"Redesigned Microcantilevers for Sensitivity Improvement of ..."

Ren Kaneta et al. (2022)

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DOI: 10.20965/JRM.2022.P0677

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type: Journal Article

metadata version: 2022-07-07

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Ren Kaneta, Takumi Hasegawa, Jun Kido, Takashi Abe, Masayuki Sohgawa:
Redesigned Microcantilevers for Sensitivity Improvement of Microelectromechanical System Tactile Sensors. J. Robotics Mechatronics 34(3): 677-682 (2022)

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