Angela Duparré,
Josep Ferre-Borrull,
Stefan Gliech,
Gunther Notni,
Jörg Steinert,
and Jean M. Bennett
When this research was performed, A. Duparré ([email protected]), J. Ferre-Borrull, S. Gliech, G. Notni, and J. Steinert were with the Optical Systems Department, Fraunhofer Institute for Applied Optics and Precision Engineering, Schillerstrasse 1, D-07745 Jena, Germany.
J. Ferre-Borrull is now with the Applied Physics and Optics Department, University of Barcelona, Diagonal 647, E-08028 Barcelona, Spain.
J. M. Bennett ([email protected]) is with the Physics Division, Naval Air Warfare Center, China Lake, California 93555.
Angela Duparré, Josep Ferre-Borrull, Stefan Gliech, Gunther Notni, Jörg Steinert, and Jean M. Bennett, "Surface characterization techniques for determining the root-mean-square roughness and power spectral densities of optical components," Appl. Opt. 41, 154-171 (2002)
Surface topography and light scattering were measured on 15 samples
ranging from those having smooth surfaces to others with ground
surfaces. The measurement techniques included an atomic force
microscope, mechanical and optical profilers, confocal laser scanning
microscope, angle-resolved scattering, and total scattering. The
samples included polished and ground fused silica, silicon carbide,
sapphire, electroplated gold, and diamond-turned brass. The
measurement instruments and techniques had different surface spatial
wavelength band limits, so the measured roughnesses were not directly
comparable. Two-dimensional power spectral density (PSD)
functions were calculated from the digitized measurement data, and we
obtained rms roughnesses by integrating areas under the PSD curves
between fixed upper and lower band limits. In this way, roughnesses
measured with different instruments and techniques could be directly
compared. Although smaller differences between measurement
techniques remained in the calculated roughnesses, these could be
explained mostly by surface topographical features such as isolated
particles that affected the instruments in different ways.
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.
You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.
You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.
You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.
Standard chemical–mechanical polish.
Diamond-turned aluminum substrate.
Polished glass substrate.
Diamond turned on center, 10-µm groove
spacing plus additional roughness caused by tool-sample vibration;
corrosion spots on surface.
Table 2
Measured Average rms Roughnesses (nm) Obtained with an
AFM and a Talystep Mechanical Profiler
AFM values are the average of two
readings at different places on the samples.
Talystep values are the average of six readings
at different places on the samples.
Standard polish.
Coarse ground.
Sample was too rough to measure and was out of
instrument range.
Table 3
Measured Average rms Roughnesses (nm) Obtained with a
WLI and a LSM
Surface Spatial Frequency and Surface Spatial Wavelength
Ranges for the Raw Measurements (the Theoretical Ranges of the
Instruments are Larger) and for the PSD Curves for all Measuring
Instruments
Standard chemical–mechanical polish.
Diamond-turned aluminum substrate.
Polished glass substrate.
Diamond turned on center, 10-µm groove
spacing plus additional roughness caused by tool-sample vibration;
corrosion spots on surface.
Table 2
Measured Average rms Roughnesses (nm) Obtained with an
AFM and a Talystep Mechanical Profiler
AFM values are the average of two
readings at different places on the samples.
Talystep values are the average of six readings
at different places on the samples.
Standard polish.
Coarse ground.
Sample was too rough to measure and was out of
instrument range.
Table 3
Measured Average rms Roughnesses (nm) Obtained with a
WLI and a LSM
Surface Spatial Frequency and Surface Spatial Wavelength
Ranges for the Raw Measurements (the Theoretical Ranges of the
Instruments are Larger) and for the PSD Curves for all Measuring
Instruments
Add to BibSonomy