CN107090575B - A kind of current equalizer and reaction chamber - Google Patents
A kind of current equalizer and reaction chamber Download PDFInfo
- Publication number
- CN107090575B CN107090575B CN201610090878.8A CN201610090878A CN107090575B CN 107090575 B CN107090575 B CN 107090575B CN 201610090878 A CN201610090878 A CN 201610090878A CN 107090575 B CN107090575 B CN 107090575B
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- Prior art keywords
- connecting portion
- current equalizer
- shower tray
- radio frequency
- elastomer
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
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- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
The present invention provides a kind of current equalizer, including radio frequency lid and shower tray, the radio frequency lid includes being fixedly connected on integrated two parts up and down, upper part is discoid the first noumenon, its underpart is cricoid first connecting portion, the outer diameter of the first connecting portion is less than the diameter of the first noumenon, the shower tray includes being fixedly connected on integrated two parts up and down, upper part is the second connecting portion of annular, its underpart is the second discoid ontology, the outer diameter of the second connecting portion is greater than the diameter of second ontology, the first connecting portion with the second connecting portion is circumferentially arranged on its respective lateral wall respectively mutually matched engaging part, so that the radio frequency lid is fixedly connected with the shower tray.Current equalizer provided by the present invention with effective solution gas leakage and can deform the undesirable problem of caused processing technology, and have good conductive characteristic.
Description
Technical field
The present invention relates to semiconductor equipment manufacturing technology fields, and in particular to a kind of current equalizer and reaction chamber.
Background technique
Plasma enhanced chemical vapor deposition (PECVD) equipment is mainly used for depositing sapphire or silicon chip surface
As plated film place occurs for the reaction chamber of plated film, PECVD device, and structure is even more important, and carries out many weights of deposition plating
Index is wanted all to be closely related with chamber structure, such as airflow homogeneity, chamber size, chamber electric conductivity etc., PECVD device one
As current equalizer formed using radio frequency lid and shower tray, it is therefore an objective to make reaction gas it is more uniform enter conversion zone, will be thin
Film deposits on chip, is reacted, and the uniformity of air inlet is critically important, is capable of the airflow homogeneity in indirect reaction region, meanwhile,
The airtightness and electric conductivity of current equalizer are also closely bound up with process results.
In the prior art, as shown in Figure 1, in the reaction chamber of PECVD device, radio frequency lid 1 and shower tray 2 pass through screw 3
It is fixed together, forms current equalizer, be additionally provided with focusing ring 4 and ceramic ring 5 in the outside of radio frequency lid 1 and shower tray 2.
When carrying out technique, gas enters in the chamber formed inside current equalizer by the air inlet on radio frequency lid 1, and passes through shower tray
2 are uniformly injected in reaction chamber downwards, carry out technique.
Due to being chronically at the heating condition of high temperature when PECVD device carries out technique, shower tray 2 is in the technique side of radiant heating
It expands under formula, since shower tray 2 is fixed by screw 3, is restricted in radial direction expansion, when 3 tension of screw, due to
Diameter is swollen outward to be unable to satisfy thermal expansion demand, causes 2 bottom of shower tray downwardly convex, as shown in Figure 1.
When screw 3 does not screw, i.e., screw 3 fails shower tray 2 and radio frequency lid 1 is fixed, although shower tray 2 can be horizontal
To and longitudinal movement, but since there are gap (minimum up to 0.1mm within) between shower tray 2 and radio frequency lid 1, such as Fig. 2 institute
Show, process gas can be changed the gap between 5 along radio frequency lid 1 and shower tray 2 and focusing ring 4 and ceramics and be overflow by this gap at this time
It (is directed toward out in reaction chamber see 3 surrounding arrow of screw in figure), influences gas distribution, and then influence deposition uniformity.
How fundamentally to solve shower tray caused by the connection between shower tray in the prior art and radio frequency lid deformation and
The problem of gas leakage is semiconductor manufacturing equipment urgent problem to be solved.
Summary of the invention
The technical problem to be solved by the present invention is to provide one kind and flow for the drawbacks described above in the presence of the prior art
Device and reaction chamber, to solve the problems, such as shower tray deformation and gas leakage existing in the prior art.
To achieve the above object, the present invention provides a kind of current equalizer, including radio frequency lid and shower tray, the radio frequency lid packet
It includes and is fixedly connected on integrated two parts up and down, upper part is discoid the first noumenon, and its underpart is cricoid first connection
Portion, the outer diameter of the first connecting portion are less than the diameter of the first noumenon, the shower tray include be fixedly connected on it is integrated
Upper and lower two parts, upper part are the second connecting portion of annular, and its underpart is the second discoid ontology, the second connecting portion
Outer diameter is greater than the diameter of second ontology, and the first connecting portion and the second connecting portion are respectively in its respective lateral wall
It is above circumferentially arranged to have mutually matched engaging part, so that the radio frequency lid is fixedly connected with the shower tray.
Preferably, the engaging part includes at least two be uniformly arranged in the circumferential direction on the second connecting portion lateral wall
A inverted L-shaped grab, and the grab is higher than the lateral wall upper surface of the second connecting portion,
And at least two be uniformly arranged in the circumferential direction on the first connecting portion lateral wall and the grab shape phase
The engaging slot of cooperation, when the grab is sticked in the engaging slot, the grab can revolve between open position and closed position
Turn, so that the radio frequency lid and the shower tray are opened and closure.
Preferably, it is provided with locking device in the engaging slot, such as steel ball spring locking device, when the radio frequency lid and institute
It states shower tray to engage and rotate to closed position, the locking device locks the radio frequency lid and the shower tray.
Preferably, the lower surface of the first connecting portion is provided with annular groove, and the upper surface of the second connecting portion is set
It is equipped with the annular convex platform matched with the annular groove shaped, the annular convex platform of the second connecting portion is connect with described first
The annular groove grafting in portion, to form labyrinthine pathway.
Preferably, the inner sidewall of the annular groove is provided with annular step surface, and the annular step surface is at least one
It is a.
Preferably, the inner sidewall of the annular groove is provided with annular mounting groove, and the current equalizer is additionally provided with elasticity
Body, the elastomer are arranged in the mounting groove, and the prominent mounting groove of the elastomer.
Preferably, the inner sidewall of the annular groove is provided with elastomer, the elastomer and the annular groove it is interior
Side wall is fixedly connected.
Wherein, the elastomer is high temperature soft rubber or soft metal item.
Preferably, when the elastomer is high temperature soft rubber, it is provided with electric installation, such as helical simultaneously with elastomer
Pipe.
The present invention also provides a kind of reaction chambers, including the current equalizer as described in any one of claim 1-9.
Current equalizer provided by the invention changes the connection type of radio frequency lid and shower tray, by radio frequency lid and
Shower tray week sets up mutually matched holding section, and radio frequency lid and shower tray are fixed together, by original screw
Vertical connection is changed to rotation connection, cancels the restraint of shower tray in the axial direction.It, can laterally when shower tray expanded by heating
Even stress, reduces the dilatancy of shower tray, at the same in radio frequency cover setting annular groove and be arranged in shower tray it is right therewith
The annular convex platform answered, and by sealing radio frequency lid and shower tray in annular groove inner sidewall setting ring-shaped step and elastomer,
And interface channel is mazy bent passage, greatly reduces the possibility of gas leakage.
Reaction chamber provided by the invention can be with effective solution by using above-mentioned current equalizer provided by the invention
The undesirable problem of the processing technology of entire reaction chamber caused by the deformation and gas leakage of current equalizer.
Detailed description of the invention
Fig. 1 is the partial structure diagram of reaction chamber；
Fig. 2 is the partial enlarged view of circle part A in Fig. 1；
Fig. 3 is the attachment structure schematic diagram of current equalizer provided in an embodiment of the present invention；
Fig. 4 A is the scheme of installation of current equalizer provided in an embodiment of the present invention；And
Fig. 4 B is the open position scheme of installation of current equalizer provided in an embodiment of the present invention；And
Fig. 4 C is the closed position scheme of installation of current equalizer provided in an embodiment of the present invention；
Fig. 5 is the partial sectional view of current equalizer provided in an embodiment of the present invention.
In figure: 1- radio frequency lid；1a- the first noumenon；1b- first connecting portion；2- shower tray；The second ontology of 2a-；2b- second
Interconnecting piece；3- screw；4- focusing ring；5- ceramic ring；6- elastomer；7- engaging slot；8- grab；9- fastener；10- annular is recessed
Slot；11- annular convex platform；12- mounting groove.
Specific embodiment
Technical solution in order to enable those skilled in the art to better understand the present invention, with reference to the accompanying drawings and examples to this
Invention is described in further detail.
Fig. 3 is the attachment structure schematic diagram of current equalizer provided in an embodiment of the present invention, to solve spiral shell in the prior art
It is radially expanded limited caused by nail connection, the present embodiment is used the lateral wall of the second connecting portion 2b of shower tray 2 and radio frequency lid 1
The lateral wall of first connecting portion 1b mutually matched engaging part is circumferentially set, radio frequency lid 1 is fixedly connected with shower tray 2,
So that being radially expanded for shower tray 2 is unrestricted, the problem on deformation of shower tray 2 is solved.
Specifically, the present embodiment by the way of grab connection, in practical applications, can also be engaged using other
Structure, as shown in figure 3, the cards of at least two inverted L-shapeds is uniformly arranged in the lateral wall in the second connecting portion 2b of shower tray 2 upwards
Hook 8, wherein grab 8 is fixedly connected with second connecting portion 2b by fastener 9, and the fastener 9 can be solid for screw connection etc.
Determine connection type, be no longer described in detail, while the lateral wall of the first connecting portion 1b in radio frequency lid 1 is circumferentially uniformly arranged and the grab
The engaging slot 7 that 8 shape and quantity matches, due to also needing to rotate fixation after grab 8 and the engaging of engaging slot 7, it is possible to understand that
, engaging slot 7 is reserved with the space rotated for grab 8, and when grab 8 is sticked in engaging slot 7, radio frequency lid 1 and shower tray 2 are logical
It crosses rotation to complete to be fixedly connected, the mode that is specifically connected together is shown by Fig. 4 A, Fig. 4 B and Fig. 4 C.
As shown in Figure 4 A, the shape of grab 8 is inverted L-shaped, and radio frequency lid 1 and shower tray 2 are docked at according to arrow direction
After together, grab 8 is engaged in engaging slot 7, and grab 8 moving in rotation, position shown in Fig. 4 A can be card in engaging slot 7
The open position of hook 8.
As shown in Figure 4 B, according to arrow direction rotation spray tray 2, rotate grab 8 in engaging slot 7, when grab 8
After the eave tile slot part fitting corresponding to engaging slot 7 of eave tile position, spinning movement cannot continue, and reach the closure of the grab of Fig. 4 C
Position.
As shown in Figure 4 C, grab 8 is caught in engaging slot 7 completely, and the locking device by being arranged in engaging slot 7,
Such as steel ball spring locking device, so that grab 8 and the locking connection of engaging slot 7, to further be fastenedly connected radio frequency lid 1 and spray
Disk 2, so that airtightness and electric conductivity between the two is more preferable.
Further, the present invention also provides being provided with annular groove 10 in the lower surface of the first connecting portion 1b of radio frequency lid 1,
The annular convex platform 11 matched with the annular groove 10 is provided in the upper surface of the second connecting portion 2b of shower tray 2, so that
Radio frequency lid 1 and shower tray 2 are plugged in together, and form labyrinthine pathway, to solve the problems, such as that gas leaks, as shown in figure 5, Fig. 5
For the partial sectional view of current equalizer provided by the invention.
The Fig. 5 is please referred to, is clearer display, Fig. 5 is identical as Fig. 2, is all the partial enlargement of circle part A in Fig. 1
Figure, as shown in figure 5, the current equalizer is provided with annular groove 10 in the first connecting portion 1b of radio frequency lid 1, while in shower tray 2
Second connecting portion 2b be provided with the annular convex platform 11 matched with the shape of annular groove 10, will be original as shown in Figure 2
Radio frequency lid 1 and shower tray 2 are changed to the mode of annular slot link in such a way that screw 3 connects, make stress point between the two by
Original radial force and limited several point connections, be changed to a circumferential circle can stress, and stress surface be also it is circumferential to
It outside,, can be in the two in 2 temperature distortion of shower tray so that the connection of radio frequency lid 1 and shower tray 2 is more close and uniform
Stress surface uniformly disperse to fall lateral expansive force, reduce the deformation of shower tray 2.Meanwhile annular groove 10 and annular convex platform
Airtightness can be improved in the bent passage that 11 grafting are formed, and reduces gas leakage.As shown in figure 5, the longitudinal direction of annular groove 10 is cut
Face is taper, and annular convex platform 11 is cone boss with matching.It is understood that can also have other shapes that can expire
Sufficient demand, is not listed.
Further, to improve airtightness, the step surface (figure of at least one annular is set in the inner sidewall of annular groove 10
It is not shown in 5), and mounting groove 12 is set in the inner sidewall of annular groove, setting protrudes from the elastomer of groove body in mounting groove 12
6, when in 11 grafting of annular convex platform and annular groove 10, the setting of elastomer 6 and annular step surface all makes the close of the two
The enhancing of envelope property, under the limitation of the machining accuracy of components, reducing junction to the greatest extent may cause the seam of gas leakage
Gap.Specifically, elastomer 6 can be made of high temperature soft rubber and soft metal item.
Preferably, (can not also show in Fig. 5 in such a way that the inner sidewall of annular groove 10 is fixedly connected with elastomer 6
Out), guarantee the leakproofness of the inserting mode, for example, can be by the circumferential inner sidewall for being bonded in annular groove 10 of elastomer 6
On, it is closed to achieve the effect that.
Preferably, it to guarantee that the electric conductivity of connection is good, when elastomer 6 is using high temperature soft rubber, is provided with simultaneously
Electric installation, such as solenoid.
The present invention also provides a kind of reaction chambers, and current equalizer, the current equalizer are provided in the reaction chamber
Using above-mentioned current equalizer provided by the invention, repeat no more.
Reaction chamber provided by the embodiment of the present invention can be subtracted using current equalizer provided by the embodiment of the present invention
The dilatancy of small shower tray, and guarantee the airtightness and electric conductivity of connection simultaneously, so that reaction chamber has better technique
Condition.
It is understood that the principle that embodiment of above is intended to be merely illustrative of the present and the exemplary implementation that uses
Mode, however the present invention is not limited thereto.For those skilled in the art, do not depart from it is of the invention remote
In the case where with essence, various changes and modifications can be made therein, these modification and improvement are also considered as protection scope of the present invention.
Claims (10)
1. a kind of current equalizer, including radio frequency lid and shower tray, the radio frequency lid includes being fixedly connected on integrated two up and down
Point, upper part is discoid the first noumenon, and its underpart is cricoid first connecting portion, and the outer diameter of the first connecting portion is less than
The diameter of the first noumenon, the shower tray include being fixedly connected on integrated two parts up and down, and upper part is the of annular
Two interconnecting pieces, its underpart are the second discoid ontology, and the outer diameter of the second connecting portion is greater than the diameter of second ontology,
It is characterized by:
The first connecting portion with the second connecting portion is circumferentially arranged on its respective lateral wall respectively mutual cooperation
Engaging part so that the radio frequency lid is fixedly connected with the shower tray.
2. current equalizer according to claim 1, it is characterised in that:
The engaging part includes at least two inverted L-shaped cards being uniformly arranged in the circumferential direction on the second connecting portion lateral wall
Hook, and the grab is higher than the lateral wall upper surface of the second connecting portion,
And at least two be uniformly arranged in the circumferential direction on the first connecting portion lateral wall match with the grab shape
Engaging slot, when the grab is sticked in the engaging slot, the grab can rotate between open position and closed position, with
The radio frequency lid and the shower tray is set to open and be closed.
3. current equalizer according to claim 2, it is characterised in that:
Steel ball spring locking device is provided in the engaging slot, when the radio frequency lid and the shower tray engage and rotate to closing
Coincidence postpones, and the steel ball spring locking device locks the radio frequency lid and the shower tray.
4. current equalizer according to claim 1, it is characterised in that: the lower surface of the first connecting portion is provided with annular
Groove,
The upper surface of the second connecting portion is provided with the annular convex platform matched with the annular groove shaped,
The annular groove grafting of the annular convex platform of the second connecting portion and the first connecting portion, to form labyrinthine pathway.
5. current equalizer according to claim 4, it is characterised in that:
The inner sidewall of the annular groove is provided with annular step surface, and the annular step surface is at least one.
6. current equalizer according to claim 4, it is characterised in that:
The inner sidewall of the annular groove is provided with annular mounting groove,
The current equalizer is additionally provided with elastomer, and the elastomer is arranged in the mounting groove, and the elastomer is prominent
The mounting groove.
7. current equalizer according to claim 6, it is characterised in that:
The inner sidewall of the annular groove is provided with elastomer, the fixed company of the inner sidewall of the elastomer and the annular groove
It connects.
8. current equalizer according to claim 6 or 7, it is characterised in that:
The elastomer is high temperature soft rubber or soft metal item.
9. current equalizer according to claim 8, it is characterised in that:
When the elastomer is high temperature soft rubber, it is provided with solenoid simultaneously with elastomer.
10. a kind of reaction chamber, it is characterised in that: including the current equalizer as described in any one of claim 1-9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610090878.8A CN107090575B (en) | 2016-02-17 | 2016-02-17 | A kind of current equalizer and reaction chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610090878.8A CN107090575B (en) | 2016-02-17 | 2016-02-17 | A kind of current equalizer and reaction chamber |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107090575A CN107090575A (en) | 2017-08-25 |
| CN107090575B true CN107090575B (en) | 2019-04-23 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610090878.8A Active CN107090575B (en) | 2016-02-17 | 2016-02-17 | A kind of current equalizer and reaction chamber |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116334585A (en) * | 2021-12-23 | 2023-06-27 | 中微半导体设备(上海)股份有限公司 | Semiconductor equipment shower head and plasma device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1574229A (en) * | 2003-05-22 | 2005-02-02 | 周星工程股份有限公司 | Showerhead assembly and apparatus for manufacturing semiconductor device having the same |
| CN102021530A (en) * | 2009-09-11 | 2011-04-20 | 甘志银 | Reaction chamber of multiple-gas coupling metal metallorganic chemical vapor deposition equipment |
| CN103402299A (en) * | 2008-04-07 | 2013-11-20 | 应用材料公司 | Lower liner with integrated flow equalizer and improved conductance |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10006121B2 (en) * | 2013-03-14 | 2018-06-26 | Eugene Technology Co., Ltd. | Method and apparatus for manufacturing three-dimensional-structure memory device |
-
2016
- 2016-02-17 CN CN201610090878.8A patent/CN107090575B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1574229A (en) * | 2003-05-22 | 2005-02-02 | 周星工程股份有限公司 | Showerhead assembly and apparatus for manufacturing semiconductor device having the same |
| CN103402299A (en) * | 2008-04-07 | 2013-11-20 | 应用材料公司 | Lower liner with integrated flow equalizer and improved conductance |
| CN102021530A (en) * | 2009-09-11 | 2011-04-20 | 甘志银 | Reaction chamber of multiple-gas coupling metal metallorganic chemical vapor deposition equipment |
Non-Patent Citations (1)
| Title |
|---|
| 基于计算流体力学的金属有机物化学气相沉积均流设计;沈桥;《中国优秀硕士学位论文全文数据库信息科技辑》;20130715(第7期);第I135-198页 |
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| CN107090575A (en) | 2017-08-25 |
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Address after: 100176 No. 8 Wenchang Avenue, Beijing economic and Technological Development Zone Applicant after: Beijing North China microelectronics equipment Co Ltd Address before: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Applicant before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |
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