"Electron Beam Tester Integrated into a VLSI Tester."

Hironobu Niijima et al. (1988)

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DOI: 10.1109/TEST.1988.207879

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-24

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Hironobu Niijima, Yasuo Tokunaga, Shouichi Koshizuka, Kazuo Yakuwa, Péter Fazekas, Mathias Sturm, Hans-Peter Feuerbaum:
Electron Beam Tester Integrated into a VLSI Tester. ITC 1988: 908-913

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