"Position, damping and inertia control of parallel-plate electrostatic ..."

Daniel Fernández, Jordi Madrenas, Jordi Cosp (2008)

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DOI: 10.1109/ISCAS.2008.4541868

access: closed

type: Conference or Workshop Paper

metadata version: 2022-06-23

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Daniel Fernández, Jordi Madrenas, Jordi Cosp:
Position, damping and inertia control of parallel-plate electrostatic actuators. ISCAS 2008: 2118-2121

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