"Spatial-temporal control of dual-stage nanpositioners."

Garrett M. Clayton, Kam K. Leang (2012)

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DOI: 10.1109/CDC.2012.6426005

access: closed

type: Conference or Workshop Paper

metadata version: 2017-06-01

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Garrett M. Clayton, Kam K. Leang:
Spatial-temporal control of dual-stage nanpositioners. CDC 2012: 5085-5090

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