We present a novel topology of heterodyne nanoelectromechanical self-oscillator, aimed at
the dense integration of resonator arrays for sensing applications. This oscillator is based on
an original measurement method, suitable for both open loop and closed loop operations,
which simplifies current down-mixing set-ups. When implemented on-chip, it will allow the
reduction of the size and power consumption of readout CMOS circuitry. This is today the
limiting factor for the integration density of NEMS oscillators for real-life applications. Here …