"High-speed on-chip local flow control by synchronized actuation of ..."

Yusuke Kasai et al. (2016)

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DOI: 10.1109/MHS.2016.7824192

access: closed

type: Conference or Workshop Paper

metadata version: 2022-06-23

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Yusuke Kasai, Shinya Sakuma, Takeshi Hayakawa, Fumihito Arai:
High-speed on-chip local flow control by synchronized actuation of piezo-driven dual membrane pumps. MHS 2016: 1-2

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