Aug 31, 2017 · This paper proposes supervised data learning techniques for fast yet consistent SRAF generation with high-quality results. We first propose the ...

This paper proposes supervised data learning techniques for fast yet consis- tent SRAF generation with high-quality results. We first propose the constrained ...

This paper is the first to generate SRAFs using reinforcement learning to address SRAF interference and produce mask-rule-compliant results directly.

Oct 22, 2024 · This paper proposes supervised data learning techniques for fast yet consistent SRAF generation with high-quality results. We first propose the ...

Dec 22, 2022 · In this paper, we are the first to generate SRAFs using reinforcement learning to address SRAF interference and produce mask-rule-compliant results directly.

The experimental results demonstrate that GAN-SRAF achieves ∼14.6× reduction in computational cost compared to state-of-art machine learning SRAF generation ...

Sub-Resolution Assist Feature (SRAF) generation is a very important resolution enhancement technique to improve yield in modern semiconductor manufacturing ...

In this research, an IM method for dynamic networks has been proposed which uses a deep Q-learning (DQL) approach. To learn dynamic features from the network ...

The experimental results demonstrate that GAN-SRAF achieves ∼14.6× reduction in computational cost compared to state-of-art machine learning SRAF generation ...

This paper is the first to generate SRAFs using reinforcement learning to address SRAF interference and produce mask-rule-compliant results directly, ...