"Device Technology for embedded DRAM utilizing stacked ..."

Yasushi Yamagata et al. (2006)

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DOI: 10.1109/CICC.2006.320987

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type: Conference or Workshop Paper

metadata version: 2017-05-17

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Yasushi Yamagata, Hiroki Shirai, Hirotoshi Sugimura, S. Arai, Tomoko Wake, Ken Inoue, Takashi Sakoh, Masato Sakao, Takaho Tanigawa:
Device Technology for embedded DRAM utilizing stacked MIM(Metal-Insulator-Metal) Capacitor. CICC 2006: 421-427

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