CN105159239B - A kind of SPC strategies automatic update method and SPC Strategy Auto system - Google Patents
A kind of SPC strategies automatic update method and SPC Strategy Auto system Download PDFInfo
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Abstract
The present invention provides a kind of SPC strategies automatic update method and SPC Strategy Auto systems, data acquisition specification information can be captured directly from MES system, and on the basis of original SPC strategies, according to the modification type of data acquisition specification information, it is automatic to carry out the addition of SPC strategies, deletion and modification, to be rapidly completed the renewal of SPC strategies, workload and the working times such as calculating when engineer updates SPC strategies manually, inquiry, input can not only be greatly reduced, but also maloperation caused by renewal manually can be reduced, prevent the error rate of artificial regeneration.The process of the correctness of subsequent survey SPC strategy amendments can further reduce the error rate of more new strategy, improve the reliability and stability of strategy.
Description
Technical field
The present invention relates to field of semiconductor manufacture, more particularly to a kind of SPC strategies automatic update method and SPC Strategy Autos
System.
Background technology
It is an extremely complex mistake from semiconductor monocrystal piece to the process of final finished is made in semiconductor devices production
Journey, from oxidized diffusion, photoetching, etch, washing, deposit etc. is about no less than three or four hundred processes；It is particularly now all kinds of special
Surged with the demand of integrated circuit, most of Semiconductor enterprises have turned to the life towards order from the mode of production towards stock again
Production mode, the production model of Wafer Fab is set also to switch to the life of the multi items of batch by the production of former large batch of single variety
Production pattern, significantly increase the complexity of production process.Manufacturing execution system (manufacturing execution
System, abbreviation MES) thus turn into the management tool that semiconductor production does not connect or lacked, production process can be optimized, really
It is qualified, reliable and stable to protect properties of product, and has high yield rate, including following function：(work during work is carried out
Inprocess, abbreviation WIP) tracking, resource distribution and state, action scheduling, QC data (quality data) are collected and place
Reason control, while MES can also be taken as a central storeroom (central for being used for collecting data and distributing data
Depository), for example, MES can in real time and dynamically collect, combine and represent (express) raw material
(rawmaterials), finished product (finishedproducts), semi-finished product (semifinishedproducts), machine, time
With the data of cost, and follow the trail of and control each production stage.
Meanwhile in semiconductor fabrication process, any one technique may all include many steps, and each step is wrapped again
Include numerous parameters, each parameter in a technique be controlled, be ensure technique be normally carried out, produce meet standard and will
The key factor for the semiconductor devices asked.The parameter of existing semiconductor fabrication process typically passes through SPC systems (Statistical
Process Control, statistical Process Control) control.SPC is technology and method based on statistical theory, by production
During technological parameter qualitative data carry out statistical analysis and tracing, realize real-time monitoring to stable technical process and pre-
Survey, so as to reach note abnormalities, improve in time, reduce fluctuation, ensure stable technical process, product oeverall quality it is reliable and stable it
Purpose.And SPC tactful (strategy) foundation and renewal is the key point place of SPC systems, perfect SPC strategies can be right
Technical process in time, effectively analyze and evaluation.
Multiple controls or monitoring chart (chart) can be set under existing SPC strategies：Average-differential figure (X-
R scheme), mean-standard deviation figure (X-S figures), monodrome-moving range figure (X-MR figures), service chart, exponential weighting move average
Scheme metering type charts such as (EWMA figures)；And percent defective figure (P figures), defective number chart (Pn figures), unit defect map (u
Figure) and population mean, population standard deviation, sample average, sample standard deviation, Cp, Cpk, Cpl, Cpu, histogram index of skewness
(Skewness), the arrangement figure of steepness index (Kurtosis) etc., histogram.It is data query, overall monitoring, on-site supervision, different
Often report can all be expressed by control diagram and each statistical parameter, by these user can be helped to go to supervise from different visual angles
Process status is controlled, is discovered problems and solve them in time.Each chart have the specification of oneself gathered data and the points of collection and
Data type, wherein some of these data needed derives from the DCSpec (data acquisition specification) that MES system is collected, and
Under normal circumstances, MES is realized from SPC and completed by different specialized companies, for example, MES uses the finished product of AIM companies, SPC is used
PDF Products, do not have in system to provide the interface established automatically between MES and SPC, it is impossible to data sharing, MES DC SPEC
When information has modification, collection rule is established or updated the data automatically to the data that SPC systems can not integrate MES system, from
And referenced numerical value during the real-time monitoring to stable technical process and prediction can be caused not to be newest so that in reality
Border can send alarm when producing, and more likely cause product rejection because the data of the collection are not collected into.In the prior art
In order to avoid this problem, it is necessary to which manually SPC systems are safeguarded and designed.Referring to Fig. 1, it is existing that Fig. 1, which show Fig. 1,
The manually schematic flow sheet of automatic updating strategy configuration file in technology.It will be seen that there is DCSpec from Fig. 1
(data acquisition specification) after MES (manufacturing execution system) changes numerical value, SPC systems can not be automatically updated, and need people
The DC SPEC information of work inquiry MES system collection, then according to each technological parameter of DCSpec manual calculations of MES system
Required numerical value, and these numerical value are inputted into PCB system manually, policy configuration file is established and changes, such as artificial set measures
Address port (SITE COUNT), the bound corresponding with SITE COUNT (limit), including：In the control of default
Limit the lower control limit (SPCLCL) of (SPCUCL) and default, and warning numbering (Alarm) etc..This skill updated manually
Following drawback be present in art：
1st, the parameter in a manufacturing process typically has 200~300, if modification individual DCSpec up to a hundred, then need to spend
The time of expense 7 days or so could complete the renewal of all SPC strategies；
2nd, renewal mistake can occur in input unavoidably manually, or computationally lower limit when occur calculating mistake etc., enter
And the mistake of SPC policy updates is caused, carry out hidden danger to process bands；
3rd, if desired whether hand inspection renewal is wrong, then more adds manpower and time.
To sum up, how a kind of SPC strategies are provided and automatically updates scheme, changes the pattern that prior art updates manually, to carry
Height modification efficiency and accuracy rate, are one of those skilled in the art's technical problems urgently to be resolved hurrily.
The content of the invention
It is an object of the invention to provide a kind of SPC strategies automatic update method and SPC Strategy Auto systems, change existing
The pattern that technology updates manually, to improve renewal efficiency and data accuracy.
To solve the above problems, the present invention proposes a kind of SPC strategies automatic update method, including：
Data acquisition specification information is captured in execution system from manufacturing；
Different degrees of SPC strategy amendments are carried out according to the modification type of the data acquisition specification information：
If the modification type of data acquisition specification information keeps original work in SPC strategies to add new technological parameter
The configuration data of skill parameter is constant, and adds the new technological parameter automatically in SPC strategies according to default more new formula
Configuration data；
If the modification type of data acquisition specification information is automatically deleted correspondingly to delete technological parameter in SPC strategies
Technological parameter configuration data, and keep the profile data of remaining technological parameter；
If the modification type of data acquisition specification information is the numerical value of modification technological parameter, modification should in SPC strategies
Middle limit value in technological parameter configuration data.
Further, methods described also includes：Difference is being carried out according to the modification type of the data acquisition specification information
After the SPC strategy amendments of degree, examine SPC strategy amendments whether correct, if correctly, revised SPC strategies come into force, such as
Fruit mistake, prompt error message.
Further, in the data acquisition specification information, the numerical value of a technological parameter includes desired value, lower numerical limit
And limit value.
Further, the configuration data of a technological parameter includes in the SPC strategies：Upper control limit value, lower control limit
Value and middle limit value.
Further, the configuration data of a technological parameter also includes warning numbering in the SPC strategies.
Further, the default more new formula is used for the desired value according to any technological parameter newly added, lower limit number
Value and limit value, calculate the upper control limit value and lower control limit value of any technological parameter newly added.
Further, the configuration number of the new technological parameter is added automatically in SPC strategies according to default more new formula
According to including：SPC upper control limits=desired value+(limit value-desired value) * the first percentage, SPC lower control limits=desired value-
(desired value-lower numerical limit) * the second percentage.
Further, the first percentage is equal with the second percentage, is 75%.
The present invention also provides a kind of SPC Strategy Autos system, including：
Data capture module, for capturing data acquisition specification information from manufacturing execution system；
Strategy Auto module, the data acquisition specification information for being captured for data capture module establish SPC strategies, and root
The modification type of the data acquisition specification information newly captured according to data capture module carries out different degrees of to original SPC strategies
Amendment：
If the modification type of data acquisition specification information keeps original work in SPC strategies to add new technological parameter
The configuration data of skill parameter is constant, and adds the new technological parameter automatically in SPC strategies according to default more new formula
Configuration data；
If the modification type of data acquisition specification information is automatically deleted correspondingly to delete technological parameter in SPC strategies
Technological parameter configuration data, and keep the profile data of remaining technological parameter；
If the modification type of data acquisition specification information is the numerical value of modification technological parameter, modification should in SPC strategies
Middle limit value in technological parameter configuration data.
Further, described SPC Strategy Autos system also comes into force module including inspection, in Strategy Auto module pair
After original SPC strategies carry out different degrees of amendment, examine the amendment whether correct, if correctly, revised SPC
Strategy comes into force, if mistake, prompts error message.
Compared with prior art, SPC strategies automatic update method and SPC Strategy Auto system provided by the invention, according to
The modification type of data acquisition specification information, it is automatic to carry out the addition of SPC strategies, deletion and modification, to be rapidly completed SPC strategies
Renewal, when can not only greatly reduce the workloads such as calculating when engineer updates SPC strategies manually, inquiry, input and work
Between, but also maloperation caused by renewal manually can be reduced, prevent the error rate of artificial regeneration.Subsequent survey SPC strategies
The process of the correctness of amendment can further reduce the error rate of more new strategy, improve the reliability and stability of strategy, together
When the error message prompted the data modification of MES system can be given to provide a kind of feedback.
Brief description of the drawings
Fig. 1 is a kind of method flow diagram of artificial regeneration SPC strategies of the prior art；
Fig. 2 is the structural representation of the SPC Strategy Auto systems of the specific embodiment of the invention；
Fig. 3 is the SPC strategy automatic update method flow charts of the specific embodiment of the invention；
SPC strategy automatic update method flow charts when Fig. 4 is the DCspec addition new projects of the specific embodiment of the invention.
Embodiment
To become apparent the purpose of the present invention, feature, the embodiment of the present invention is made below in conjunction with the accompanying drawings
Further instruction, however, the present invention can be realized with different forms, should not be to be confined to described embodiment.
Fig. 2 is refer to, Fig. 2 is the configuration diagram of the preferred embodiment of SPC Strategy Autos system one of the present invention.Need
Bright, SPC Strategy Autos system of the invention can be applied in MES/SFC combined system frameworks, SPC Strategy Auto systems
In each module, can be realized, can also be realized in the form of hardware in the form of software, software and hardware phase can also be used
With reference to form occur.Some functional modules even in, the existing capability module of MES/SFC systems can be used.
It refer to Fig. 2, the SPC Strategy Auto systems that the present embodiment provides, including：
Data capture module 20, for capturing data acquisition specification information from manufacturing execution system；
Strategy Auto module 21, the data acquisition specification information for being captured for data capture module establish SPC strategies, and
The modification type of the data acquisition specification information newly captured according to data capture module carries out different degrees of to original SPC strategies
Amendment：
If the modification type of data acquisition specification information keeps original work in SPC strategies to add new technological parameter
The configuration data of skill parameter is constant, and adds the new technological parameter automatically in SPC strategies according to default more new formula
Configuration data；
If the modification type of data acquisition specification information is automatically deleted correspondingly to delete technological parameter in SPC strategies
Technological parameter configuration data, and keep the profile data of remaining technological parameter；
If the modification type of data acquisition specification information is the numerical value of modification technological parameter, modification should in SPC strategies
Middle limit value in technological parameter configuration data；
Inspection comes into force module 22, for carrying out different degrees of amendment to original SPC strategies in Strategy Auto module 21
Afterwards, examine the amendment whether correct, if correctly, revised SPC strategies come into force, if mistake, prompt error message.
Fig. 2 is refer to, the DCspec information (data acquisition specification information) that data capture module 20 gathers MES system batch
Amount is synchronous to enter the database of SPC systems, and synchrodata is carried out into format conversion processing, to meet SPC system databases
Data acquisition call format, and it is stored in SPC system databases.It is possible thereby to enter row information comparison in SPC system databases, really
Determine the data modification type of DCspec information：Modification numerical value is deleted, adds item (project, i.e. technological parameter), and then can be with
So that Strategy Auto module 21 is carried out accordingly according to the data modification type of the DCspec information newly captured to original SPC strategies
Amendment.In other embodiments of the invention, data capture module 20 is only grabbed when capturing the DCspec information of MES system
The DCspec information changed in MES system is taken, to reduce the amount of calculation of SPC internal systems.Data capture module 20 is related to
Data grabber frequency, the stability of general data crawl frequency and MES system and its process equipment of control have substantial connection, led to
If the stability of normal MES system is higher, data grabber frequency can be with relative reduction.Wherein, the data acquisition specification information
Middle DCspec information mainly includes desired value, lower numerical limit and the limit value of technological parameter.
Please continue to refer to Fig. 2, Strategy Auto module 21 be data capture module 20 capture all DCspec information according to
Corresponding setting rule, creates gathered data rule, generates configuration file corresponding with each gathered data rule, can wrap
Include：Setting file, data analysis and the regular related setting file of data acquisition related data, control bound and alarm setting
Related setting file, module message file, data collecting rule essential information etc..Strategy Auto module 21 has in the prior art
Basic function：Control diagram chart is set, sampling plan sets, sentences different rule setting.Thus original SPC is created
Strategy.When the DCspec information of the collection in MES system changes, Strategy Auto module 21 needs adaptively to update plan
Slightly, it is specifically as follows：
If the modification type of data acquisition specification information keeps original work in SPC strategies to add new technological parameter
The configuration data of skill parameter is constant, and adds the new technological parameter automatically in SPC strategies according to default more new formula
Configuration data, including upper control limit value, lower control limit value and middle limit value, warning numbering can also be included, wherein more new formula
Including：SPC upper control limits=desired value+(limit value-desired value) * the first percentage, SPC lower control limits=desired value-(mesh
Scale value-lower numerical limit) the * the second percentage, control middle limit=desired value；Preferably, the first percentage and the second percentage phase
Deng, be 75%, certainly in other embodiments the first percentage and the second percentage can with it is unequal or 50% with
On any numerical value；
If the modification type of data acquisition specification information is automatically deleted correspondingly to delete technological parameter in SPC strategies
Technological parameter configuration data, and keep the profile data of remaining technological parameter；
If the modification type of data acquisition specification information is the numerical value of modification technological parameter, modification should in SPC strategies
Middle limit value in technological parameter configuration data.
Further, the default more new formula is used for the desired value according to any technological parameter newly added, lower limit number
Value and limit value, calculate the upper control limit value and lower control limit value of any technological parameter newly added.
Inspection module 22 is used to detect the technological parameter data of data capture module crawl and according to the technological parameter number
It is whether correct according to the SPC strategy amendments of progress, if correctly, new SPC strategies come into force, if mistake, new SPC strategy nothings
Effect, concurrently send error information to operating personnel.Such as the new upper control limit that is calculated according to new technological parameter data and
Whether lower control limit is correct, if correctly, new SPC strategies create successfully, if mistake, prompts that new SPC plans can not be created
Slightly the reason for.
SPC Strategy Autos system does not limit SPC policy update quantity, no during renewal SPC tactful (strategy)
Same strategy can be created simultaneously, more than 70% be saved on the time, and ensure the correctness of data.Also reduce simultaneously
Opertions engineering teacher workload and the working time.
Below referring to Fig. 3, automatically updating flow progress to the SPC strategies of the SPC Strategy Auto systems of the invention described above
Narration in detail.
It refer to Fig. 3, the SPC strategies in the SPC strategy automatic update methods that the present embodiment provides are used to control semiconductor
Each technological parameter of one product manufacture, it includes SPC rule (SPC rules) and SPC control limit (SPC
Control limit), for collecting, calculating, analyzing and improving data, it is determined that on the basis of technical process zone of reasonableness, determine work
The control range and parameter of skill parameter are normal, anomaly regularity, and default corrective measure, to exceed in parameters of technique process in control
When limit, lower control limit, improved measure is practiced.Therefore, the present embodiment captures from MES (manufacturing execution system)
Each item (project) in DCSpec (data acquisition specification) information refers to each technological parameter of SPC system monitorings, its
Data modification type mainly newly-increased item (project), deletion item (project) and the setting value to item (project) are repaiied
Change, setting value includes desired value, lower numerical limit and limit value.The SPC strategy automatic update methods of the present embodiment this SPC strategies
Method for building up comprises the following steps：
S1, data acquisition specification information is captured in execution system from manufacturing；
S2, different degrees of SPC strategy amendments are carried out according to the modification type of the data acquisition specification information：
S21, if the modification type of data acquisition specification information keeps SPC strategies Central Plains to add new technological parameter
Have that the configuration data of technological parameter is constant, and add the new technique automatically in SPC strategies according to default more new formula and join
Several configuration datas；
S22, if the modification type of data acquisition specification information is automatically deleted to delete technological parameter in SPC strategies
The configuration data of corresponding technological parameter, and keep the profile data of remaining technological parameter；
S23, if the modification type of data acquisition specification information is the numerical value of modification technological parameter, repaiied in SPC strategies
Change the middle limit value in the technological parameter configuration data.
S3, after different degrees of SPC strategy amendments are carried out according to the modification type of the data acquisition specification information,
Examine SPC strategy amendments whether correct, if correctly, revised SPC strategies come into force, if mistake, prompt error message.
In step S1, newest DCSpec data are captured from MES system and are stored that data into SPC databases, should
Data include the reference datas such as desired value, lower numerical limit and the limit value of at least one technological parameter.
In step S2, it is necessary to according to newest when updating SPC strategy configuration datas according to newest DCspec data
The modification type of DCspec data updates to carry out different SPC strategies configuration datas, specific as follows：
First, newest DCspec data and the data of SPC databases storage originally are contrasted, determines DCspec numbers
According to modification type；
If newly-increased item (project), refer to Fig. 4, in the step s 21, the mode of renewal SPC strategy configuration datas is guarantor
It is constant to hold other item SPC configuration datas, it is automatic to add new projects' configuration data file, including newly-increased item is carried out automatically
Sort out, and data drawing list type (chart type) is set according to classification where it and measures the points SITE of (sampling)
Count；It is automatic to calculate control bound and draw control figure and on the basis of original warning numbering rule and numbering quantity
Warning numbering is added, wherein more new formula is：SPC upper control limits=desired value+(limit value-desired value) * the first percentage,
SPC lower control limits=desired value-(desired value-lower numerical limit) * the second percentage, middle limit=desired value；Further, first
Percentage is equal with the second percentage, is 75%；
If deleting item, in step S22, the mode of renewal SPC strategy configuration datas is to keep other item SPC
Configuration data is constant, is automatically deleted all configuration data files of the project；
If only changing certain project item numerical value, in step S23, the work project configuration number is changed in SPC strategies
Middle limit value in, the control upper and lower limit of the project and the configuration data of remaining project are constant.
Step S3, after Strategy Auto module carries out different degrees of amendment to original SPC strategies, repaiied described in inspection
It is just whether correct, if correctly, revised SPC strategies come into force, if mistake, prompt error message.If manually verify again
After error situation, the error source is determined in MES system, then the data modification to MES system provides a kind of feedback.
Experiment proves that update tactful (strategy) processes of SPC using the SPC strategies automatic update method of the present embodiment
In, SPC policy update quantity can not be limited, multiple new different strategy can simultaneously be created, saved on the time
More than 70%, and the correctness of data can be ensured, while the also workload of opertions engineering teacher of reduction and the working time.
In summary, SPC strategies automatic update method and SPC Strategy Auto system provided by the invention, is adopted according to data
Collect the modification type of specification information, carry out the addition of SPC strategies automatically, delete and change, to be rapidly completed the renewal of SPC strategies,
Workload and the working times such as calculating when engineer updates SPC strategies manually, inquiry, input can not only be greatly reduced, and
And maloperation caused by renewal manually can also be reduced, prevent the error rate of artificial regeneration.Subsequent survey SPC strategy amendments
The process of correctness can further reduce the error rate of more new strategy, improve the reliability and stability of strategy, prompt simultaneously
Error message the data modification of MES system can be given to provide a kind of feedback.
Obviously, those skilled in the art can carry out the spirit of various changes and modification without departing from the present invention to invention
And scope.So, if these modifications and variations of the present invention belong to the claims in the present invention and its equivalent technologies scope it
Interior, then the present invention is also intended to comprising including these changes and modification.
Claims (10)
1. a kind of SPC strategies automatic update method, including data acquisition specification information is captured in execution system from manufacturing；Its
It is characterised by, in addition to：
Different degrees of SPC strategy amendments are carried out according to the modification type of the data acquisition specification information：
If the modification type of data acquisition specification information keeps original technique ginseng in SPC strategies to add new technological parameter
Several configuration datas is constant, and adds the configuration of the new technological parameter automatically in SPC strategies according to default more new formula
Data；
If the modification type of data acquisition specification information is automatically deleted corresponding work to delete technological parameter in SPC strategies
The configuration data of skill parameter, and keep the profile data of remaining technological parameter；
If the modification type of data acquisition specification information is the numerical value of modification technological parameter, the technique is changed in SPC strategies
Middle limit value in parameter configuration data.
2. SPC strategies automatic update method as claimed in claim 1, it is characterised in that according to the data acquisition specification
After the modification type of information carries out different degrees of SPC strategy amendments, examine SPC strategy amendments whether correct, if correctly,
Revised SPC strategies come into force, if mistake, prompt error message.
3. SPC strategies automatic update method as claimed in claim 1, it is characterised in that in the data acquisition specification information,
The numerical value of one technological parameter includes desired value, lower numerical limit and limit value.
4. SPC strategies automatic update method as claimed in claim 3, it is characterised in that a technique ginseng in the SPC strategies
Several configuration datas include：Upper control limit value, lower control limit value and middle limit value.
5. SPC strategies automatic update method as claimed in claim 4, it is characterised in that a technique ginseng in the SPC strategies
Several configuration datas also includes warning numbering.
6. SPC strategies automatic update method as claimed in claim 4, it is characterised in that the default more new formula is used for root
According to the desired value of the technological parameter arbitrarily newly added, lower numerical limit and limit value, any technological parameter newly added is calculated
Upper control limit value and lower control limit value.
7. SPC strategies automatic update method as claimed in claim 6, it is characterised in that according to default more new formula in SPC plans
Automatically the configuration data of the new technological parameter is added in slightly to be included：SPC upper control limits=desired value+(limit value-target
Value) the * the first percentage, SPC lower control limits=desired value-(desired value-lower numerical limit) * the second percentage.
8. SPC strategies automatic update method as claimed in claim 7, it is characterised in that the first percentage and the second percentage
It is equal, it is 75%.
9. a kind of SPC Strategy Auto systems of SPC strategy automatic update methods using any one of claim 1 to 8,
It is characterised in that it includes：
Data capture module, for capturing data acquisition specification information from manufacturing execution system；
Strategy Auto module, the data acquisition specification information for being captured for data capture module establish SPC strategies, and according to number
The modification type of the data acquisition specification information newly captured according to handling module carries out different degrees of repair to original SPC strategies
Just：
If the modification type of data acquisition specification information keeps original technique ginseng in SPC strategies to add new technological parameter
Several configuration datas is constant, and adds the configuration of the new technological parameter automatically in SPC strategies according to default more new formula
Data；
If the modification type of data acquisition specification information is automatically deleted corresponding work to delete technological parameter in SPC strategies
The configuration data of skill parameter, and keep the profile data of remaining technological parameter；
If the modification type of data acquisition specification information is the numerical value of modification technological parameter, the technique is changed in SPC strategies
Middle limit value in parameter configuration data.
10. SPC Strategy Autos system as claimed in claim 9, it is characterised in that also come into force module including inspection, for
After Strategy Auto module carries out different degrees of amendment to original SPC strategies, examine the amendment whether correct, if just
Really, revised SPC strategies come into force, if mistake, prompt error message.
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| US20220019203A1 (en) * | 2020-07-16 | 2022-01-20 | Changxin Memory Technologies, Inc. | Method and device for processing semiconductor manufacturing information |
| CN113947267A (en) * | 2020-07-16 | 2022-01-18 | 长鑫存储技术有限公司 | Method and apparatus for processing semiconductor manufacturing information |
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