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The dual-mode LWR consists of floating electrodes positioned between interdigital electrodes (IDTs), which results in two resonant peaks, operating at 1.69GHz ...
Abstract—In this paper, we present a tunable dual-mode. Lamb wave resonator (LWR) based on Aluminum nitride thin films. The dual-mode LWR consists of ...
A Tunable Dual-mode Lamb Wave Resonator with Floating Electrodes. May 2023 ... The Multi-Mode Resonance in AlN Lamb Wave Resonators. Article. Full-text ...
A Tunable Dual-mode Lamb Wave Resonator with Floating Electrodes. 2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems ...
... modes in lateral-excited bulk acoustic wave resonators using piston mode electrodes ... A Tunable Dual-mode Lamb Wave Resonator with Floating Electrodes. Z Wen, X ...
AlN/ScAlN composite films-based spurious free A1 mode lamb wave resonator with adjustable effective electromechanical coupling coefficient ... A Tunable Dual-mode ...
This paper presents the use of ferroelectric behavior in scandium–aluminum nitride (ScxAl1−xN) to create dual-mode Lamb-wave resonators for the realization ...
Spurious-Free S₁ Mode AlN/ScAlN-Based Lamb Wave Resonator With Trapezoidal Electrodes ... A Tunable Dual-mode Lamb Wave Resonator with Floating Electrodes. Z Wen, ...
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An A0 mode Lamb-wave AlN resonator on SOI substrate with vertically arranged double-electrodes. J. Micromech. Microeng. 2022, 32, 095004. [Google Scholar] ...
This paper proposes a method of spurious mode suppression by reducing the overlap length of electrodes according to modal shapes. The AlN/Al 0.8 Sc 0.2 N ...