CN117369193A - Light field conversion device and method based on acousto-optic deflector - Google Patents
Light field conversion device and method based on acousto-optic deflector Download PDFInfo
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- CN117369193A CN117369193A CN202311382298.2A CN202311382298A CN117369193A CN 117369193 A CN117369193 A CN 117369193A CN 202311382298 A CN202311382298 A CN 202311382298A CN 117369193 A CN117369193 A CN 117369193A
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- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
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- LAJZODKXOMJMPK-UHFFFAOYSA-N tellurium dioxide Chemical compound O=[Te]=O LAJZODKXOMJMPK-UHFFFAOYSA-N 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/33—Acousto-optical deflection devices
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/11—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves
- G02F1/113—Circuit or control arrangements
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- Optics & Photonics (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
The invention discloses a light field transformation device and method based on an acousto-optic deflector. The device comprises: the device comprises a pulse laser, two acousto-optic deflection modules, a signal synchronization control unit, a vector light field conversion module, a reflective spatial light modulator and a focusing lens, wherein the pulse laser, the two acousto-optic deflection modules, the signal synchronization control unit, the vector light field conversion module, the reflective spatial light modulator and the focusing lens are arranged along an optical path; the pulse laser outputs linearly polarized light; the signal synchronization control unit simultaneously controls the first acousto-optic deflection module and the second acousto-optic deflection module to load radio frequency signals with the same frequency; the first acousto-optic deflection module deflects linearly polarized light to obtain a first deflected light beam, and the size of a deflection angle is determined by the frequency of a radio frequency signal; the vector light field transformation module converts linearly polarized light into radial, angular or higher-order vector light, and reflects or refracts the vector light to obtain a second deflection light beam; the second optical deflection module re-converges the second deflection light beam into the main light path, and then the second deflection light beam passes through the reflective spatial light modulator and the focusing lens to obtain a processing light beam which acts on the processing component. Efficient and accurate transformation of the light field type is achieved.
Description
Technical Field
The invention belongs to the technical field of laser micro-nano processing and manufacturing, and particularly relates to an optical field transformation device and method based on an acousto-optic deflector.
Background
Since the advent of the nineteenth century sixties, laser technology has been widely used in the fields of industry, science, military, etc., through the development of more than half a century. With the proliferation of small electronic products and microelectronic devices, conventional manufacturing methods have far failed to meet the fine manufacturing requirements of precision parts (such as semiconductor chips). Compared with the traditional mechanical micromachining, the laser belongs to non-contact machining, so that no tool loss exists, no obvious mechanical force exists, and machining deformation cannot occur. Therefore, laser micro-nano processing has become one of the fields in which lasers are rapidly developed in industrial applications.
The cross-sectional profile of a laser beam emitted by a conventional laser is generally gaussian. In this case, when the ultrafast laser direct writing technique is used to process the special shape profile, dot scanning is required, which is time-consuming and inconvenient to adjust. The multi-focus parallel processing mode can greatly shorten the processing time, and the Bessel beam can conveniently adjust the radial and axial intensity distribution of the beam; when the outline dimension of the microstructure is small to a certain extent, the requirement on the diameter of a focused spot of a laser beam is very high, the diameter of the spot of the general Gaussian linear polarized light can not reach the size requirement, and the radial polarized light has a pure longitudinal electric field component after being tightly focused, so that the focusing with the super diffraction limit can be realized, and smaller spots can be obtained. In addition, because the structural morphology and the processing requirements of the processing component are different, different processing areas of the same component often need to adopt different light fields to finish manufacturing, and new challenges are presented to laser micro-nano manufacturing, such as higher processing efficiency, trans-scale processing and the like.
Therefore, the traditional laser micro-nano machining process has the technical problems of single optical field form, complex optical field conversion, poor machining quality and low machining efficiency.
Disclosure of Invention
Aiming at the defects of the related art, the invention aims to provide an optical field conversion device and method based on an acousto-optic deflector, which aims to solve the problems of single optical field form, complex optical field conversion, poor processing quality and lower processing efficiency in the traditional laser micro-nano processing process.
To achieve the above object, in a first aspect, the present invention provides an acousto-optic deflector-based optical field transforming device, comprising: the device comprises a pulse laser, two acousto-optic deflection modules, a signal synchronous control unit, a vector light field conversion module, a reflective spatial light modulator and a focusing lens, which are sequentially arranged along a light path;
the pulse laser is used for outputting linearly polarized light, and transmitting and injecting the linearly polarized light into the first acousto-optic deflection module along the main light path;
the signal synchronization control unit simultaneously controls the first acousto-optic deflection module and the second acousto-optic deflection module to load radio frequency signals with the same frequency;
the first acousto-optic deflection module is used for deflecting the emergent light direction of the linearly polarized light to obtain a first deflected light beam, and the first deflected light beam enters a deflection light path, wherein the size of the deflection angle is determined by the frequency of the radio frequency signal;
The vector light field transformation module is used for transforming the first deflection light beam from linearly polarized light into radial, angular or higher-order vector light, and reflecting or refracting the first deflection light beam to obtain a second deflection light beam to be injected into the second optical deflection module;
the second optical deflection module is used for converging the second deflected light beam into a main light path again, and then the second deflected light beam is sequentially reflected by the reflective spatial light modulator and converged by the focusing lens to obtain a processing light beam which acts on the processing component.
Optionally, the vector light field transformation module comprises an S-glass slide and a plane mirror;
the S glass is used for transforming a light field, converting the light field of the first deflection light beam into a radial, angular or higher-order vector light field from linearly polarized light, and the plane mirror is used for reflecting the transformed first deflection light beam to obtain a second deflection light beam, and injecting the second deflection light beam into the second optical deflection module.
Optionally, the number of the S glass slides and the number of the plane mirrors are equal to each other and are equal to or greater than 1;
each S slide corresponds to one plane mirror and belongs to the same deflection light path;
the signal synchronization control unit controls the first acousto-optic deflection module to load different radio frequency signal frequencies through a driving signal so that a first deflection light beam enters a corresponding deflection light path; the signal synchronization control unit controls the first acousto-optic deflection module and the second acousto-optic deflection module to load radio frequency signals with the same frequency, and the deflection angle of the second deflection light beam is the same as that of the first deflection light beam.
Optionally, the angle Δθ between the nth deflection optical path and the first deflection optical path satisfiesWherein N is greater than or equal to 2; wherein lambda is 0 Indicating the wavelength of the incident laser light, n and V s Respectively representing the refractive index and the internal sound velocity of an acousto-optic medium in the first acousto-optic deflection module, f s Representing the frequency of the radio frequency signal.
Optionally, the vector light field transformation module is a wedge-shaped light field transformation mirror; the wedge-shaped light field conversion mirror comprises different etching areas, different grating patterns are etched in the etching areas, the arrangement direction of the etching areas is consistent with the scanning directions of the first acousto-optic deflection module and the second acousto-optic deflection module, and the wedge-shaped light field conversion mirror is used for converting linearly polarized light into radial, angular or higher-order vector light when the first deflection light beam passes through the etching areas, and the second deflection light beam is obtained through refraction and is injected into the second acousto-optic deflection module.
Optionally, the first acousto-optic deflection module and the second acousto-optic deflection module each include two acousto-optic deflectors which are placed vertically, and the acousto-optic deflectors in the first acousto-optic deflection module and the acousto-optic deflectors in the second acousto-optic deflection module are symmetrically arranged about a center;
the etching areas of the wedge-shaped light field transformation mirrors are arranged in an array manner;
The synchronous control unit comprises a plurality of output channels, wherein each two output channels are in a group, and drive signals are respectively output to the first acousto-optic deflection module and the second acousto-optic deflection module so that the frequencies of radio frequency signals loaded by the two symmetrically arranged acousto-optic deflectors are the same;
the first acousto-optic deflection module is used for deflecting the emergent light direction of the linearly polarized light, and diffracts to obtain a first deflection light beam, and the first deflection light beam passes through a certain etching area in the wedge-shaped light field transformation mirror.
Optionally, the light field transformation device further comprises a beam expanding collimation device, a motion controller and a central control unit;
the beam expansion and collimation device is arranged between the pulse laser and the first acousto-optic deflection module and is used for generating parallel light after collimating and expanding the linearly polarized light;
the processing part is fixedly arranged on the motion controller and moves along with the motion controller;
the central control unit is connected with the motion controller and the signal synchronization control unit and is used for controlling the motion direction of the motion controller according to the processing data and controlling the signal synchronization control unit to transmit driving signals to the first acousto-optic deflection module and the second acousto-optic deflection module so as to load corresponding radio frequency signal frequencies to carry out preset processing programs.
Optionally, when the signal synchronization control unit does not apply a driving signal to the first acousto-optic deflection module and the second acousto-optic deflection module, the reflective spatial light modulator is connected with the central control unit;
the linear polarized light reaches the reflective spatial light modulator along the main light path, and the reflective spatial light modulator is used for loading different voltages according to the control signal of the central control unit, modulating the amplitude or the phase of the linear polarized light differently, and reflecting and outputting scalar light fields of different types.
Optionally, the light field transforming device further comprises: the motor is connected with the plane mirror in the vector light field transformation module;
when the synchronous control unit controls the first acousto-optic deflection module and the second acousto-optic deflection module to load different radio frequency signal frequencies through a driving signal, the motor is used for driving the plane mirror to rotate according to the control signal of the central control unit, the plane mirror is used for changing the deflection angle of the first deflection light beam when reflecting the first deflection light beam to obtain a second deflection light beam, and the second deflection light beam is converged into a main light path again through the second acousto-optic deflection module.
In a second aspect, the present invention further provides an acousto-optic deflector-based optical field transformation method, which is applied to the acousto-optic deflector-based optical field transformation device according to any one of the first aspect, and includes:
the central control unit sends corresponding control signals to the signal synchronous control unit, the reflective spatial light modulator and the motion controller according to prestored data of the movement of the processing part and the types of light fields required by different parts in the processing process;
the signal synchronization control unit simultaneously controls the first acousto-optic deflection module and the second acousto-optic deflection module to load radio frequency signals with the same frequency;
the pulse laser outputs linearly polarized light, parallel light generated by the beam expanding and collimating device along a main light path is input into the first acousto-optic deflection module, and deflected to obtain a first deflected light beam;
the vector light field transformation module transforms the first deflection light beam from linear polarized light into radial, angular or higher-order vector light, and reflects or refracts the first deflection light beam to obtain a second deflection light beam;
the second deflection light beam enters the second optical deflection module and is remitted into a main light path to obtain a processing light beam;
and the processing light beam acts on the processing component which moves along with the motion controller after being reflected by the reflective spatial light modulator and converged by the focusing lens.
Compared with the prior art, the technical scheme of the invention has the following beneficial effects:
1. the invention provides a light field conversion device based on an acousto-optic deflector, which utilizes the characteristic that two acousto-optic deflection modules have ultrahigh scanning speed, wherein a first acousto-optic deflection module deflects parallel linearly polarized light at a certain angle, a vector light field conversion module has the characteristic of converting the linearly polarized light into radial, angular or higher-order vector light, the requirement of quick light field conversion can be met, and a second acousto-optic deflection module re-merges the converted light field light into a main light path to obtain a processing light beam, so that the output of the same output end is realized; the combination of the acousto-optic deflector and the vector light field transformation module can realize the transformation of the light field type with high efficiency and accuracy; the vector light field transformation module adopts the combination of the S glass and the plane mirror, or adopts the wedge-shaped light field transformation mirror, and has simple structure and reliable output.
2. According to the light field conversion device based on the acousto-optic deflector, different radio frequency signal frequencies of the first acousto-optic deflection module are controlled through the signal synchronization control unit, so that linearly polarized light is deflected by different angles, the first deflected light beam enters a corresponding deflection light path, the first acousto-optic deflection module and the second acousto-optic deflection module load radio frequency signals with the same frequency, the deflection angles are the same, and corresponding processing light beams are generated according to different requirements; the light field transformation device also comprises a motion controller, the central control unit controls the motion direction of the motion controller, the light field transformation device can be fast matched with different processing areas to the required light field, flexible processing of the micro-nano structure can be realized, and the processing efficiency and the processing precision are improved.
3. When the signal synchronization control unit is closed, the control signal of the central control unit loads different voltages on the reflective spatial light modulator, and the amplitude or phase of the linearly polarized light is modulated differently, so that Gaussian linearly polarized light is changed into flat-top, array, bessel and other light fields. When the signal synchronization control unit works, the signal synchronization control unit can be changed into radial, angular or high-order vector light fields, namely, the conversion of various light fields can be realized at the output end of the system, and the signal synchronization control unit is suitable for various processing conditions.
4. According to the optical field conversion device based on the acousto-optic deflector, when the first/second acousto-optic deflection modules adopt two acousto-optic deflectors which are arranged vertically, the first/second acousto-optic deflection modules are respectively controlled by 4 channels of the signal synchronous control unit, wherein the output frequencies of the first/second acousto-optic deflection modules are the same or different as required, the same frequency signals applied by the acousto-optic deflectors arranged in parallel are ensured, and different types of gratings etched in different etching areas on the plurality of acousto-optic deflectors and the wedge-shaped optical field conversion mirror are matched, so that the optical field in a two-dimensional plane can be rapidly converted, and the requirement of more vector optical field conversion is met.
Drawings
FIG. 1 is a schematic diagram of a light field conversion device based on an acousto-optic deflector;
FIG. 2 is a schematic diagram of the structure of an acousto-optic deflection module according to the present invention;
FIG. 3 is a schematic diagram of another optical field transformation device based on an acousto-optic deflector according to the present invention;
FIG. 4 is a schematic diagram of an S-glass slide with linearly polarized light passing through different handedness, wherein (a) is radially polarized light and (b) is angularly polarized light according to an embodiment of the present invention;
FIG. 5 is a schematic diagram of another optical field transformation device based on an acousto-optic deflector according to the present invention;
FIG. 6 is a three-view of a wedge-shaped light field transform mirror provided by an embodiment of the present invention;
FIG. 7 is a schematic diagram of a reflective liquid crystal spatial light modulator according to an embodiment of the present invention;
FIG. 8 is a schematic structural diagram of another optical field transformation device based on an acousto-optic deflector provided by the invention;
FIG. 9 is a three-view diagram of a wedge-shaped light field conversion mirror according to an embodiment of the present invention
In the figure: 1. the device comprises a pulse laser, 2 parts of a beam expanding collimation device, 3 parts of an acousto-optic deflection module, 4 parts of a signal synchronous control unit, 5 parts of a vector light field conversion device, 6 parts of a reflective spatial light modulator, 7 parts of a focusing lens, 8 parts of a processing part, 9 parts of a motion controller, 10 parts of a central control unit, 31 parts of a first acousto-optic deflection module, 32 parts of a second acousto-optic deflection module, 51 parts of a first S glass slide, 52 parts of a first plane mirror, 53 parts of a second S glass slide, 54 parts of a second plane mirror, 55 parts of a wedge-shaped light field conversion mirror, 301 parts of a driving signal source, 302 parts of an electroacoustic transducer, 303 parts of an acousto-optic medium, 304 parts of an acousto-optic absorption device, 311 parts of a first acousto-optic deflection device, 312 parts of a second acousto-optic deflection device, 321 parts of a third acousto-optic deflection device, 322 parts of a fourth acousto-optic deflection device, 601 parts of a glass layer, 602 parts of a transparent electrode, 603 parts of a glass layer, an orientation film, 604 parts of a liquid crystal layer, 605 parts of a reflection layer, 606 parts of a control electrode.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention. In addition, the technical features of the embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.
The description of the contents of the above embodiment will be given below in connection with a preferred embodiment.
Example 1
As shown in fig. 1, an acousto-optic deflector-based light field transformation device includes: the device comprises a pulse laser 1, a beam expanding and collimating device 2, two acousto-optic deflection modules (31 and 32), a signal synchronization control unit 4, a vector light field conversion module 5, a reflective spatial light modulator 6 and a focusing lens 7 which are sequentially arranged along a light path;
the pulse laser 1 is used for outputting linearly polarized light, and transmitting and injecting the linearly polarized light into the first acousto-optic deflection module 31 along a main light path;
the signal synchronization control unit 4 simultaneously controls the first acousto-optic deflection module 31 and the second acousto-optic deflection module 32 to load radio frequency signals with the same frequency;
The first acousto-optic deflection module 31 is configured to deflect the outgoing light direction of the parallel light to obtain a first deflected light beam, and the first deflected light beam enters a deflected light path, where the magnitude of the deflected angle is determined by the frequency of the radio frequency signal;
the vector light field transformation module 5 is configured to transform the first deflected light beam from linearly polarized light into radial, angular or higher order vector light, and reflect or refract the first deflected light beam to obtain a second deflected light beam, and the second deflected light beam is incident into the second optical deflection module 32;
the second optical deflection module 32 is configured to re-integrate the second deflected beam into the main optical path, and then sequentially obtain a processing beam after being reflected by the reflective spatial light modulator 6 and converged by the focusing lens 7, and act on the processing component 8.
Optionally, the light field transformation device further comprises a beam expanding collimation device 2, a motion controller 9 and a central control unit 10;
the beam expansion and collimation device 2 is arranged between the pulse laser 1 and the first acousto-optic deflection module 31 and is used for generating parallel light after collimating and expanding the linearly polarized light;
the processing part 8 is fixedly arranged on the motion controller 9 and moves along with the motion controller 9;
the central control unit 10 stores processing data of the processing component 8 in advance, and the central control unit 10 is connected with the motion controller 9 and the signal synchronization control unit 4, and is configured to control a motion direction of the motion controller 9 according to the processing data, and control the signal synchronization control unit 4 to transmit driving signals to the first acousto-optic deflection module 31 and the second acousto-optic deflection module 32 so as to load corresponding radio frequency signal frequencies to perform a preset processing program.
After the linearly polarized light is expanded and collimated by the beam expansion and collimation device 2, the beam diameter of the generated parallel light is about 6mm, the caliber of the focusing lens 7 is generally between 30mm and 50mm, the size of the processing part 8 is 20mm x 20mm, and the precision of the motion controller 9 is in the order of mu m.
The acousto-optic deflection modules (31 and 32) adopt acousto-optic deflectors which comprise a driving signal source 301, an electroacoustic transducer 302, an acousto-optic medium 303 and an acousto-optic absorbing device 304; the electroacoustic transducer 302 is a layer of metal sheet attached to the surface of the acousto-optic medium 303, wherein electrode layers at two ends of a piezoelectric layer are connected with the driving signal source 301; when the acousto-optic deflector works, the driving signal source 301 can output radio frequency signals with different frequencies, and the electro-acoustic transducer 302 can convert electric motion into mechanical motion, so that ultrasonic waves are generated in the acousto-optic medium 303, and the refractive index of the acousto-optic medium 303 is changed.
Referring to fig. 2, the driving signal source 301 is configured to emit a radio frequency signal to the acousto-optic deflection module 3 to control the acousto-optic action inside the acousto-optic deflection module 3; electroacoustic transducer 302 is a layer of sheet metal attached to the surface of the acousto-optic interaction medium; electrode layers at two ends of a piezoelectric layer in the electroacoustic transducer 302 are connected with a driving signal source 301 and are used for converting an electric signal into an ultrasonic signal in an acousto-optic medium 303 to form an ultrasonic body grating; when the light wave passes through the acousto-optic medium 303, the optical carrier wave is modulated to become an intensity modulation wave carrying information due to the acousto-optic effect; the acoustic absorber 304 prevents the acoustic wave from being reflected back in the primary path to affect the acoustic wave front. In an embodiment, the material of the acousto-optic medium 303 is tellurium dioxide or quartz crystal, the material of the electroacoustic transducer 302 is lithium niobate crystal, and the frequency range of the radio frequency signal output by the driving signal source 301 is 59 MHz-91 MHz, so that the scanning angle is in the range of 6.4 mrad-9.5 mrad.
The first acousto-optic deflection module 31 and the second acousto-optic deflection module 32 adopt acousto-optic deflectors with the same model, and deflect the light beams at the same angle according to the control signal of the signal synchronization control unit 4.
Referring to fig. 3, in the present embodiment, the vector light field transforming device 5 is composed of a plurality of S slides and a plane mirror; the S glass is used for transforming a light field, the light field of the first deflection light beam is transformed into a radial, angular or higher-order vector light field by linearly polarized light, the plane mirror reflects the transformed first deflection light beam to obtain a second deflection light beam, and the second deflection light beam is emitted into the second optical deflection module.
Optionally, the number of the S glass slides and the number of the plane mirrors are equal to each other and are equal to or greater than 1;
each S slide corresponds to one plane mirror and belongs to the same deflection light path;
the signal synchronization control unit 4 controls the first acousto-optic deflection module 31 to load different radio frequency signal frequencies through a driving signal so that a first deflection light beam enters a corresponding deflection light path; the signal synchronization control unit 4 controls the first acousto-optic deflection module 31 and the second acousto-optic deflection module 32 to load radio frequency signals with the same frequency, and the deflection angle of the second deflection light beam is the same as that of the first deflection light beam.
Illustratively, as shown in fig. 3, a plurality of deflection optical paths are included, and two deflection optical paths are illustrated as a first deflection optical path and a second deflection optical path, respectively, to which a first S-glass 51 and a first flat mirror 52 belong, and to which a second S-glass 53 and a second flat mirror 54 belong. Further, as shown in fig. 3, the vector light field transformation module may transform the first deflected light beam into higher order vector light other than the angularly and radially polarized light based on a plurality of deflected light paths, which are not shown.
Further, the S-slide converts the first deflected light beam into radial or angular polarized light according to the relative position of the polarization direction of the linearly polarized light and the S-slide, for example, referring to (a) and (b) of fig. 4, when the polarization direction of the linearly polarized light is parallel to the alignment mark 501 of the first S-slide 51 as shown in (a) of fig. 4, the first S-slide 51 may convert the light field of the first deflected light beam from gaussian to vector light field of the radial polarized light; as shown in fig. 4 (b), when the polarization direction of the linearly polarized light is perpendicular to the alignment mark 502 of the second S-glass 53, the second S-glass 53 can convert the light field of the first deflected light beam from gaussian to vector light field of the angularly polarized light.
As shown in fig. 3, the central control unit 10 controls the signal synchronization control unit 4 to transmit driving signals to the first acousto-optic deflection module 31 and the second acousto-optic deflection module 32 so as to load corresponding radio frequency signal frequencies; the parallel light is deflected by a preset angle through the first acousto-optic deflection module 31 to obtain a first deflected light beam, and the first deflected light beam enters a deflected light path; the plane mirror reflects the first deflected light beam to the second optical deflection module 32, and the second deflected light beam is converged into the main light path again to obtain a processing light beam because the deflection angle of the second deflected light beam is the same as that of the first deflected light beam; the processing light beam is reflected by the spatial light modulator and converged by the focusing lens and then acts on the processing component; the central control unit 10 controls the movement direction of the movement controller 9 to drive the processing part 8 to move.
The central control unit 10 outputs control signals to the signal synchronization control unit 4 and the motion controller 9, respectively, according to the processing data stored in advance, to perform a preset processing program, and perform a preset processing operation on the processing member 8.
Referring to FIG. 3, alternatively, the angle Δθ between the Nth deflected light path and the first deflected light path satisfiesWherein N is greater than or equal to 2; wherein lambda is 0 Indicating the wavelength of the incident laser light, n and V s Respectively representing the refractive index and the internal sound velocity of an acousto-optic medium in the first acousto-optic deflection module, f s Representing the frequency of the radio frequency signal.
The signal synchronization control unit 4 controls the frequency of the radio frequency signal output by the driving signal source 301 to be f s At this time, the light beam advances along the first deflection light path, referring to (a) of fig. 4, the linearly polarized light becomes radially polarized light after passing through the S-glass 51; the signal synchronization control unit 4 controls the frequency of the radio frequency signal output by the driving signal source 301 to be f s +Δf s At this time, the light beam advances along the second deflected light path, and referring to (b) of fig. 4, the linearly polarized light passes through the S-glass 53 to become angularly polarized light. The central control unit 10 controls the signal synchronization control unit 4, so as to control the frequency of the radio frequency signal output by the driving signal source 301, that is, determine whether the output beam is radially polarized light or angularly polarized light.
In this embodiment, when the first acousto-optic deflection module 31 and the second acousto-optic deflection module 32 are in the working state, that is, the deflection angle is not zero, the beam is reflected to the spatial light modulator 6 to be in the off state, and the beam is used only as a mirror to output the processing beam after the light field is changed.
In an alternative embodiment, if neither the signal synchronization control unit 4 nor the reflective spatial light modulator 6 is operating, the beam is focused along the main optical path by the focusing lens 7 onto the processing member 8, at which point the system outputs a gaussian beam.
On the basis of the above embodiment, optionally, the light field transforming device further includes: a motor (not shown) connected to the plane mirror in the vector light field transformation module 5;
when the synchronous control unit 4 controls the first acousto-optic deflection module 31 and the second acousto-optic deflection module 32 to load different radio frequency signal frequencies through a driving signal, the motor is used for driving the plane mirror to rotate according to the control signal of the central control unit 10, the plane mirror is used for changing the deflection angle of the first deflection beam when reflecting the first deflection beam to obtain a second deflection beam, and the second deflection beam is converged into the main light path again through the second acousto-optic deflection module 32.
When the synchronization control unit 4 applies different frequency signals to the first acousto-optic deflection module 31 and the second acousto-optic deflection module 32 independently, according to different frequencies applied by the first acousto-optic deflection module 31 and the second acousto-optic deflection module 32, the angle of the first deflection light beam is different, and the motor is required to drive the plane mirror to rotate to compensate the frequency difference, so that the second deflection light beam is output and input on the same optical path through the second acousto-optic deflection module 32.
According to the embodiment of the invention, by arranging the two acousto-optic deflection modules with the same parameters and being controlled by the signal synchronous control unit and combining the vector light field transformation module, radial polarized light and angular polarized light can be generated in time and space, so that the special processing requirement is met; the acousto-optic deflection module has the characteristic of ultrahigh scanning speed, the vector light field transformation module has the characteristic of converting linearly polarized light into radial, angular or higher-order vector light, and the two are combined, so that the requirement of rapid light field transformation can be met, and a device for rapidly transforming light fields is formed by reasonably arranging the positions of the acousto-optic deflection module and the vector light field transformation module; the problems of single light field form, complex light field conversion, poor processing quality and lower processing efficiency existing in the traditional laser micro-nano processing process are solved, and the beneficial effects of being convenient to assemble and meeting the requirements of special processing are realized. Furthermore, the vector light field transformation module adopts the combination of the S glass and the plane mirror, or adopts the wedge-shaped light field transformation mirror, and has simple structure and reliable output.
Example two
On the basis of the first embodiment, the vector light field transformation device 5 is further improved, and the vector light field transformation device 5 adopts a wedge-shaped light field transformation mirror, so that the whole system is more compact.
Referring to fig. 5 and 6, the combination of S-glass and plane mirror in the vector light field transforming device 5 is replaced by a wedge-shaped light field transforming mirror 55, and in the same way, the vector light field transforming device 5 includes a plurality of wedge-shaped light field transforming mirrors 55, and fig. 5 only illustrates one wedge-shaped light field transforming mirror 55 as an example. The wedge-shaped light field transformation mirror 55 is wedge-shaped fused silica glass with different grating patterns, and comprises different etching areas, wherein the different etching areas are used for etching the different grating patterns, and the etching areas are kept at a certain distance and are arranged in parallel along the length direction of the glass, so that linearly polarized light can be changed into radial, angular or high-order vector light when passing through the etching areas.
Referring to fig. 6, the arrangement direction of the etched areas of the wedge-shaped light field transforming mirror 55 is consistent with the scanning directions of the first acousto-optic deflection module and the second acousto-optic deflection module.
When the acousto-optic deflection modules work, the signal synchronization control unit 4 controls the first acousto-optic deflection module 31 and the second acousto-optic deflection module 32 to load different radio frequency signal frequencies through driving signals, and diffracted light beams just pass through different etching areas on the wedge-shaped light field conversion mirror 55.
In an alternative embodiment, the wedge-shaped light field transforming mirror 55 may also be a combination of two wedge-shaped S-slides of different thickness. Referring to fig. 5, the wedge-shaped light field transforming mirror 55 has a certain angle, and may refract the first deflected light beam output by the first acousto-optic deflection module 31 into the second acousto-optic deflection module at the same angle.
Referring to fig. 5, in the present embodiment, the combination of the first acousto-optic deflection module 31, the second acousto-optic deflection module 32 and the wedge-shaped light field conversion mirror 55 can play a role in rapidly switching the light path, and the wedge-shaped light field conversion mirror 55 not only plays a role in light field conversion, but also can refract the diffracted light beam so as to be converged into the main light path, so that the structure is simple.
In application, similar to the light field transformation mode in the first embodiment, when the signal synchronization control unit 4 and the reflective liquid crystal spatial light modulator 6 do not work, the light beam is focused by the focusing lens 7 along the main light path to act on the processing component 8, and the system outputs a gaussian light beam at this time; when the central control unit 10 sends an instruction to the signal synchronization control unit 4, the driving signal source 301 outputs a radio frequency signal, different radio frequency signal frequencies can change the diffraction angle of the first deflection light beam output by the first acousto-optic deflection module 31, so that the first deflection light beam is injected into different etching areas of the wedge-shaped light field conversion mirror 55 group, radial, angular or high-order vector light can be obtained, and the first deflection light beam is refracted by the wedge-shaped light field conversion mirror 55 to enter the second acousto-optic deflection module and then is converged into the main light path, and at the moment, the system output end can output radial, angular or high-order vector light.
Example III
Further, on the basis of the above embodiment, when the signal synchronization control unit 4 does not apply a driving signal to the first acousto-optic deflection module 31 and the second acousto-optic deflection module 32, the reflective spatial light modulator 6 is connected to the central control unit 10;
the linearly polarized light reaches the reflective spatial light modulator 6 along the main light path, and the reflective spatial light modulator 6 is configured to load different voltages according to the control signal of the central control unit 11, perform different modulations on the amplitude or phase of the linearly polarized light, and reflect and output scalar light fields of different types.
Referring to fig. 7, alternatively, the spatial light modulator 6 is a reflective liquid crystal spatial light modulator, which includes a glass layer 601, a transparent electrode 602, an alignment film 603, a liquid crystal layer 604, a reflective layer 605, and a control electrode 606, which are sequentially disposed from top to bottom; the control electrode 606 controls the voltage across the liquid crystal layer 604 according to the control signal of the central control unit 10 so that the liquid crystal molecules in the liquid crystal layer 604 exhibit different deflection angles, and the alignment film 603 on the surface of the liquid crystal layer 604 is used to align the liquid crystal molecules parallel to the surface of the alignment film 603 and reflect them through the reflective layer 605.
Referring to fig. 1 and 7, the central control unit 10 is connected to the control electrode 606 in the reflective spatial light modulator 6, and changes the voltage of the reflective spatial light modulator 6, so as to control the operation state of the liquid crystal spatial light modulator, and the reflective spatial light modulator 6 can modulate the amplitude or phase of the linearly polarized light and reflect the linearly polarized light through the reflective layer 605; the control electrode 606 and the transparent electrode 602 control the arrangement of the liquid crystal molecules by controlling the voltage across the liquid crystal molecules in the liquid crystal layer 604. Depending on the voltage applied in the reflective spatial light modulator 6, the reflective spatial light modulator 6 may modulate linearly polarized light into a scalar light field of a flat-top/array/Bessel type distribution.
Referring to fig. 3, the central control unit 10 controls the synchronous control unit 4, the spatial light modulator 6 and the motion controller 9 according to preset processing forms and motion modes, so that light fields required for rapid matching at different positions can be realized.
According to the embodiment of the invention, when the acousto-optic deflector does not work, the central control unit controls the reflective spatial light modulator to carry out different modulations on the amplitude or the phase of the linearly polarized light, and different scalar light fields such as radial polarized light, angular polarized light, flat-top type, array type, bessel type and the like are generated at the output end, so that the light field forms are various, the light field transformation can be carried out efficiently and reliably, and the requirement of processing of precise parts is met.
Example IV
The area capable of realizing light field transformation in the first to second embodiments is consistent with the scanning direction of the acousto-optic deflection module, namely, transformation in one-dimensional direction can be realized only. Based on the embodiment, the embodiment can realize the rapid transformation of the light field in the two-dimensional plane, thereby meeting the requirement of more vector light field transformation.
Referring to fig. 8, the first acousto-optic deflection module 31 and the second acousto-optic deflection module 32 each include two acousto-optic deflectors disposed perpendicular to each other, and the acousto-optic deflectors in the first acousto-optic deflection module 31 and the acousto-optic deflectors in the second acousto-optic deflection module 32 are symmetrically disposed about a center; illustratively, the first acousto-optic deflection module 31 includes a first acousto-optic deflector 311 and a second acousto-optic deflector 312 disposed perpendicular to each other, and the second acousto-optic deflection module 32 includes a third acousto-optic deflector 321 and a fourth acousto-optic deflector 322 disposed perpendicular to each other, wherein the first acousto-optic deflector 311 and the fourth acousto-optic deflector 322 are symmetrical about a center, and the second acousto-optic deflector 312 and the third acousto-optic deflector 321 are symmetrical about a center.
The vector light field transformation module adopts a wedge-shaped light field transformation mirror 55, and etching areas of the wedge-shaped light field transformation mirror 55 are arranged in an array manner;
The synchronous control unit 4 comprises a plurality of output channels, wherein each two output channels are in a group, and respectively output driving signals to the first acousto-optic deflection module 31 and the second acousto-optic deflection module 32 so as to enable the frequencies of radio frequency signals loaded by two symmetrically arranged acousto-optic deflectors (311 and 322,312 and 321) to be the same; illustratively, the first acousto-optic deflector 311 and the fourth acousto-optic deflector 322 are loaded with radio frequency signals of the same frequency, and the second acousto-optic deflector 312 and the third acousto-optic deflector 321 are loaded with radio frequency signals of the same frequency.
The first acousto-optic deflection module 31 is configured to deflect the outgoing light direction of the linearly polarized light, and diffract the outgoing light direction to obtain a first deflected light beam, where the first deflected light beam passes through a certain etched area in the wedge-shaped light field transformation mirror 55.
Two acousto-optic deflectors positioned relatively vertically can achieve two-dimensional scanning, if wedge-shaped light field conversion mirror 55 etches several different types of gratings, it can be converted into radially polarized light or angularly polarized light or other higher order vector beams as needed when linearly polarized light passes through.
Referring to fig. 9, the wedge-shaped optical field transforming mirror 55 is wedge-shaped fused silica glass etched with different grating patterns, and includes different etched areas, a certain distance is kept between every two etched areas, an array is formed in the wedge-shaped optical field transforming mirror 55, and the whole structure is kept consistent with the wedge-shaped optical field transforming mirror 55.
According to the processing morphology characteristics of the processing component 8, the corresponding vector light field type is selected, then the corresponding grating is etched on the wedge-shaped light field conversion mirror 55, the etching range and the etching position depend on the scanning range of the first acousto-optic deflection module 31 and the second acousto-optic deflection module 32 and the frequency of the radio frequency signals output by the driving signal source 301, so that a certain diffraction light path can pass through a certain etching area to convert a required light field.
In an alternative embodiment, the wedge-shaped light field transforming mirror 55 may also be a combination of wedge-shaped S-slides of several different thicknesses.
The synchronous control unit 4 simultaneously controls the acousto-optic deflectors in the first acousto-optic deflection module 31 and the second acousto-optic deflection module 32, and the output radio frequency signal of the driving signal source 301 can be continuously adjusted within a certain range, so that the surface scanning is realized. When the driving signal source 301 is controlled to output a certain radio frequency signal frequency, the output diffraction light beam can just pass through a certain etching area in the wedge-shaped light field transformation mirror 55.
In this embodiment, similar to the light field transformation in the first to second embodiments, when neither the signal synchronization control unit 4 nor the reflective spatial light modulator 6 is operated, the system outputs a gaussian beam; when the central control unit 10 sends an instruction to the signal synchronization control unit 4, the driving signal source 301 outputs different radio frequency signals, so that diffracted light is injected into different etching areas of the wedge-shaped light field transformation mirror, and different types of vector light beams can be obtained; the reflective spatial light modulator 6 is in an off state when the signal synchronization control unit 4 is in operation, and is used only as a mirror.
Further, as in the third embodiment, when the signal synchronization control unit 4 is in the off state and the reflective spatial light modulator 6 is in the operating state, the central control unit 10 instructs the reflective spatial light modulator 6 to change the voltage of the reflective spatial light modulator 6, and modulates the amplitude or phase of the linearly polarized light reaching the reflective spatial light modulator 6 along the main optical path, thereby changing the state of the light field, and according to the difference of the voltages of the reflective spatial light modulator 6, the system output end can obtain a flat-top/array/bessel light field distribution.
According to the embodiment of the invention, the two mutually perpendicular acousto-optic deflectors are arranged in the first acousto-optic deflection module and the second acousto-optic deflection module, so that the scanning range and the frequency of an output radio frequency signal are controlled, a certain diffraction light path can pass through a certain etching area, two-dimensional scanning can be realized, and a required light field is converted; when the signal synchronization control unit is closed, the amplitude or the phase of the linearly polarized light is modulated by the reflective spatial light modulator, so that different types of light field distribution such as radial polarized light, angular polarized light, gaussian, flat-top, array, bessel and the like can be obtained at the output end, the light field forms are various, the light field transformation can be efficiently and reliably performed, and the requirements of precise part processing are met.
Example five
An acousto-optic deflector-based light field transformation method applied to the acousto-optic deflector-based light field transformation device according to any one of the above embodiments, comprising:
the central control unit sends corresponding control signals to the signal synchronous control unit and the motion controller according to the prestored data of the movement of the processing part and the types of light fields required by different parts in the processing process;
the signal synchronization control unit simultaneously controls the first acousto-optic deflection module and the second acousto-optic deflection module to load radio frequency signals with the same frequency;
the pulse laser outputs linearly polarized light, parallel light generated by the beam expanding and collimating device along a main light path is input into the first acousto-optic deflection module, and deflected to obtain a first deflected light beam;
the vector light field transformation module transforms the first deflection light beam from linear polarized light into radial, angular and high-order vector light, and reflects or refracts the vector light beam to obtain a second deflection light beam;
the second deflection light beam enters the second optical deflection module and is remitted into a main light path to obtain a processing light beam;
and the processing light beam acts on the processing component which moves along with the motion controller after being reflected by the reflective spatial light modulator and converged by the focusing lens.
Optionally, the method further comprises:
when the signal synchronization control unit does not apply driving signals to the first acousto-optic deflection module and the second acousto-optic deflection module, the reflective spatial light modulator is connected with the central control unit;
the linear polarized light reaches the reflective spatial light modulator along the main light path, and the reflective spatial light modulator loads different voltages according to the control signal of the central control unit, carries out different modulations on the amplitude or the phase of the linear polarized light, and reflects and outputs scalar light fields of different types.
The optical field transformation method based on the acousto-optic deflector is applied to the optical field transformation device based on the acousto-optic deflector, can realize efficient optical field transformation, improves machining efficiency, can machine a machining part according to a machining mode required by a user, and meets various practical requirements.
It will be readily appreciated by those skilled in the art that the foregoing description is merely a preferred embodiment of the invention and is not intended to limit the invention, but any modifications, equivalents, improvements or alternatives falling within the spirit and principles of the invention are intended to be included within the scope of the invention.
Claims (10)
1. An acousto-optic deflector-based light field transformation device, comprising: the device comprises a pulse laser, two acousto-optic deflection modules, a signal synchronous control unit, a vector light field conversion module, a reflective spatial light modulator and a focusing lens, which are sequentially arranged along a light path;
the pulse laser is used for outputting linearly polarized light, and transmitting and injecting the linearly polarized light into the first acousto-optic deflection module along the main light path;
the signal synchronization control unit simultaneously controls the first acousto-optic deflection module and the second acousto-optic deflection module to load radio frequency signals with the same frequency;
the first acousto-optic deflection module is used for deflecting the emergent light direction of the linearly polarized light to obtain a first deflected light beam, and the first deflected light beam enters a deflection light path, wherein the size of the deflection angle is determined by the frequency of the radio frequency signal;
the vector light field transformation module is used for transforming the first deflection light beam from linearly polarized light into radial, angular or higher-order vector light, and reflecting or refracting the first deflection light beam to obtain a second deflection light beam to be injected into the second optical deflection module;
the second optical deflection module is used for converging the second deflected light beam into a main light path again, and then the second deflected light beam is sequentially reflected by the reflective spatial light modulator and converged by the focusing lens to obtain a processing light beam which acts on the processing component.
2. The light field transformation apparatus of claim 1 wherein the vector light field transformation module comprises an S-slide and a flat mirror;
the S glass is used for transforming a light field, converting the light field of the first deflection light beam into a radial, angular or higher-order vector light field from linearly polarized light, and the plane mirror is used for reflecting the transformed first deflection light beam to obtain a second deflection light beam, and injecting the second deflection light beam into the second optical deflection module.
3. The light field conversion device according to claim 2, wherein the number of S slides and the number of plane mirrors are equal to each other and are equal to or greater than 1;
each S slide corresponds to one plane mirror and belongs to the same deflection light path;
the signal synchronization control unit controls the first acousto-optic deflection module to load different radio frequency signal frequencies through a driving signal so that a first deflection light beam enters a corresponding deflection light path; the signal synchronization control unit controls the first acousto-optic deflection module and the second acousto-optic deflection module to load radio frequency signals with the same frequency, and the deflection angle of the second deflection light beam is the same as that of the first deflection light beam.
4. A light field conversion device as claimed in claim 3, characterized in that the angle Δθ between the nth deflection light path and the first deflection light path is such that Wherein N is greater than or equal to 2; wherein lambda is 0 Indicating the wavelength of the incident laser light, n and V s Respectively representing the refractive index and the internal sound velocity of an acousto-optic medium in the first acousto-optic deflection module, f s Representing the frequency of the radio frequency signal.
5. The light field transformation apparatus of claim 1 wherein the vector light field transformation module is a wedge-shaped light field transformation mirror; the wedge-shaped light field conversion mirror comprises different etching areas, different grating patterns are etched in the etching areas, the arrangement direction of the etching areas is consistent with the scanning directions of the first acousto-optic deflection module and the second acousto-optic deflection module, and the wedge-shaped light field conversion mirror is used for converting linearly polarized light into radial, angular or higher-order vector light when the first deflection light beam passes through the etching areas, and the second deflection light beam is obtained through refraction and is injected into the second acousto-optic deflection module.
6. The light field conversion device of claim 5, wherein the first acousto-optic deflection module and the second acousto-optic deflection module each comprise two acousto-optic deflectors positioned perpendicular to each other, the acousto-optic deflectors in the first acousto-optic deflection module and the acousto-optic deflectors in the second acousto-optic deflection module being symmetrically arranged about a center;
The etching areas of the wedge-shaped light field transformation mirrors are arranged in an array manner;
the synchronous control unit comprises a plurality of output channels, wherein each two output channels are in a group, and drive signals are respectively output to the first acousto-optic deflection module and the second acousto-optic deflection module so that the frequencies of radio frequency signals loaded by the two symmetrically arranged acousto-optic deflectors are the same;
the first acousto-optic deflection module is used for deflecting the emergent light direction of the linearly polarized light, and diffracts to obtain a first deflection light beam, and the first deflection light beam passes through a certain etching area in the wedge-shaped light field transformation mirror.
7. The light field transformation apparatus of claim 1 wherein the light field transformation apparatus further comprises a beam expanding collimation apparatus, a motion controller, and a central control unit;
the beam expansion and collimation device is arranged between the pulse laser and the first acousto-optic deflection module and is used for generating parallel light after collimating and expanding the linearly polarized light;
the processing part is fixedly arranged on the motion controller and moves along with the motion controller;
the central control unit is connected with the motion controller and the signal synchronization control unit and is used for controlling the motion direction of the motion controller according to the processing data and controlling the signal synchronization control unit to transmit driving signals to the first acousto-optic deflection module and the second acousto-optic deflection module so as to load corresponding radio frequency signal frequencies to carry out preset processing programs.
8. The light field conversion device according to claim 7, wherein the reflective spatial light modulator is connected to the central control unit when the signal synchronization control unit does not apply a driving signal to the first acousto-optic deflection module and the second acousto-optic deflection module;
the linear polarized light reaches the reflective spatial light modulator along the main light path, and the reflective spatial light modulator is used for loading different voltages according to the control signal of the central control unit, modulating the amplitude or the phase of the linear polarized light differently, and reflecting and outputting scalar light fields of different types.
9. The light field transformation apparatus of claim 7, wherein the light field transformation apparatus further comprises: the motor is connected with the plane mirror in the vector light field transformation module;
when the synchronous control unit controls the first acousto-optic deflection module and the second acousto-optic deflection module to load different radio frequency signal frequencies through a driving signal, the motor is used for driving the plane mirror to rotate according to the control signal of the central control unit, the plane mirror is used for changing the deflection angle of the first deflection light beam when reflecting the first deflection light beam to obtain a second deflection light beam, and the second deflection light beam is converged into a main light path again through the second acousto-optic deflection module.
10. An acousto-optic deflector-based light field transformation method applied to an acousto-optic deflector-based light field transformation device as set forth in any one of claims 1 to 9, comprising:
the central control unit sends corresponding control signals to the signal synchronous control unit, the reflective spatial light modulator and the motion controller according to prestored data of the movement of the processing part and the types of light fields required by different parts in the processing process;
the signal synchronization control unit simultaneously controls the first acousto-optic deflection module and the second acousto-optic deflection module to load radio frequency signals with the same frequency;
the pulse laser outputs linearly polarized light, parallel light generated by the beam expanding and collimating device along a main light path is input into the first acousto-optic deflection module, and deflected to obtain a first deflected light beam;
the vector light field transformation module transforms the first deflection light beam from linear polarized light into radial, angular or higher-order vector light, and reflects or refracts the first deflection light beam to obtain a second deflection light beam;
the second deflection light beam enters the second optical deflection module and is remitted into a main light path to obtain a processing light beam;
and the processing light beam acts on the processing component which moves along with the motion controller after being reflected by the reflective spatial light modulator and converged by the focusing lens.
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