"Design of a three-component force sensor based on MEMS strain gauges."

Yingxue Li et al. (2015)

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DOI: 10.1109/NEMS.2015.7147500

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Yingxue Li, Yulong Zhao, Minghao Zhang, Peng Wang:
Design of a three-component force sensor based on MEMS strain gauges. NEMS 2015: 597-601

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