In this paper, we propose a point approximation calibration method based on the least squares method to improve the accuracy of the stage.
A Novel XY-Plane Positioning Based on Point. Approximation for Wafer Stage Control. Seongjin Oh, Tae-yong Kim, Jongpil Jeong, and Chae-gyu Lee. Department of ...
Three-dimensional wafer stage is an important component of lithography. It is required to high positioning precision and efficiency.
Article "A Novel XY-Plane Positioning Based on Point Approximation for Wafer Stage Control" Detailed information of the J-GLOBAL is an information service ...
A Novel XY-Plane Positioning Based on Point Approximation for Wafer Stage Control. S Oh, T Kim, J Jeong, C Lee, Y Na, S Ryu. 2023 IEEE/ACIS 8th International ...
A Novel XY-Plane Positioning Based on Point Approximation for Wafer Stage Control. S Oh, T Kim, J Jeong, C Lee, Y Na, S Ryu. 2023 IEEE/ACIS 8th International ...
A Novel XY-Plane Positioning Based on Point Approximation for Wafer Stage Control ... The stage includes theWafer holder, Ellipsometer, and controller, and ...
(2023) A Novel XY-Plane Positioning Based on Circle Approximation for Wafer Stage Control. BCD 2023. VIET NAM; (2023) Audio Spectrogram Transformer-based ...
A Novel XY-Plane Positioning Based on Point Approximation for Wafer Stage Control. Authors. Seongjin Oh · Tae-yong Kim · Jongpil Jeong · Chae-gyu Lee · Yongju ...
3-DOF, granite-based XY-Theta stage using direct drive motors and air bearings for the highest possible accuracy, speed, and lifetime.
Missing: Novel Point Approximation