"Sensitivity Enhancement of MEMS Tactile Sensor by Redesign of ..."

Ren Kaneta et al. (2021)

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DOI: 10.1109/SENSORS47087.2021.9639799

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type: Conference or Workshop Paper

metadata version: 2022-12-14

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Ren Kaneta, Takumi Hasegawa, Takashi Abe, Masayuki Sohgawa:
Sensitivity Enhancement of MEMS Tactile Sensor by Redesign of Microcantilever and Strain Gauge. IEEE SENSORS 2021: 1-4

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