RCA clean (Q1903370)

From Wikidata
Jump to navigation Jump to search
standard set of wafer cleaning steps which need to be performed before high-temperature processing steps of silicon wafers in semiconductor manufacturing
edit
Language Label Description Also known as
English
RCA clean
standard set of wafer cleaning steps which need to be performed before high-temperature processing steps of silicon wafers in semiconductor manufacturing

    Statements

    0 references

    Identifiers

     
    edit
      edit
        edit
          edit
            edit
              edit
                edit
                  edit