"Effective two-dimensional pattern generation for self-aligned double ..."

Takeshi Ihara, Atsushi Takahashi, Chikaaki Kodama (2015)

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DOI: 10.1109/ISCAS.2015.7169103

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-21

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Takeshi Ihara, Atsushi Takahashi, Chikaaki Kodama:
Effective two-dimensional pattern generation for self-aligned double patterning. ISCAS 2015: 2141-2144

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