"Cyclic Scheduling of Single-arm Cluster Tools with Equipment Front-End ..."

Baoying Huang et al. (2024)

> Home

Details and statistics

DOI: 10.1109/CASE59546.2024.10711364

access: closed

type: Conference or Workshop Paper

metadata version: 2024-11-07

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/case/HuangWQZ24
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/case/HuangWQZ24
Baoying Huang, Naiqi Wu, Yan Qiao, Siwei Zhang:
Cyclic Scheduling of Single-arm Cluster Tools with Equipment Front-End Module and One-in-one-out Loadlocks. CASE 2024: 3412-3417

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.