CN113945739A

CN113945739A - Interface device, circuit board unit, and semiconductor test apparatus

Info

Publication number: CN113945739A
Application number: CN202111309399.8A
Authority: CN
Inventors: 张文; 居宁; 吴彦昌
Original assignee: Beijing Huafeng Test & Control Technology Co ltd
Current assignee: Beijing Huafeng Test & Control Technology Co ltd
Priority date: 2021-11-06
Filing date: 2021-11-06
Publication date: 2022-01-18

Abstract

The invention relates to an interface device for semiconductor test, a circuit board unit and a semiconductor test device, wherein the interface device comprises: the connector is assembled on the rotating part, the connector can rotate relative to the base in a multi-angle mode in a preset rotating angle range through the rotating part, and the connector is configured to be used for connecting external equipment with an interface end. Above-mentioned interface arrangement, the connector rotates the assembly back on the base through rotating the ware, has multi-angle pivoted effect, if have the deviation in the position between connector and the interface end, the connector also can be under the rotation ability that the rotation ware provided, rectifies through pivoted mode and interface end at the butt joint in-process, and then corrects the butt joint position.

Description

Interface device, circuit board unit, and semiconductor test apparatus

Technical Field

The present invention relates to the field of semiconductor device technology, and more particularly, to an interface device, a circuit board unit, and a semiconductor test device.

Background

The semiconductor tester usually has a plurality of groups of circuit board units and an external device with an interface end, for example, an interface test board is used as the external device, the external device is installed on the semiconductor tester and is aligned with a plurality of groups of relatively independent circuit board units in the semiconductor tester, and when the plurality of groups of circuit board units and the external device realize the transmission of electrical signals through a connector, the test of a device to be tested on the external device can be realized.

In the prior art, external equipment and a plurality of groups of circuit board units are usually aligned in a mechanical hard connection mode, and the requirements on manufacturing tolerance of structural parts, guiding precision in a semiconductor testing machine and assembly are high. With the increase of the number of circuit board units and the improvement of the signal density of the connector, alignment deviation is easily caused, the connection is unreliable, and the existing development requirements cannot be met.

Disclosure of Invention

In view of this, it is necessary to provide an interface device, a circuit board unit, and a semiconductor test apparatus, which address the problem of misalignment between an external device and the circuit board unit.

The invention provides an interface device for semiconductor test, comprising:

a base;

the rotating device comprises a fixing part and a rotating part, the fixing part is elastically assembled on the base, the rotating part is rotatably assembled on the fixing part, and the rotating part can rotate relative to the fixing part at multiple angles within a preset rotating angle range;

a connector fitted on the rotating portion, the connector being rotatable by the rotating portion in a predetermined rotational angle range at a plurality of angles with respect to the base, the connector being configured to connect an external device having an interface end.

In one embodiment, the connector is a pogo pin connector or a pogo pin connector.

In one embodiment, the straight line track of the fixing part elastically approaching or departing from the base forms an elastic movement reference line, and the fixing part is elastically movable relative to the base at least along the elastic movement reference line.

In one embodiment, the interface device includes:

and one end of the spring is connected with the base, the other end of the spring is connected with the fixing part, the central axis of the spring is parallel to the elastic movement reference line, and the fixing part can move linearly along the elastic movement reference line or move obliquely deviating from the elastic movement reference line through the spring.

In one embodiment, the number of the springs is one, and the central axis of each spring is coincident with the elastic movement reference line;

or, the number of the springs is multiple, the springs are all connected with the fixing part, the connecting positions where the springs are connected with the fixing part can be connected to form a circle, and the vertical distances from the central axes of the springs to the elastic movement reference line are equal.

In one embodiment, the rotator is a bearing, the bearing includes an outer ring that forms the fixed portion and an inner ring that forms the rotating portion, and balls are disposed between the inner ring and the outer ring, and the inner ring rotates relative to the outer ring through the balls.

In one embodiment, the bearing is a ball bearing, and the connector rotates relative to the base through the ball bearing in multiple angles.

In one embodiment, the thickness of the inner ring is greater than that of the outer ring, and the portion of the inner ring protruding from the outer ring is configured to be used for assembling a connector.

In one embodiment, the rotator further comprises:

a limiting structure configured to limit the range of rotational angles over which the inner race rotates relative to the outer race.

In one embodiment, the limiting structure is a limiting protrusion arranged on the inner ring, and the limiting protrusion is configured to form a limiting fit with at least one position on the outer ring so as to limit the rotation angle range;

or, the limiting structure is an elastic limiting part connected between the connector and the outer ring, and the elastic limiting part is configured to limit the range of the rotation angle.

In one embodiment, the interface device further includes:

a flexible conductive member having one end electrically connected to the connector and the other end passing through the bearing from the inside of the inner race or bypassing the bearing from the outside of the outer race, the other end being configured to be connected to a circuit board.

The present invention also provides an interface apparatus for semiconductor testing, the interface apparatus comprising:

a base;

the rotating device comprises a fixing part and a rotating part, the fixing part is assembled on the base, the rotating part is rotatably assembled on the fixing part, and the rotating part can rotate relative to the fixing part at multiple angles within a preset rotating angle range;

a connector which is a pogo pin connector or a pogo pin connector, which is fitted on the rotating portion, the connector being rotatable by the rotating portion at a plurality of angles within a predetermined rotational angle range with respect to the base, the connector being configured to connect an external device having an interface end.

The present invention also provides a circuit board unit including:

the interface device, the base is configured to be used for directly mounting the circuit board or indirectly mounting the circuit board through a circuit board fixing frame, the head end of the connector is configured to be used for connecting with an external device with an interface end, and the tail end of the connector is configured to be used for electrically connecting with the circuit board.

The invention also provides semiconductor test equipment which comprises the circuit board unit.

Above-mentioned interface arrangement, the connector passes through the rotation ware and rotates the assembly back on the base, the connector can rotate for the base multi-angle, when the connector docks with the external equipment that has the interface end, if have the deviation in the position between connector and the interface end, the connector also can be under the rotation ability that the rotation ware provided, rectify through pivoted mode and interface end in the butt joint process, and then correct the butt joint position, realize the accurate counterpoint with the interface end, it is more convenient and more reliable, and can reduce the machining precision of structure and the assembly requirement of test machine, have the characteristics from the centering, allow circuit board unit to realize blind plugging, satisfy circuit board unit and external equipment's effective connection.

Drawings

Fig. 1 is a schematic structural diagram of an interface device according to an embodiment of the present invention;

fig. 2 is a schematic diagram illustrating an undocked state of an interface device and an external device in an ideal state according to an embodiment of the present invention;

FIG. 3 is a cross-sectional view of the interface device of FIG. 2 in an ideal undocked state with an external device;

fig. 4 is a schematic diagram illustrating an undocked state of an interface device and an external device in an ideal state according to another embodiment of the present invention;

FIG. 5 is a cross-sectional view of the interface device of FIG. 4 in an ideal undocked state with an external device;

FIG. 6 is a cross-sectional view of the interface device shown in FIG. 4 in an ideal mated state with an external device;

FIG. 7 is a cross-sectional view of an un-mated state of an interface device and an external device according to an embodiment of the present invention;

FIG. 8 is a cross-sectional view of the interface device shown in FIG. 7 in a non-ideal mated state with an external device;

FIG. 9 is a schematic diagram of a trace for a flexible conductive component according to an embodiment of the present invention;

FIG. 10 is a schematic diagram of traces for a flexible conductive member according to another embodiment of the present invention;

FIG. 11 is an assembly view of a retaining structure according to an embodiment of the present invention;

FIG. 12 is an assembled cross-sectional view of a spacing structure provided in accordance with an embodiment of the present invention;

FIG. 13 is a schematic view of an assembled structure of an interface device according to another embodiment of the present invention;

fig. 14 is a schematic view of another assembling structure of an interface device according to another embodiment of the present invention.

Reference numerals:

001. an interface device; 002. a circuit board; 003. an external device;

100. a base; 200. a rotator; 300. a connector; 400. a spring; 500. a limiting structure; 600. a flexible conductive member;

210. a fixed part; 220. a rotating part;

310. a positioning member; 320. a spring-loaded contact;

410. and (4) an elastic movement reference line.

Detailed Description

In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.

In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are not to be considered limiting of the invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.

In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

In the present invention, unless otherwise expressly stated or limited, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through an intermediate. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like as used herein are for illustrative purposes only and do not denote a unique embodiment.

Referring to fig. 1 and 2, an embodiment of the present invention provides an interface device 001 for semiconductor testing, where the interface device 001 includes: the connector comprises a base 100, a rotator 200 and a connector 300, wherein the rotator 200 comprises a fixed part 210 and a rotating part 220, the fixed part 210 is elastically assembled on the base 100, the rotating part 220 is rotatably assembled on the fixed part 210, the rotating part 220 can rotate at multiple angles relative to the fixed part 210 within a preset rotating angle range, the connector 300 is assembled on the rotating part 220, the connector 300 can rotate at multiple angles relative to the base 100 within the preset rotating angle range through the rotating part 220, and the connector 300 is configured to be connected with an external device 003 with an interface end.

The interface device 001 may be disposed between an external device and a circuit board unit of an ATE (Automatic Test Equipment, which means an Automatic integrated circuit tester) for accurate alignment of the external device and the circuit board unit, where the external device has an interface end, and may include, for example, an interface Test board or other similar Test board devices. Besides, the interface device 001 can be applied to the positioning of the circuit board unit and other devices, or to the positioning of two devices requiring floating connection. The connector 300 may be fitted or electrically connected to the external device 003 having an interface end, and for example, the connector 300 may have a male terminal and the interface end of the external device 003 may have a female terminal, or the connector 300 may have a female terminal and the interface end of the external device 003 may have a male terminal. As shown in fig. 2 to 10, the base 100 may be a circuit board holder, and the base 100 may be directly used to mount the circuit board 002, or the base 100 may be configured to be connected to a circuit board holder, and the circuit board 002 may be mounted by using the circuit board holder without directly mounting the circuit board 002.

External device 003 includes a device having an interface end, such as an external device, to which connector 300 may be used to interface. The connector 300 may include a connector circuit board, and a high-density connector electrically connected to the connector circuit board in a stacked manner, the high-density connector may have a plurality of embedded reeds or pogo pins to form a structure for mating with the interface end of the external device 003, and the reeds or pogo pins have elasticity, so that flexible mating may be formed, and flexible displacement may be generated when the interface device 001 is mated with the interface end. The electrical signal is transmitted from the circuit board 002 to the connector 300, and finally transmitted to the external device 003 after being aligned with the interface end of the external device 003 through the connector 300, thereby completing the test of the external device 003. The connector 300 may be other types of electrical connectors, optical communication connectors, fluid connectors, etc., and is not limited thereto.

The structural shapes of the high-density connector and the connector circuit board can be determined as required, for example, the connector 300 is a square plate or a circular plate, the positioning member 310 can be arranged on the connector 300, for example, the positioning member 310 is a positioning member 310 using a positioning pin, the positioning member 310 can be connected to the high-density connector as a component in positioning fit with the external device 003, or can be connected to the high-density connector and the connector circuit board simultaneously, one end of the positioning member 310, which is far away from the connector 300, can be provided with a cone top, and the initial self-centering of the external device when being connected with the interface device 001 in an aligned manner can be realized through the cone surface of the cone top.

This interface arrangement 001 has adopted rotating device 200, rotating device 200 has the rotation function at certain turned angle within range, according to the demand, the rotation function of the rotating device 200 of adoption is not limited to it can realize around the X axle, around the Y axle or around the dead axle rotation of Z axle, or the multi-angle rotation of deviating from X axle, Y axle or Z axle direction, connector 300 rotates the assembly back on base 100 through rotating device 200, connector 300 has at least for base 100 dead axle pivoted effect, or can also have multi-angle pivoted effect. The more flexible the rotation function of the rotator 200, the more flexible the rotation effect of the connector 300 can be obtained, so that when there are various deviations in position between the connector 300 and the interface end, the connector 300 can form a corresponding self-correcting effect, and accurate alignment is realized.

The connector 300 can achieve a rotation effect by using the rotator 200 to generate a self-aligning effect, and can also achieve multi-angle movement by an elastic assembly effect, as shown in fig. 1, for example, the connector 300 is a spring leaf connector or a pogo pin connector 300, the pogo pin connector 300 includes a plurality of pogo contacts 320 and a carrier for supporting the pogo contacts 320, the pogo contacts 320 are used for aligning with the interface end of the external device 003, and the pogo contacts 320 have an elastic expansion movement effect, so that when aligning with the interface end of the external device 003, elastic deflection can be performed according to deviation between the pogo contacts 320 and the interface end, the aligned position is corrected, and accurate alignment with the interface end is achieved.

In addition, when the connector 300 is another type of connector 300, as shown in fig. 1 and 10, the fixing portion 210 may be elastically mounted on the base 100 to achieve a similar elastic deflection, so as to achieve a self-correcting effect, and the elastic mounting may allow the connector 300 to automatically return to the initial position in a free state. The linear track of the fixing portion 210 elastically approaching or departing from the base 100 forms an elastic movement reference line 410, a direction of the elastic movement reference line 410 may be represented as a Z-axis direction, and the fixing portion 210 is elastically movable relative to the base 100 at least along the elastic movement reference line 410.

The fixing portion 210 may be elastically mounted on the base 100 in various manners, for example, an elastic member may be indirectly elastically mounted, or an elastic assembly having an elastic effect may be implemented by using a plurality of components, when the elastic member is elastically mounted, the elastic member may be a spring 400, a wire rope, or other elastically deformable structures, for example, the interface device 001 further includes at least one spring 400, the spring 400 has an axial expansion characteristic and is capable of being shifted in another direction deviating from the axial direction, one end of the spring 400 is connected to the base 100, the other end of the spring 400 is connected to the fixing portion 210, a central axis of the spring 400 is parallel to the elastic movement reference line 410, and the fixing portion 210 may be linearly moved along the elastic movement reference line 410 by the spring 400, that is, moved along the Z-axis direction, or inclined away from the elastic movement reference line 410, i.e., multi-angle movement in the X-axis direction or the Y-axis direction, so that the rotator 200 together with the connector 300 can be elastically multi-angle moved with respect to the base 100 by the multi-angle elastic change effect of the spring 400. The central axis of the spring 400 indicates the central axis of a cylindrical surface formed by a curved surface on which the spiral of the spring 400 is located.

The number of the springs 400 is not limited, and may be one or more, for example, the number of the springs 400 is one, the central axis of the spring 400 coincides with the elastic movement reference line 410, and the axial expansion and contraction of the spring 400 allows the connector 300 to move toward and away from the base 100, or, the number of the springs 400 is plural, and the plural springs 400 are all connected to the fixing portion 210, and a plurality of connection positions where the plurality of springs 400 are connected with the fixing part 210 may be connected to form a circle, and vertical distances from central axes of the plurality of springs 400 to the elastic movement reference line 410 are all equal, at this time, the uniform distribution of the plurality of springs 400 may provide different elastic forces at different positions of the rotator 200 and the connector 300, so that the connector 300 may realize multi-angle movement according to the cooperation between different telescopic states of the plurality of springs 400.

The fixed portion 210 and the rotating portion 220 of the rotator 200 may be formed by any relatively rotatable components, and as shown in fig. 1, for example, the rotator 200 is a bearing, the bearing includes an outer ring which can form the fixed portion 210 and an inner ring which can form the rotating portion 220, so that the inner ring and the outer ring can directly form the rotating portion 220 and the fixed portion 210 which rotate relatively, and the bearing technology is mature and easy to purchase, and balls are disposed between the inner ring and the outer ring, and the inner ring rotates relative to the outer ring through the balls, so that the rotating portion 220 rotates relative to the fixed portion 210, besides, the outer ring of the bearing can be used as the rotating portion 220, and the inner ring of the bearing can be used as the fixed portion 210, and those skilled in the art can set the rotating portion 220 according to requirements, and do not limit the present disclosure.

The bearing of the rotator 200 may be any type of bearing, preferably a ball bearing, and the ball bearing may be a self-aligning roller bearing or a self-aligning ball bearing, or may be another type of bearing satisfying angular movement of the axis, or may be a self-aligning bearing. Since the ball bearing can satisfy the angular motion of the axis line, the connector 300 can rotate relative to the base 100 by the ball bearing at multiple angles, not limited to the fixed axis rotation.

The connector 300 is assembled with the bearing, specifically, the connector 300 is connected with the inner ring, and rotates synchronously with the rotation of the inner ring relative to the outer ring, the connector 300 and the inner ring may be connected directly or indirectly by using a component, in order to facilitate the connection of the connector 300 and the inner ring, the thickness of the inner ring is greater than that of the outer ring, the portion of the inner ring protruding from the outer ring is configured to be used for assembling the connector 300, because the connector 300 is connected with the inner ring, but the outer ring is outside the inner ring, the connector 300 can interfere with the outer ring to a certain extent when rotating along with the inner ring, therefore, the thickness difference between the inner ring and the outer ring also determines the rotation angle range of the connector 300, and the larger the thickness difference, the smaller the rotation restriction on the connector 300 is.

Although the connector 300 can flexibly match with the mating situation through multi-angle movement, the self-correcting effect of the connector 300 also needs to be reasonably limited, therefore, the rotator 200 further comprises a limiting structure 500, and the limiting structure 500 is configured to limit the rotating angle range of the inner ring relative to the outer ring, so that the connector 300 can move along with the inner ring within a controllable range without excessively deviating from the working position.

As shown in fig. 5 and 8, the limiting structure 500 is a limiting protrusion disposed on the inner ring, the limiting protrusion is configured to form a limiting fit with at least one portion on the outer ring to limit the range of the rotation angle, and when the limiting protrusion forms a limiting fit such as abutment with a predetermined position on the outer ring, the inner ring stops rotating due to limitation, that is, cannot continue to rotate beyond the range of the rotation angle, of course, the limiting structure 500 may also be a limiting protrusion disposed on the outer ring, and the limiting protrusion is configured to form a limiting fit with at least one portion on the inner ring.

Or as shown in fig. 11 and fig. 12, the limiting structure 500 is an elastic limiting member connected between the connector 300 and the outer ring, the elastic limiting member is configured to limit the range of the rotation angle, the elastic limiting member can form an elastic pulling force between the connector 300 and the outer ring, so that the elastic limiting member deforms under the force, and in the deformation range of the elastic limiting member, the connector 300 and the inner ring can rotate relative to the outer ring, but the deformation range of the elastic limiting member is exceeded, the inner ring stops rotating due to being limited, that is, the inner ring cannot continue to rotate beyond the range of the rotation angle.

With continued reference to fig. 9 and 10, the interface device 001 further includes a flexible conductive member 600, one end of the flexible conductive member 600 is electrically connected to the connector 300, the other end of the flexible conductive member 600 passes through the bearing from the inside of the inner ring or bypasses the bearing from the outside of the outer ring, the other end of the flexible conductive member 600 is configured to be connected to a circuit board 002, when the other end of the flexible conductive member 600 passes through the bearing from the inside of the inner ring, the flexible conductive member 600 can be connected to a central region of the connector 300 to match an assembly structure thereof passing through the inside of the bearing, when the other end of the flexible conductive member 600 passes through the bearing from the outside of the outer ring, since the flexible conductive member 600 needs to pass through the outside of the bearing, the area of the connector 300 can be set to be larger than the area covered by the outer ring portion, to match the fit of flexible conductive member 600 around the outside of the bearing so that the passage of flexible conductive member 600 does not structurally interfere with the bearing.

The flexible conductive member 600 may be any type of conductive structure, and in order to satisfy stable electrical conduction, the conductive member may be a conductive cable electrically connected to the connector 300 through the cable connector 300, or may be a flexible printed board electrically connected to the connector 300.

Referring to fig. 13 and 14, an embodiment of the present invention further provides an interface apparatus 001 for semiconductor testing, where the interface apparatus 001 includes: the connector 300 is assembled on the rotating part 220, the connector 300 can rotate relative to the base 100 in a multi-angle mode through the rotating part 220, and the connector 300 is configured to be used for connecting an external device 003 with an interface end. Since the related technical content of the interface device has been described in detail in the foregoing, it is not repeated herein, and any related technical content can refer to the above description.

The invention also provides a circuit board unit, which comprises a circuit board fixing frame and the interface device 001, wherein the base 100 is configured to be used for directly mounting a circuit board 002 or indirectly mounting the circuit board 002 through the circuit board fixing frame, the number of the circuit boards 002 which can be mounted by the circuit board fixing frame can be one or more, the head end of the connector 300 is configured to be used for being connected with an external device 003 with an interface end, and the tail end of the connector 300 is configured to be used for being electrically connected with the circuit board 002. When the circuit board unit is butted with the external equipment 003, a plurality of circuit boards 002 can be installed in a stacked manner in the circuit board fixing frame, each circuit board 002 is electrically connected with at least one interface device 001, and a plurality of interface ends of the interface devices 001 and the external equipment 003 are electrically connected at the same time, so that a structure for synchronous mass testing can be realized, and the testing efficiency is effectively improved.

The invention also provides semiconductor test equipment which comprises the circuit board unit. Since the specific structures, functional principles and technical effects of the interface device 001 and the circuit board unit are described in detail in the foregoing, detailed description thereof is omitted here.

The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.

The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.

Claims

1. An interface apparatus for semiconductor testing, the interface apparatus comprising:

a base;

2. The interface device of claim 1, wherein the connector is a pogo pin connector or a pogo pin connector.

3. The interface device according to claim 1, wherein a linear trajectory of the fixed portion elastically approaching or departing from the base constitutes an elastic movement reference line, and the fixed portion is elastically movable relative to the base at least along the elastic movement reference line.

4. The interface device of claim 3, wherein the interface device comprises:

5. The interface device of claim 4, wherein the number of said springs is one, and a central axis of said springs coincides with said elastic movement reference line;

6. Interface device according to any of claims 1-5, wherein the rotator is a bearing comprising an outer ring, which may constitute the fixed part, and an inner ring, which may constitute the rotating part, with balls arranged between the inner ring and the outer ring, by means of which the inner ring rotates relative to the outer ring.

7. The interface device of claim 6, wherein the bearing is a ball bearing, and the connector is rotated relative to the base by the ball bearing at multiple angles.

8. The interface device of claim 6, wherein a thickness of the inner ring is greater than a thickness of the outer ring, a portion of the inner ring protruding from the outer ring being configured for fitting a connector.

9. The interface device of claim 6, wherein the rotator further comprises:

10. The interface device of claim 9, wherein the limiting structure is a limiting protrusion disposed on the inner race, the limiting protrusion configured to form a limiting engagement with at least one location on the outer race to limit the range of rotational angles;

11. The interface device of claim 6, further comprising:

12. An interface apparatus for semiconductor testing, the interface apparatus comprising:

a base;

13. A circuit board unit, comprising:

the interface apparatus of any one of claims 1-12, the base configured for direct mounting of a circuit board or indirect mounting of a circuit board through a circuit board mount, the head end of the connector configured for connection with an external device having an interface end, the tail end of the connector configured for electrical connection with the circuit board.

14. A semiconductor test apparatus characterized by comprising the circuit board unit according to claim 13.