"A novel piezoresistive sensitive structure for micromachined high-pressure ..."

Xin Guo et al. (2017)

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DOI: 10.1109/NEMS.2017.8017123

access: closed

type: Conference or Workshop Paper

metadata version: 2023-11-10

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Xin Guo, Rahman Hebibul, Zhuangde Jiang, Libo Zhao, Tingzhong Xu, Zhiming Zhao, Zhikang Li, Yu Xu, Wendi Gao:
A novel piezoresistive sensitive structure for micromachined high-pressure sensors. NEMS 2017: 728-731

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