"Simulation of a Low Frequency Z-Axis SU-8 Accelerometer in CoventorWare ..."

Armando Arpys Arevalo Carreno et al. (2013)

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DOI: 10.1109/UKSIM.2013.41

access: closed

type: Conference or Workshop Paper

metadata version: 2017-09-16

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Armando Arpys Arevalo Carreno, David Conchouso, Amir Zaher, Ian G. Foulds, Jürgen Kosel:
Simulation of a Low Frequency Z-Axis SU-8 Accelerometer in CoventorWare and MEMS+. UKSim 2013: 792-797

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