"A Resonant Differential Pressure Sensor Based on Bulk Silicon Technology."

Chao Cheng et al. (2021)

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DOI: 10.1109/NEMS51815.2021.9451493

access: closed

type: Conference or Workshop Paper

metadata version: 2023-10-23

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Chao Cheng, Yadong Li, Yulan Lu, Chao Xiang, Jian Chen, Junbo Wang, Deyong Chen:
A Resonant Differential Pressure Sensor Based on Bulk Silicon Technology. NEMS 2021: 193-196

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