File:EUV SMO effectiveness vs. pitch.png
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Summary
| Description | The EUV SMO performance based on normalized image log-slope (NILS) optimization for 32 nm pitch logic metal layout and through-pitch structures is only successful for 34-38 nm pitch (NILS = 2.0-2.15), while not satisfactory for other pitches, even though the target was 32 nm. Ref.: R-H. Kim et al., Proc. SPIE 9771, 97716R (2016). |
| Date | |
| Source | Excel |
| Author | Guiding light |
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| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2017-05-27 06:47:39 | 481 × 290 | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 15:53, 2 April 2020 | | 481 × 290 (11 KB) | Hippymoose17 | Transferred from en.wikipedia (MTC!) (1.1.0) |
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