"Scheduling of time-constrained single-arm cluster tools with purge ..."

Fenglian Yuan et al. (2023)

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DOI: 10.1016/J.SYSARC.2022.102788

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type: Journal Article

metadata version: 2023-01-14

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Fenglian Yuan, Qingling Zhao, Bo Huang, Chunrong Pan:
Scheduling of time-constrained single-arm cluster tools with purge operations in wafer fabrications. J. Syst. Archit. 134: 102788 (2023)

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