD graphene or graphene-based material can be liberated from its growth substrate (e.g., Cu) and transferred to a supporting grid, mesh or other porous supporting structure. In some embodiments, the porous supporting structure may be polymeric, metallic or ceramic. In some embodiments, the supporting structure may be configured so that at least some portions of the sheet of graphene-based material are suspended from the supporting structure. For example, at least some portions of the sheet of graphene- based material may not be in contact with the supporting structure. In some embodiments, the suspended area may be greater than 10 nm and less than 10 micrometers, and sometimes greater than 10 micrometers. In some embodiments, a sheet of graphene-based material may be provided comprising: single layer graphene having at least two surfaces; and a non-graphenic carbon-based material provided on said single layer graphene; wherein greater than 10% and less than 80% of said surfaces of said single layer graphene may be covered by said non-graphenic carbon-based material; wherein exposure of said sheet of graphene-based material to ions characterized by an ion energy ranging from 10 eV to 100 keV and a fluence ranging from 1 xlO¹³ ions/cm² to lxlO²¹ ions/cm² may produce perforations in said sheet of graphene-based material. In some further embodiments, at least a portion of the single layer graphene may be suspended. In some further embodiments, a mask or template may not be present between the source of ions and the sheet of graphene-based material. In some further embodiments, the source of ions may be collimated, such as a broad beam or flood source. In some embodiments, the ions may be noble gas ions selected from the group consisting of Xe+ ions, Ne+ ions, or Ar+ ions, or are helium ions.

[0013] In some embodiments, the ions may be selected from the group consisting of Xe+ ions, Ne+ ions, or Ar+ ions, wherein the ion energy ranges from 5 eV to 50 eV and the ion dose ranges from 5xl0¹⁴ ions/cm² to 5xl0^Lj ions/cm². In some embodiments, the ion energy ranges from 1 keV to 40 keV and the ion dose ranges from lxlO¹⁵ ions/cm² to lxl0^{2 :} ions/cm². These parameters can be used for He+ ions. In some embodiments, a background gas may be present during ion irradiation. For example, the sheet of graphene-based material may be exposed to the ions in an environment comprising partial pressure of 5 X 10^'4 torr to 5 X 10^"5 torr of oxygen, nitrogen or carbon dioxide at a total pressure of 10^"3 torr to 10^"5 torr. In some further embodiments, the ion irradiation conditions when a background gas is present may include an ion energy ranging from 100 eV to 1000 eV and an ion dose ranging from 1 xlO¹' ions/cm² to lxlO¹⁴ ions/cm². A quasi-neutral plasma may be used under these conditions.

[0014] In further embodiments, a sheet of graphene-based material is provided comprising: single layer graphene having at least two surfaces; and a non-graphenic carbon-based material provided on said single layer graphene; wherein greater than 10% and less than 80% of said surfaces of said single layer graphene may be covered by said non-graphenic carbon-based material; wherein exposure of said sheet of graphene-based material to ultraviolet radiation and an oxygen containing gas at an irradiation intensity from 10 to 100 mW/cm² for a time from 60 to 1200 sec may produce perforations in said sheet of graphene-based material. In some embodiments, at least a portion of the single layer graphene is suspended. In some further embodiments, a mask or template may not be present between the source of ions and the sheet of graphene-based material.

[0015] In some embodiments, the macroscale sheet of graphene-based material may be suitable for formation of perforations over greater than 10% or greater or 15% or greater of said area of said sheet of graphene-based material. In combination, at least one lateral dimension of the sheet may be from 10 nm to 10 cm, or greater than 1 mm to less than or equal to 10 cm, or lateral dimensions as described herein. In some embodiments, the mean of the pore size may be from 0.3 nm to 1 μηι. In some embodiments, the coefficient of variation of the pore size may be from 0.1 to 2. In some embodiments, perforated (hole) area may correspond to 0.1% or greater of said area of said sheet of graphene-based material. In some embodiments, the perforations may be characterized by an average area of said perforations selected from the range of 0.2 nm² to 0.25 μηι².

BRIEF DESCRIPTION OF THE DRAWINGS

[0016] FIG. 1 is a transmission electron microscope (TEM) image illustrating a graphene based material after conditioning treatment.

[0017] FIG. 2 is another TEM image illustrating a graphene based material after conditioning treatment

DETAILED DESCRIPTION

[0018] Graphene represents a form of carbon in which the carbon atoms reside within a single atomically thin sheet or a few layered sheets (e.g., about 20 or less) of fused six-membered rings forming an extended sp² -hybridized carbon planar lattice. Graphene-based materials include, but are not limited to, single layer graphene, multilayer graphene or interconnected single or multilayer graphene domains and combinations thereof. In some embodiments, graphene-based materials also include materials which have been formed by stacking single or multilayer graphene sheets. In some embodiments, multilayer graphene includes 2 to 20 layers, 2 to 10 layers or 2 to 5 layers. In some embodiments, layers of multilayered graphene are stacked, but are less ordered in the z direction (perpendicular to the basal plane) than a thin graphite crystal.

[0019] In some embodiments, a sheet of graphene-based material is a sheet of single or multilayer graphene or a sheet comprising a plurality of interconnected single or multilayer graphene domains, which may be observed in any known manner such as using for example small angle electron diffraction, transmission electron microscopy, etc. In some embodiments, the multilayer graphene domains have 2 to 5 layers or 2 to 10 layers. As used herein, a domain refers to a region of a material where atoms are substantially uniformly ordered into a crystal lattice. A domain is uniform within its boundaries, but may be different from a neighboring region. For example, a single crystalline material has a single domain of ordered atoms. In some embodiments, at least some of the graphene domains are nanocrystals, having domain size from 1 to 100 nm or 10-100 nm. In some embodiments, at least some of the graphene domains have a domain size greater than 100 nm to 1 micron, or from 200 nm to 800 nm, or from 300 nm to 500 nm. In some embodiments, a domain of multilayer graphene may overlap a neighboring domain. Grain boundaries formed by crystallographic defects at edges of each domain may differentiate between neighboring crystal lattices. In some embodiments, a first crystal lattice may be rotated relative to a second crystal lattice, by rotation about an axis perpendicular to the plane of a sheet, such that the two lattices differ in crystal lattice orientations.

[0020] In some embodiments, the sheet of graphene-based material comprises a sheet of single or multilayer graphene or a combination thereof. In some embodiments, the sheet of graphene- based material is a sheet of single or multilayer graphene or a combination thereof. In some embodiments, the sheet of graphene-based material is a sheet comprising a plurality of interconnected single or multilayer graphene domains. In some embodiments, the interconnected domains are covalently bonded together to form the sheet. When the domains in a sheet differ in crystal lattice orientation, the sheet is polycrystalline. In some embodiments, said single layer graphene is characterized by an average size domain for long range order greater than or equal to Ι μηι. In some embodiments, said single layer graphene has an extent of disorder characterized an average distance between crystallographic defects of lOOnm. [0021] In some embodiments, the thickness of the sheet of graphene-based material is from 0.3 to 10 nm, 0.34 to 10 nm, from 0.34 to 5 nm, or from 0.34 to 3 nm. In some embodiments, the thickness includes both single layer graphene and the non-graphenic carbon.

[0022] In some embodiments, a sheet of graphene-based material comprises intrinsic or native defects. Intrinsic or native defects may result from preparation of the graphene-based material in contrast to perforations which are selectively introduced into a sheet of graphene-based material or a sheet of graphene. Such intrinsic or native defects may include, but are not limited to, lattice anomalies, pores, tears, cracks or wrinkles. Lattice anomalies can include, but are not limited to, carbon rings with other than 6 members (e.g. 5, 7 or 9 membered rings), vacancies, interstitial defects (including incorporation of non-carbon atoms in the lattice), and grain boundaries Perforations are distinct from openings in the graphene lattice due to intrinsic or native defects or grain boundaries, but testing and characterization of the final membrane such as mean pore size and the like encompasses all openings regardless of origin since they are all present.

[0023] In some embodiments, graphene is the dominant material in a graphene-based material. For example, a graphene-based material may comprise at least 20% graphene, 30% graphene, or at least 40% graphene, or at least 50% graphene, or at least 60% graphene, or at least 70% graphene, or at least 80% graphene, or at least 90% graphene, or at least 95% graphene. In some embodiments, a graphene-based material comprises a range of graphene selected from 30% to 95%, or from 40% to 80% from 50% to 70%, from 60% to 95% or from 75% to 100%. The amount of graphene in the graphene-based material is measured as an atomic percentage utilizing known methods including transmission electron microscope examination, or alternatively if TEM is ineffective another similar measurement technique.

[0024] In some embodiments, a sheet of graphene-based material further comprises non- graphenic carbon-based material located on at least one surface of the sheet of graphene-based material. In some embodiments, the sheet is exemplified by two base surfaces (e.g. top and bottom faces of the sheet, opposing faces) and side faces. In a further embodiment, the "bottom" face of the sheet is that face which contacted the substrate during CVD growth of the sheet and the "free" face of the sheet opposite the "bottom" face. In some embodiments, non-graphenic carbon-based material may be located on one or both base surfaces of the sheet (e.g. the substrate side of the sheet and/or the free surface of the sheet). In some further embodiments, the sheet of graphene-based material includes a small amount of one or more other materials on the surface, such as, but not limited to, one or more dust particles or similar contaminants.

[0025] In some embodiments, the amount of non-graphenic carbon-based material is less than the amount of graphene. In some further embodiments, the amount of non-graphenic carbon material is three to five times the amount of graphene; this may be measured in terms of mass. In some additional embodiments, the non-graphenic carbon material is characterized by a percentage by mass of said graphene-based material selected from the range of 0% to 80% In some embodiments, the surface coverage of the sheet by non-graphenic carbon-based material is greater than zero and less than 80%, from 5% to 80%, from 10% to 80%, from 5% to 50% or from 10% to 50%. This surface coverage may be measured with transmission electron microscopy, which gives a projection. In some embodiments, the amount of graphene in the graphene-based material is from 60% to 95% or from 75% to 100%. The amount of graphene in the graphene-based material is measured as mass percentage utilizing known methods preferentially using transmission electron microscope examination, or alternatively if TEM is ineffective using other similar techniques

[0026] In some embodiments, the layer comprising the sheet of graphene-based material further comprises non-graphenic carbon-based material located on the surface of the sheet of graphene-based material. In some embodiments, the non-graphenic carbon-based material does not possess long range order and may be classified as amorphous. In some embodiments, the non-graphenic carbon-based material further comprises elements other than carbon and/or hydrocarbons. In some embodiments, non-carbon elements which may be incorporated in the non-graphenic carbon include hydrogen, oxygen, silicon, copper, and iron. In some further embodiments, the non-graphenic carbon-based material comprises hydrocarbons. In some embodiments, carbon is the dominant material in non-graphenic carbon-based material. For example, a non-graphenic carbon-based material in some embodiments comprises at least 30% carbon, or at least 40% carbon, or at least 50% carbon, or at least 60% carbon, or at least 70% carbon, or at least 80% carbon, or at least 90% carbon, or at least 95% carbon. In some embodiments, a non-graphenic carbon-based material comprises a range of carbon selected from 30% to 95%, or from 40% to 80%, or from 50% to 70%. The amount of carbon in the non- graphenic carbon-based material is measured as an atomic percentage utilizing known methods preferentially using transmission electron microscope examination, or alternatively if TEM is ineffective, using other similar techniques.

[0027] In some embodiments, the surface mobility of the non-graphenic carbon-based material is such that, when irradiated with the perforation parameters described in this application, the non-graphenic carbon-based material has a surface mobility such that the perforation process results ultimately in perforation. Without wishing to be bound by any particular belief, hole formation is believed to related to beam induced carbon removal from the graphene sheet and thermal replenishment of carbon in the hole region by non graphenic carbon. The replenishment process is dependent upon energy entering the system during perforation and the resulting surface mobility of the non-graphenic carbon based material. To form holes, the rate of graphene removal is higher than the non-graphenic carbon hole filling rate. These competing rates depend on the non-graphenic carbon flux (mobility [viscosity and temperature] and quantity) and the graphene removal rate (particle mass, energy, flux).

[0028] In some embodiments, the volatility of the non-graphenic carbon-based material is less than that which is obtained by heating the sheet of graphene-based material to 500°C for 4 hours in vacuum or at atmospheric pressure with an inert gas.

[0029] Perforation techniques suitable for use in perforating the graphene-based may include ion-based perforation methods and UV-oxygen based methods.

[0030] Ion-based perforation methods include methods in which the graphene-based material is irradiated with a directional source of ions. In some further embodiments, the ion source is collimated. In some embodiments, the ion source is a broad beam or flood source. A broad field or flood ion source can provide an ion flux which is significantly reduced compared to a focused ion beam. The ion source inducing perforation of the graphene or other two- dimensional material is considered to provide a broad ion field, also commonly referred to as an ion flood source. In some embodiments, the ion flood source does not include focusing lenses. In some embodiments, the ion source is operated at less than atmospheric pressure, such as at 10^' to 10^"5 torr or 10^"4 to 10^"6 torr. In some embodiments, the environment also contains background amounts (e.g. on the order of 10^"5 torr) of oxygen (O2), nitrogen (N2) or carbon dioxide (CO₂). In some embodiments, the ion beam may be perpendicular to the surface of the layer(s) of the material (incidence angle of 0 degrees) or the incidence angle may be from 0 to 45 degrees, 0 to 20 degrees, 0 to 15 degrees or 0 to 10 degrees. In some further embodiments, exposure to ions does not include exposure to plasma.

[0031] In some embodiments, UV-oxygen based perforation methods include methods in which the graphene-based material is simultaneously exposed to ultraviolet (UV) light and an oxygen containing gas. Ozone may be generated by exposure of an oxygen containing gas such as oxygen or air to the UV light, in which case the graphene-based material is exposed to oxygen. Ozone may also be supplied by an ozone generator device. In some embodiments, the UV-ozone based perforation method further includes exposure of the graphene-based material to atomic oxygen. Suitable wavelengths of UV light include, but are not limited to wavelengths below 300 nm or from 150 nm to 300 nm. In some embodiments, the intensity from 10 to 100 mW/cm² at 6mm distance or 100 to 1000 mW/cm² at 6mm distance. For example, suitable light is emitted by mercury discharge lamps (e.g. about 185 nm and 254 nm). In some embodiments, UV/ozone cleaning is performed at room temperature or at a temperature greater than room temperature. In some further embodiments, UV/ozone cleaning is performed at atmospheric pressure (e.g. 1 atm) or under vacuum.

[0032] Perforations are sized as described herein to provide desired selective permeability of a species (atom, molecule, protein, virus, cell, etc.) for a given application. Selective permeability relates to the propensity of a porous material or a perforated two-dimensional material to allow passage (or transport) of one or more species more readily or faster than other species. Selective permeability allows separation of species which exhibit different passage or transport rates. In two-dimensional materials selective permeability correlates to the dimension or size (e.g., diameter) of apertures and the relative effective size of the species. Selective permeability of the perforations in two-dimensional materials such as graphene-based materials can also depend on functionalization of perforations (if any) and the specific species. Separation or passage of two or more species in a mixture includes a change in the ratio(s) (weight or molar ratio) of the two or more species in the mixture during and after passage of the mixture through a perforated two- dimensional material. [0033] In some embodiments, the characteristic size of the perforation is from 0.3 to 10 nm, from 1 to 10 nm, from 5 to 10 nm, from 5 to 20 nm, from 10 nm to 50 nm, from 50 nm to 100 nm, from 50 nm to 150 nm, from 100 nm to 200 nm, or from 100 nm to 500 nm. In some embodiments, the average pore size is within the specified range. In some embodiments, 70% to 99%, 80% to 99%, 85% to 99% or 90 to 99% of the perforations in a sheet or layer fall within a specified range, but other pores fall outside the specified range.

[0034] Nanomaterials in which pores are intentionally created may be referred to as perforated graphene, perforated graphene-based materials, perforated two-dimensional materials, and the like. Perforated graphene-based materials include materials in which non-carbon atoms have been incorporated at the edges of the pores. Pore features and other material features may be characterized in a variety of manners including in relation to size, area, domains, periodicity, coefficient of variation, etc. For instance, the size of a pore may be assessed through quantitative image analysis utilizing images preferentially obtained through transmission electron microscopy, and if TEM is ineffective, through scanning electron microscopy and the like, as for example presented in Figs. 1 and 2. The boundary of the presence and absence of material identifies the contour of a pore. The size of a pore may be determined by shape fitting of an expected species against the imaged pore contour where the size measurement is characterized by smallest dimension unless otherwise specified. For example, in some instances, the shape may be round or oval. The round shape exhibits a constant and smallest dimension equal to its diameter. The width of an oval is its smallest dimension. The diameter and width measurements of the shape fitting in these instances provide the size measurement, unless specified otherwise.

[0035] Each pore size of a test sample may be measured to determine a distribution of pore sizes within the test sample Other parameters may also be measured such as area, domain, periodicity, coefficient of variation, etc. Multiple test samples may be taken of a larger membrane to determine that the consistency of the results properly characterizes the whole membrane. In such instance, the results may be confirmed by testing the performance of the membrane with test species. For example, if measurements indicate that certain sizes of species should be restrained from transport across the membrane, a performance test provides verification with test species. Alternatively, the performance test may be utilized as an indicator that the pore measurements will determine a concordant pore size, area, domains, periodicity, coefficient of variation, etc.

[0036] In some embodiments, the perforations are characterized by a distribution of pores with a dispersion characterized by a coefficient of variation of 0.1 to 2. The size distribution of holes may be narrow, e.g., limited to a coefficient of variation less than 2. In some embodiments, the characteristic dimension of the holes is selected for the application. In some embodiments involving circular shape fitting, the equivalent diameter of each pore is calculated from the equation A= π d²/4 Otherwise, the area is a function of the shape fitting When the pore area is plotted as a function of equivalent pore diameter, a pore size distribution may be obtained. The coefficient of variation of the pore size may be calculated herein as the ratio of the standard deviation of the pore size to the mean of the pore size as measured across the test samples. The average area of perforations is an averaged measured area of the pores as measured across the test samples.

[0037] In some embodiments, the ratio of the area of the perforations to the ratio of the area of the sheet may be used to characterize the sheet as a density of perforations. The area of a test sample may be taken as the planar area spanned by the test sample. Additional sheet surface area may be excluded due to wrinkles other non-planar features. Characterization may be based on the ratio of the area of the perforations to the test sample area as density of perforations excluding features such as surface debris. Characterization may be based on the ratio of the area of the perforations to the suspended area of the sheet. As with other testing, multiple test samples may be taken to confirm consistency across tests and verification may be obtained by performance testing. The density of perforations may be, for example, 2 per nm² (21 nm² to 1 per μιη² (1/ μηι²).

[0038] In some embodiments, the perforated area comprises 0.1% or greater, 1% or greater or 5% or greater of the sheet area, less than 10% of the sheet area, less than 15% of the sheet area, from 0. 1% to 15% of the sheet area, from 1% to 15% of the sheet area, from 5% to 15% of the sheet area or from 1% to 10% of the sheet area. In some further embodiments, the perforations are located over greater than 10% or greater than 15% of said area of said sheet of graphene- based material. A macroscale sheet is macroscopic and observable by the naked eye. In some embodiments, at least one lateral dimension of the sheet is greater than 1 cm, greater than 1 mm or greater than 5 mm. In some further embodiments, the sheet is larger than a graphene flake which would be obtained by exfoliation of graphite in known processes used to make graphene flakes. For example, the sheet has a lateral dimension greater than about 1 micrometer. In an additional embodiment, the lateral dimension of the sheet is less than 10 cm. In some embodiments, the sheet has a lateral dimension (e.g., perpendicular to the thickness of the sheet) greater than 1 mm and less than 10 cm. Chemical vapor deposition growth of graphene-based material typically involves use of a carbon containing precursor material, such as methane and a growth substrate. In some embodiments, the growth substrate is a metal growth substrate. In some embodiments, the metal growth substrate is a substantially continuous layer of metal rather than a grid or mesh. Metal growth substrates compatible with growth of graphene and graphene-based materials include transition metals and their alloys. In some embodiments, the metal growth substrate is copper based or nickel based. In some embodiments, the metal growth substrate is copper or nickel. In some embodiments, the graphene-based material is removed from the growth substrate by dissolution of the growth substrate.

[0039] The preferred embodiments may be further understood by the following non-limiting examples

EXAMPLE

[0040] FIG. 1 is a transmission electron microscope image illustrating a graphene based material after conditioning treatment.

[0041] FIG. 2 is another transmission electron microscope image showing a graphene based material after conditioning treatment.

[0042] The graphene based material was synthesized using chemical vapor deposition. After synthesis, the material was exposed to an ion beam while on the copper growth substrate; the ions were Xe ions at 500V at 80°C with a fluence of 1.25 x 10¹³ ions/cm². Then the graphene based material was transferred to a TEM grid and while suspended received 120 seconds of treatment at atmospheric pressure with atmospheric gas with Ultra- VioletUV parameters as described herein. The graphene based material was baked at 160 °C for about 6 hours before imaging. In FIG. 1 and FIG. 2, label 10 indicates single layer graphite regions while label 20 indicates largely non-graphitic carbon based material.

[0043] Although the disclosure has been described with reference to the disclosed embodiments, one having ordinary skill in the art will readily appreciate that these are only illustrative of the disclosure. It should be understood that various modifications can be made without departing from the spirit of the disclosure. The disclosure can be modified to incorporate any number of variations, alterations, substitutions or equivalent arrangements not heretofore described, but which are commensurate with the spirit and scope of the disclosure. Additionally, while various embodiments of the disclosure have been described, it is to be understood that aspects of the disclosure may include only some of the described embodiments Accordingly, the disclosure is not to be seen as limited by the foregoing description.

[0044] Every formulation or combination of components described or exemplified can be used to practice embodiments, unless otherwise stated. Specific names of compounds are intended to be exemplary, as it is known that one of ordinary skill in the art can name the same compounds differently. When a compound is described herein such that a particular isomer or enantiomer of the compound is not specified, for example, in a formula or in a chemical name, that description is intended to include each isomers and enantiomer of the compound described individual or in any combination. One of ordinary skill in the art will appreciate that methods, device elements, starting materials and synthetic methods other than those specifically exemplified can be employed in the practice of the embodiments without resort to undue experimentation. All known functional equivalents, of any such methods, device elements, starting materials and synthetic methods are intended to be included in the embodiments. Whenever a range is given in the specification, for example, a temperature range, a time range, or a composition range, all intermediate ranges and subranges, as well as all individual values included in the ranges given are intended to be included in the disclosure. When a Markush group or other grouping is used herein, all individual members of the group and all combinations and subcombinations possible of the group are intended to be individually included in the disclosure.

[0045] As used herein, "comprising" is synonymous with "including," "containing," or "characterized by," and is inclusive or open-ended and does not exclude additional, unrecited elements or method steps. As used herein, "consisting of excludes any element, step, or ingredient not specified in the claim element. As used herein, "consisting essentially of does not exclude materials or steps that do not materially affect the basic and novel characteristics of the claim. Any recitation herein of the term "comprising", particularly in a description of components of a composition or in a description of elements of a device, is understood to encompass those compositions and methods consisting essentially of and consisting of the recited components or elements. The embodiments illustratively described herein suitably may be practiced in the absence of any element or elements, limitation or limitations which is not specifically disclosed herein.

[0046] The terms and expressions which have been employed are used as terms of description and not of limitation, and there is no intention in the use of such terms and expressions of excluding any equivalents of the features shown and described or portions thereof, but it is recognized that various modifications are possible within the scope of the embodiments claimed. Thus, it should be understood that although some embodiments have been specifically disclosed by preferred features and optional features, modification and variation of the concepts herein disclosed may be resorted to by those skilled in the art, and that such modifications and variations are considered to be within the scope of the embodiments as identified by the appended claims.

[0047] In general the terms and phrases used herein have their art-recognized meaning, which can be found by reference to standard texts, j ournal references and contexts known to those skilled in the art. Any preceding definitions are provided to clarify their specific use in the context of the preferred embodiments.

[0048] All references throughout this application, for example patent documents including issued or granted patents or equivalents; patent application publications; and non-patent literature documents or other source material; are hereby incorporated by reference herein in their entireties, as though individually incorporated by reference, to the extent each reference is at least partially not inconsistent with the disclosure in this application (for example, a reference that is partially inconsistent is incorporated by reference except for the partially inconsistent portion of the reference). [0049] All patents and publications mentioned in the specification are indicative of the levels of skill of those skilled in the art to which the preferred embodiments pertain References cited herein are incorporated by reference herein in their entirety to indicate the state of the art, in some cases as of their filing date, and it is intended that this information can be employed herein, if needed, to exclude (for example, to disclaim) specific embodiments that are in the prior art. For example, when a compound is claimed, it should be understood that compounds known in the prior art, including certain compounds disclosed in the references disclosed herein

(particularly in referenced patent documents), are not intended to be included in the claims.

Claims

1. A membrane providing for selective permeability comprising:

a sheet of graphene-based material comprising a single layer of graphene-based material wherein the layer has two opposing surfaces exposed to the environment, and the layer has been subj ected to ion irradiation characterized by an ion energy ranging from 10 eV to 100 keV and a fluence ranging from 1 xl O ions/cm to 1x10 ions/cm producing perforations in the layer of graphene-based material;

a non-graphenic carbon-based material in contact with a surface of the sheet of graphene- based material; and,

contact areas between the graphene-based material and the non-graphenic carbon-based material that are greater in area that 10% and less than 80% of the surfaces of the sheet of graphene-based material, wherein the non-graphenic carbon-based material is characterized by substantially limited mobility;

wherein the perforations in the layer of graphene-based material have a mean pore size of selected from the range of 0.3 nm to 1 μηι and a density of perforations selected from the range

2. The membrane of claim 1 , wherein said single layer graphene-based material has an extent of disorder characterized by long range lattice periodicity on the order of 1 micrometer.

3. The membrane of claim 1 , wherein the perforations cover an area corresponding to 0.1 % or greater of the area of said sheet of graphene-based material.

4. The membrane of claim 1 , wherein the perforations cover an area corresponding to 10 % or greater of the area of said sheet of graphene-based material, and wherein at least one lateral dimension of the sheet is from 10 nm to 10 cm.

5. The membrane of claim 1 , wherein the perforations are characterized by a distribution of pores with a coefficient of variation of 0.1 to 2.

6. The membrane of claim 1 further comprising:

graphene domains formed as nanocrystals comprising domain size from 1 to 100 nm and average size for long range order greater than or equal to Ι μηι.

7. A sheet of graphene-based material comprising:

a single layer graphene having at least two surfaces; and

a non-graphenic carbon-based material provided on said single layer graphene; wherein greater than 10% and less than 80%) of said surfaces of said single layer graphene is covered by said non-graphenic carbon-based material; and wherein said non-graphenic carbon-based material is characterized by substantially limited mobility.

8. A sheet of graphene-based material comprising:

a single layer graphene having at least two surfaces; and

a non-graphenic carbon-based material provided on said single layer graphene; wherein greater than 10% and less than 80%) of said surfaces of said single layer graphene is covered by said non-graphenic carbon-based material; and wherein said non-graphenic carbon-based material is substantially nonvolatile.

9. A sheet of graphene-based material comprising:

a single layer graphene having at least two surfaces; and

a non-graphenic carbon-based material provided on said single layer graphene; wherein greater than 10% and less than 80%) of said surfaces of said single layer graphene is covered by said non-graphenic carbon-based material; wherein exposure of said sheet of graphene-based material to ion irradiation characterized by an ion energy ranging from 10 eV to 100 keV and a fluence ranging from 1 xl O¹³ ions/cm² to lxl O²¹ ions/cm² produces perforations in said sheet of graphene-based material.

10. A sheet of graphene-based material comprising:

a single layer graphene having at least two surfaces; and

a non-graphenic carbon-based material provided on said single layer graphene; wherein greater than 10% and less than 80%) of said surfaces of said single layer graphene is covered by said non-graphenic carbon-based material; wherein upon exposure of said sheet of graphene- based material to ultraviolet radiation and an oxygen containing gas at an irradiation intensity from 10 to 100 mW/cm² for a time from 60 to 1200 sec produces perforations in said sheet of graphene-based material.

11. The sheet of graphene-based material of any one of claims 9-10, wherein the perforations are characterized by a density of perforations selected from the range of 2/nm² to l/pm².

12. The sheet of graphene-based material of any one of claims 9-10, wherein the perforated area corresponds to 0.1 % or greater of said area of said sheet of graphene-based material.

13. The sheet of graphene-based material of any one of claims 9-10, wherein the perforations correspond to 10% or greater of said area of said sheet of graphene-based material and wherein at least one lateral dimension of the sheet is from 10 nm to 10 cm.

14. The sheet of graphene-based material of any one of claims 9-10, wherein mean pore size of said perforations selected from the range of 0.3 nm to 1 μπι.

15. The sheet of graphene-based material of any one of claims 9-10, wherein the perforations are characterized by a distribution of pores with a dispersion characterized by a coefficient of variation of 0.1 to 2.

16. The sheet of graphene-based material of any one of claims 9-10, wherein the perforations are characterized by an average area of said perforations selected from the range of 0.2 nm² to 0.25 μηι².

17. The sheet of graphene-based material of any one of claims 7-16, wherein said non- graphenic carbon-based material is in physical contact with at least one of said surfaces of said single layer graphene.

18. The sheet of graphene-based material of any one of claims 7-17, wherein said non- graphenic carbon-based material covers 10 to 80% of said surfaces of said single layer graphene.

19. The sheet of graphene-based material of any one of claims 7-18, wherein said non- graphenic carbon-based material does not exhibit long range order.

20. The sheet of graphene-based material of any one of claims 7-19, wherein said non- graphenic carbon-based material has an elemental composition comprising carbon, hydrogen and oxygen.

21. The sheet of graphene-based material of any one of claims 7-19, wherein said non- graphenic carbon-based material has a molecular composition comprising amorphous carbon, one or more hydrocarbons, oxygen containing carbon compounds, nitrogen containing carbon compounds or any combination of these.

22. The sheet of graphene-based material of any one of claims 7-19, wherein said non- graphenic carbon-based material comprises 10% to 100% carbon.

23. The sheet of graphene-based material of any one of claims 7-19, wherein said non- graphenic carbon-based material further comprises non-carbon elements

24. The sheet of graphene-based material of claim 23, wherein said non-carbon elements are selected from the group consisting of hydrogen, oxygen, silicon, copper and iron.

25. The sheet of graphene-based material of any one of claims 7-24, wherein said single layer graphene is characterized by an average size domain for long range order greater than or equal to 1 micrometer.

26. The sheet of graphene-based material of any one of claims 7-24, wherein said single layer graphene has an extent of disorder characterized by long range lattice periodicity on the order of 1 micrometer.

27. The sheet of graphene-based material of any one of claims 7-24, wherein said single layer graphene has an extent of disorder characterized by less than 1% content of lattice defects.

28. The sheet of graphene-based material of any one of claims 7-27, wherein the thickness of the sheet is from 0.3 nm to 10 nm.

29. The sheet of graphene-based material of any one of claims 7-28, wherein at least one lateral dimension of the sheet is greater than 1 cm.

30. A method of conditioning a sheet of graphene-based material, the method comprising: the step of heating the sheet of graphene-based material to a temperature from 200 °C to 800 °C at a pressure of 10^"7 torr to atmospheric pressure for a time of 2 hours to 8 hours.

31. A method of conditioning a sheet of graphene-based material, the method comprising: the step of exposure to ultraviolet light and an intensity from 10 to 100 mW/cm² at 6mm distance for a time from 60 to 600 seconds in the presence of an oxygen containing gas.