"Fabrication Process of Nonarcing Power MEMS Switch."

Yu Yonezawa et al. (2005)

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DOI: 10.1093/IETELE/E88-C.8.1629

access: closed

type: Journal Article

metadata version: 2020-04-11

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Yu Yonezawa, Noboru Wakatsuki, Yoshio Satoh, Tadashi Nakatani, Koichiro Sawa:
Fabrication Process of Nonarcing Power MEMS Switch. IEICE Trans. Electron. 88-C(8): 1629-1634 (2005)

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